Abstract:
PURPOSE: A method for forming a through silicon via is provided to prevent the performance deterioration of a device after a final packaging process by obtaining a uniform step coverage when a dielectric layer, a diffusion preventing layer, and a seed layer are deposited. CONSTITUTION: A via is formed on a silicon substrate by etching the silicon substrate(10). A part of a scallop on the sidewall of the via is removed(20). The surface of the scallop is oxidized(30). The scallop is removed by etching an oxide layer formed on the surface of the scallop(40).
Abstract:
본 발명은 무기발광소자 및 그 제조방법에 관한 것으로, 무기발광소자에 있어서, 기 설정된 간격을 갖도록 주기적으로 배치된 구조를 갖는 패턴된 금속전극; 및 상기 패턴된 금속전극의 상부에 위치하는 형광층을 포함하며, 상기 패턴된 금속전극이 배치된 순서에 따라 양극과 음극이 교대로 인가됨에 따라 상기 형광층에서 발광한 빛이 상기 패턴된 금속전극의 사이로 방출되는 것을 특징으로 한다.
Abstract:
PURPOSE: An active wireless power apparatus which has an energy harvest function and a method thereof are provided to supply power to reduce power consumption of a wireless communication device, to enable the wireless communication device to be operated mainly in a power down mode state, and to supply power to the wireless communication device when communications are required. CONSTITUTION: An active wireless power apparatus includes a gathering unit(21) which receives a radio signal of light or frequency which is transmitted from the outside, and a power generation unit(22) which processes a signal which is outputted through the gathering unit, and outputs a fixed level of a voltage signal. A wireless communication device, which is in a power down mode, is woken up and operated in an operation mode according to the voltage signal. [Reference numerals] (12) Matching unit; (13) RF signal processing unit; (14) Battery; (21) Gathering unit; (22) Power generation unit; (23) Switch unit; (3) Reader; (AA) Frequency & Light
Abstract:
PURPOSE: An RFID(Radio Frequency ID) tag equipped with a physical switch is provided to increase recognition ratio of an RFID tag by supplying a physical switch. CONSTITUTION: An antenna receives an RF signal from a reader. An AFE(Analog Front End)(110) generates voltage by using the RF signal. The switch is inserted between the antenna and the AFE and controls connection between the antenna and the AFE through switching operation. The switch includes first and third switches, a control module(120), and a rechargeable battery(140).
Abstract:
PURPOSE: A method for forming a via and a method for manufacturing a stack chip package using the same are provided to supply a solution with metal particles to a via hole to process a substrate at a lower temperature, thereby quickly and simply forming a via. CONSTITUTION: A via hole(103) is formed in a substrate(102). The substrate is dipped in a first solution(30) so that the via hole is filled with the first solution. A second solution(32) with a metal particle is provided to the first solution so that the metal particle is sunken in the via hole. The substrate with the via hole is processed by heat. A via is formed in the via hole.