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公开(公告)号：KR1020100061038A
公开(公告)日：2010-06-07
申请号：KR1020080119912
申请日：2008-11-28
Applicant: 한국표준과학연구원
IPC: G01N21/552 , G01N21/25 , G01N21/00
CPC classification number: G01N21/553 , G01N2021/212
Abstract: PURPOSE: A surface plasmon resonance sensor using beam profile ellipsometry is provided to measure the junction characteristic and dynamic characteristic of bio materials in real time through simultaneous measurement of surface plasmon resonance and ellipsometer phase change. CONSTITUTION: A surface plasmon resonance sensor using beam profile ellipsometry comprises a vertical beam profile ellipsometry, a surface plasmon resonance sensor(40), and a fluid path(1). The vertical beam profile ellipsometry detects polarized light by polarizing light and collecting a part of the polarized light to a metallic foil(42). The surface plasmon resonance sensor unit is provided in a condenser lens(40) of the beam profile ellipsometry and generates surface plasmon resonance by the angular variation of the polarized light. The fluid path provides the metallic foil with a buffer solution including bio materials to induce adsorption or desorption. The vertical beam profile ellipsometry comprises a light source(10), a polarized light device(20), a beam splitter(30), the condenser lens, a light analyzer(50), an optical detector(60), and an arithmetic processing unit(70).
Abstract translation: 目的：提供使用光束轮廓椭偏仪的表面等离子体共振传感器，通过同时测量表面等离子体共振和椭偏仪相位来实时测量生物材料的结特性和动态特性。 构成：使用光束轮廓椭偏仪的表面等离子体共振传感器包括垂直光束轮廓椭偏仪，表面等离子体共振传感器（40）和流体路径（1）。 垂直光束轮廓椭偏仪通过偏振光检测偏振光并将偏振光的一部分收集到金属箔（42）。 表面等离子体共振传感器单元设置在光束轮廓椭偏仪的聚光透镜（40）中，并通过偏振光的角度变化产生表面等离子体共振。 流体路径为金属箔提供包括生物材料的缓冲溶液以诱导吸附或解吸。 垂直光束轮廓椭偏仪包括光源（10），偏振光装置（20），分束器（30），聚光透镜，光分析器（50），光学检测器（60）和算术处理 单元（70）。
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公开(公告)号：KR100941980B1
公开(公告)日：2010-02-11
申请号：KR1020070116340
申请日：2007-11-14
Applicant: 한국표준과학연구원
Abstract: 본 발명은 고속 대면적 정밀측정 장치 및 방법에 관한 것으로, 보다 상세하게는 초점 타원계측부에서 시편의 특성을 고속으로 측정한 후에, 특이점이 나타나는 위치를 정밀측정부에서 보다 상세하게 측정하는 고속 대면적 정밀측정 장치 및 방법에 관한 것이다. 이를 위해 본 발명은 편광된 빛을 시편에 집중 조사한 후, 상기 시편으로부터 반사된 빛을 검출하여 상기 시편의 광학적 특성을 고속으로 측정하는 초점 타원계측부; 및 상기 시편의 광학적 특성 중 특이점이 나타나는 위치를 다시 원자 단위까지 측정하는 정밀측정부;를 포함하는 것을 특징으로 하는 고속 대면적 정밀측정 장치를 제공한다. 상기 고속 대면적 정밀측정 장치는 초점 타원계측부에서 고속으로 시편의 광학적 특성을 측정한 후에, 특이점이 나타나는 위치를 정밀측정부에서 다시 세밀하게 측정함으로써 시편의 광학적 특이점을 신속하고 정밀하게 측정할 수 있는 효과가 있다.
타원계측기, SPM, 탐침-
公开(公告)号：KR100742982B1
公开(公告)日：2007-07-26
申请号：KR1020060056275
申请日：2006-06-22
Abstract: A focused-beam ellipsometer is provided to relatively improve measuring precision and the drive speed of an optical detector by remove errors of rotation of optical parts and signal noises of motor vibration. A focused-beam ellipsometer includes light source(110), a light source unit module(120), a beam splitter(130), an objective lens(140), a light-receiving unit module(160), an optical detector(170), and an operation processing unit(180). The light source unit module has a linear polarizer linear-polarizing light emitted from the light source. The beam splitter splits the polarized light from the light source unit module. The objective lens illuminates some of the light from the beam splitter to a sample. The light-receiving unit module receives the reflected light from the sample. The optical detector detects the light received by light-receiving unit module to pixels. The operation processing unit compensates the strength of the light detected by the optical detector.
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公开(公告)号：KR20180062554A
公开(公告)日：2018-06-11
申请号：KR20160161948
申请日：2016-11-30
Applicant: 한국표준과학연구원
IPC: G01N21/552 , G01N21/21 , G01N33/543 , G01N35/08
CPC classification number: G01N21/21 , G01N21/552 , G01N33/543 , G01N35/08
Abstract: 본발명은사다리꼴입사구조프리즘입사형실리콘기반액침미세유로측정장치및 측정방법에관한것으로서, 본발명의일 실시예에따른사다리꼴입사구조프리즘입사형실리콘기반액침미세유로측정장치는지지대와상기지지대상에형성되고제 1 시료를검출하기위한제 1 생체결합물질이고정화된시료검출층이형성된적어도하나의미세유로를포함하는미세유로구조체; 상기미세유로구조체의상부에형성된사각뿔대형상의프리즘; 상기미세유로에제 1 시료가포함된완충용액을주입하는시료주입부; 상기프리즘을통해편광된입사광을 p파무반사조건에만족되는입사각으로상기미세유로에조사하는편광발생부; 상기편광된입사광중, 상기시료검출층으로부터반사되는제 1 반사광의편광변화를검출하는편광검출부를포함하되, 상기프리즘은상기프리즘으로입사된편광된입사광중, 상기프리즘의하부경계면및 상기미세유로에주입된완충용액의경계면에서반사된제 2 반사광을상기프리즘의상부경계면에서전반사시키는것을특징으로한다.
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公开(公告)号：KR101698022B1
公开(公告)日：2017-02-01
申请号：KR1020150034847
申请日：2015-03-13
Applicant: 한국표준과학연구원
CPC classification number: G01N21/211 , G01B11/0641 , G01B11/24 , G01J4/04 , G01N21/8422
Abstract: 본발명은광소자회전형타원계측기에관한것으로서, 보다상세하게는시편에의해반사또는투과된광의편광상태변화를측정및 분석하여시편의뮬러행렬성분을측정하는데사용되는타원계측기에관한것이다. 본발명은일 실시예는시편을향하여입사광을방사하는광원, 상기입사광의진행경로상 상기광원과상기시편사이에배치되며상기광원에서방사된상기입사광을편광시키는고정편광자, 상기입사광의진행경로상 상기고정편광자와상기시편사이에배치되며상기고정편광자를통과한광이입사되며상기입사된광을편광시키는등속으로회전하는등속회전편광자, 상기등속회전편광자를통과하여편광된광이상기시편에의해반사또는투과되면서편광상태가변화되어입사되며상기입사된광을편광시키는등속으로회전하는등속회전검광자, 상기등속회전검광자를통과하여편광된광이입사되며상기입사된광을편광시키는고정검광자, 상기고정검광자를통과하여편광된광이입사되며입사된광의노광량을검출하고상기노광량에상응하는광의복사속의값을출력하는광검출기를포함할수 있다.
Abstract translation: 本发明涉及一种光学元件旋转型椭偏仪，更具体地说，涉及一种用于测量和分析由样本反射或透射通过的样本的偏振态的变化的椭圆偏振仪，以测量样本的Mueller矩阵分量。 本发明的一个实施例可以包括：用于向样本发射入射光的光源; 在入射光的行进路径上布置在光源和样本之间的固定偏振器，并且使从光源发射的入射光偏振; 恒定速度旋转偏振器，其设置在入射光的行进路径上的固定偏振器和样本之间，使已经通过固定偏振器并入射到其上的光偏振，恒速旋转偏振器以恒定速度旋转 ; 用于偏振已经在通过恒速旋转偏振器时被偏振的光的恒速旋转分析仪已被反射或已经通过样本，从而具有改变的偏振状态，然后入射到其中，恒定速度 旋转分析仪以恒定速度旋转; 用于偏振光的固定分析器，其在通过恒速旋转分析仪时被偏振，然后入射到其上; 以及光检测器，用于检测在通过固定分析器时被偏振并然后入射到其上的光的曝光量，并输出与检测到的曝光量对应的光的辐射通量的值 。
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Patent Agency Ranking
公开(公告)号：KR101684138B1
公开(公告)日：2016-12-21
申请号：KR1020150093229
申请日：2015-06-30
Applicant: 한국표준과학연구원
CPC classification number: G01N21/211 , B01L3/502715 , B01L2300/0654 , B01L2300/08 , B01L2300/0816 , B01L2300/168 , G01B11/06 , G01N21/21 , G01N21/4133 , G01N2021/213
Abstract: 본발명은액침(液浸) 미세유로환경하에서타원계측법을이용한저분자바이오물질등의분자접합특성및 완충용액굴절률동시측정장치와측정방법에대한것이다. 본발명의일례와관련된경사입사구조프리즘입사형실리콘기반액침미세유로측정장치는, 지지대와지지대상에형성된반도체또는유전체로구성된기판, 프리즘구조로구비되어상기지지대상에설치되는덮개부및 상기지지대상부와상기덮개부하단중 어느하나에형성되는미세유로를구비한미세유로구조체; 미세유로에바이오물질의시료가포함된완충용액을주입하여기판상에시료의흡착층을형성시키는시료주입부; 상기프리즘의입사면을통해편광된입사광을 p파무반사조건에만족되는입사각으로상기흡착층에조사하는편광발생부; 및상기흡착층및 상기기판중 적어도하나로부터반사되는제 1 반사광이상기프리즘의반사면을통해입사되고, 상기제 1 반사광의편광변화를검출하는편광검출부;를포함하되, 상기기판의표면은상기프리즘의밑면과소정의경사각을이루도록형성된다.
Abstract translation: 与本发明的一个实施例相关的倾斜入射，棱镜入射，基于硅的浸入式微通道的测量装置可以包括：具有支撑体的微通道结构，由半导体或电介质材料形成的衬底， 支撑件，具有棱镜结构并安装在支撑件上的盖部件和形成在支撑件的上部或盖部分的下部的微通道; 用于将含有生物材料样品的缓冲溶液注入微通道的样品注入部分，以在基底上形成样品的吸附层; 偏振光产生部，其通过棱镜的入射面以适合P波反射反射条件的入射角度将偏振光入射到所述吸附层上; 以及偏振光检测部，从吸附层和/或基板反射的第一反射光入射到该偏振光检测部，该偏振光检测部通过棱镜的反射面并检测第一反射光的偏振变化。
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公开(公告)号：KR101509054B1
公开(公告)日：2015-04-07
申请号：KR1020130103738
申请日：2013-08-30
Applicant: 한국표준과학연구원
IPC: G01N21/17
CPC classification number: G01N21/211 , G01J4/04 , G01N2021/213 , G01N2201/061 , G01N2201/0633 , G01N2201/0683 , G01N2201/11
Abstract: 본발명은임의의시료에대한뮬러행렬성분들중에서전부또는일부를종래의이중-광소자-회전형뮬러-행렬타원계측기들의광원의잔류편광및 광검출기의편광의존성과고차항의푸리에계수들의측정값때문에생기는측정정확도및 측정정밀도의문제점을해결하기위한광소자-회전형뮬러-행렬타원계측기를제공하고자하는것이다.
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公开(公告)号：KR101383652B1
公开(公告)日：2014-04-09
申请号：KR1020120114097
申请日：2012-10-15
Applicant: 한국표준과학연구원
IPC: G01N21/21 , G01N21/41 , G01N33/483
CPC classification number: G01N21/211 , G01N21/05 , G01N21/253 , G01N21/41 , G01N2201/06113 , G01N2201/0683
Abstract: The present invention relates to a device and a method for simultaneously measuring the molecular binding characteristics of low molecular bio substances and the refractive index of a buffer solution using an ellipsometry under an immersed microchannel environment and, more specifically, to a device and a method for simultaneously measuring the refractive index of a buffer solution and the dynamic binding characteristics of bio substances at high sensitiveness by introducing polarized incident beams to an adsorption layer formed of the bio substances on substrate substances for semiconductors using a prism structure and a microchannel under p-wave non-reflective conditions. The device comprises: a microchannel structure; a sample injection part for forming the adsorption layer of a sample on a substrate by injecting the buffer solution containing the sample of the bio substances to the microchannel; a polarized beam generation part for radiating the incident beams polarized through the incident surface of a prism to the adsorption layer at an incident angle satisfying the p-wave non-reflective conditions; and a polarized beam detection part for detecting the polarized beam variation of reflected beams after the reflected beams of the adsorption layer are introduced through the reflection surface of the prism. The microchannel structure comprises: the substrate composed of a support, and semiconductors or dielectric substances formed on the support; a cover part formed as the prism structure and installed in the support; and the microchannel formed on one among the upper part of the support and the bottom of the cover part.
Abstract translation: 本发明涉及一种用于在浸没的微通道环境下同时测量低分子量生物物质的分子结合特性和使用椭偏仪的缓冲溶液的折射率的装置和方法，更具体地，涉及一种装置和方法， 同时测量缓冲溶液的折射率和高灵敏度生物物质的动态粘合特性，将偏振光入射到由半导体衬底物质形成的吸附层上，使用棱镜结构和微波通道在p波 非反光条件。 该装置包括：微通道结构; 用于通过将含有生物物质样品的缓冲溶液注入微通道而在基片上形成样品吸附层的样品注入部分; 偏振光束产生部件，其以满足p波非反射条件的入射角度将通过棱镜的入射面偏振的入射光束照射到吸附层; 并且用于检测吸收层的反射光束之后的反射光束的偏振光束变化的偏振光束检测部分被引入棱镜的反射表面。 微通道结构包括：由支撑体构成的基板和形成在支撑体上的半导体或介电物质; 形成为棱镜结构并安装在支撑体中的盖部; 并且形成在支撑件的上部和盖部的底部中的一个的微通道。
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公开(公告)号：KR1020110056720A
公开(公告)日：2011-05-31
申请号：KR1020090113164
申请日：2009-11-23
Applicant: 한국표준과학연구원
IPC: G01N33/483 , G01N21/21 , G01N35/00
CPC classification number: G01N21/211 , B01L3/502715 , B01L2300/0654 , B01L2400/086 , Y10T436/143333 , Y10T436/144444
Abstract: PURPOSE: An apparatus for measuring dynamic characteristic of molecule adsorption and dissociation is provided to measure the dynamic characteristic of low molecular bio material with high sensitivity. CONSTITUTION: An apparatus for measuring dynamic characteristic of molecule adsorption and dissociation comprises: a microchannel structure(100), a sample injection unit(200), a polarized light generator(300), and polarized light detector(400). The microchannel structure comprises a support(110), a substrate(120), a dielectric thin film(130), and cover part(140). The sample injection unit forms an adsorption layer(160) of a sample on the dielectric thin film by injecting a buffer solution(210). The polarized light generator irradiates incident light to the adsorption layer. The polarized light detector detects the change of the polarized light of the reflected light.
Abstract translation: 目的：提供一种用于测量分子吸附和解离动态特性的仪器，用于测量具有高灵敏度的低分子生物材料的动态特性。 构成：用于测量分子吸附和解离的动态特性的装置包括：微通道结构（100），样品注入单元（200），偏振光发生器（300）和偏振光检测器（400）。 微通道结构包括支撑件（110），基底（120），电介质薄膜（130）和盖部分（140）。 样品注入单元通过注入缓冲溶液（210）在电介质薄膜上形成样品的吸附层（160）。 偏振光发生器将入射光照射到吸附层。 偏振光检测器检测反射光的偏振光的变化。
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公开(公告)号：KR1020110039687A
公开(公告)日：2011-04-20
申请号：KR1020090096641
申请日：2009-10-12
Applicant: 한국표준과학연구원
IPC: G01N21/27 , G01N33/483 , G01B11/24
Abstract: PURPOSE: An apparatus and a method for surface Plasmon resonance imaging ellipsometry are provided to enable a user to clearly and accurately observe the shape of samples and the attachment position of cells. CONSTITUTION: An apparatus for surface Plasmon resonance imaging ellipsometry comprises an elliptical polarized light supplying part and a surface plasmon resonance sensor. The an elliptical polarized light supplying part has a light source(10), a polarizer(12), and a phase delay unit. The polarizer generates linearly polarized light in the light source. The phase delay unit forms elliptical polarized light by phase-delaying the linearly polarized light emitted from the polarizer. The surface plasmon resonance sensor has a prism(21) and a metallic foil(23).
Abstract translation: 目的：提供一种用于表面等离子体共振成像椭偏仪的装置和方法，以使用户能够清楚和准确地观察样品的形状和细胞的附着位置。 构成：用于表面等离子体共振成像椭偏仪的装置包括椭圆偏振光供给部和表面等离子体共振传感器。 椭圆偏振光供给部分具有光源（10），偏振器（12）和相位延迟单元。 偏振片在光源中产生线性偏振光。 相位延迟单元通过相位延迟从偏振器发射的线性偏振光来形成椭圆偏振光。 表面等离子体共振传感器具有棱镜（21）和金属箔（23）。
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