公开(公告)号：KR1020120001274A

公开(公告)日：2012-01-04

申请号：KR1020100061984

申请日：2010-06-29

Applicant: 한국산업기술대학교산학협력단

Inventor： 이희철 ,  김형수

IPC: H01L31/04

CPC classification number: Y02E10/50 ,  H01L31/04

Abstract: PURPOSE: A reactive ion etching apparatus and a method for texturing a solar battery using the same are provided to enhance efficiency of texturing by executing chemical etch and physical etch with a single process and forming a complex etching structure on the surface of the solar battery. CONSTITUTION: A thin film is evaporated on the substrate of a solar battery. The thin film is composed of SiO2. The thickness of a thin film which is evaporated is more than 3000Å. A pattern is transferred on the upper side of the thin film. The thin film is isotropically etched using a transferred pattern as mask. The thin film is anisotropically etched using the transferred pattern as mask. Isotropic etching and anisotropic etching are executed in a reactive ion etching apparatus.

Abstract translation: 目的：提供一种反应离子蚀刻装置和使用其的用于纹理化太阳能电池的方法，以通过用单一工艺执行化学蚀刻和物理蚀刻来提高纹理化的效率，并在太阳能电池的表面上形成复杂的蚀刻结构。 构成：在太阳能电池的基板上蒸发薄膜。 薄膜由SiO2组成。 蒸发的薄膜的厚度大于3000。 在薄膜的上侧传送图案。 使用转印图案作为掩模来均匀地蚀刻薄膜。 使用转印图案作为掩模对薄膜进行各向异性蚀刻。 在反应离子蚀刻装置中进行各向同性蚀刻和各向异性蚀刻。

公开(公告)号：KR1020110139515A

公开(公告)日：2011-12-29

申请号：KR1020100059644

申请日：2010-06-23

Applicant: 한국산업기술대학교산학협력단

Inventor： 이희철 ,  이성의 ,  변진무

IPC: H01L41/318 ,  H01L41/39

CPC classification number: H01L41/318 ,  C04B35/491 ,  H01L41/1876 ,  H01L41/39

Abstract: PURPOSE: A fabrication method of thin piezoelectric films with high piezoelectric constant is provided to implement rapid reaction between materials by using a distillation with high temperature in manufacturing a PZT sol-gel solution. CONSTITUTION: In a fabrication method of thin piezoelectric films with high piezoelectric constant, a lead precursor is dissolved in C1-C10 alkoxy alcohol. The lead precursor solution is manufactured. A zirconium precursor and a titanium precursor are mixed in the C1-C10 alkoxy alcohol. A zirconium / titanium precursor solution is manufactured. The lead precursor solution and zirconium / titanium precursor solution are mixed. A PZT solution is manufactured. The C1-C10 alkoxy alcohol and ethylene glycol are added to the PZT solution. A PZT sol-gel solution is manufactured. The PZT sol-gel solution is heat-treated and is coated in the top of the substrate.

Abstract translation: 目的：提供一种具有高压电常数的薄压电薄膜的制造方法，通过在制造PZT溶胶 - 凝胶溶液中使用高温蒸馏来实现材料之间的快速反应。 构成：在具有高压电常数的薄压电薄膜的制造方法中，将铅前体溶解在C1-C10烷氧基醇中。 制造铅前体溶​​液。 将锆前体和钛前体混合在C1-C10烷氧基醇中。 制造锆/钛前体溶液。 铅前体溶液和锆/钛前体溶液混合。 制造PZT溶液。 将C1-C10烷氧基醇和乙二醇加入到PZT溶液中。 制造PZT溶胶 - 凝胶溶液。 PZT溶胶 - 凝胶溶液被热处理并涂覆在基材的顶部。