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公开(公告)号：KR101108524B1
公开(公告)日：2012-01-30
申请号：KR1020090114419
申请日：2009-11-25
Applicant: 고려대학교 산학협력단
IPC: G01N27/327 , G01N33/49 , B82B1/00
Abstract: 본 발명은 고감도 글루코오스 바이오센서용 다이아몬드 전극 및 상기 다이아몬드 전극의 제조 방법, 상기 다이아몬드 전극을 포함하는 글루코오스 바이오센서에 관한 것으로, 더욱 상세하게는 표면에 전도성 고분자의 나노와이어(nanowire)가 코팅되어 있으며, 상기 나노와이어에 효소가 고정되어 있는 다이아몬드 전극을 이용하여, 감응 속도가 빠르고, 저농도의 글루코오스까지 검출이 가능한 고감도 글루코오스 바이오센서를 제공할 수 있다.
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公开(公告)号：KR1020100131178A
公开(公告)日：2010-12-15
申请号：KR1020090049946
申请日：2009-06-05
Applicant: 고려대학교 산학협력단
Abstract: PURPOSE: A method for manufacturing a carbon layer is provided to produce toughness of an amorphous carbon film by generating carbon crystalline like CNT on a carbon film using CDC(carbide derived coating). CONSTITUTION: A method for manufacturing a carbon layer comprises a step for adding a material catalyzed in CNT production during sintering of carbide. The carbide is the ceramic material. A method for forming the carbide comprises a step for increasing toughness of an amorphous carbon film by accelerating the generation of carbon crystalline on the carbide film.
Abstract translation: 目的：提供一种制造碳层的方法，通过使用CDC（碳化物衍生的涂层）在碳膜上产生碳结晶状CNT来产生无定形碳膜的韧性。 构成：制造碳层的方法包括在碳化物烧结期间添加在CNT生产中催化的材料的步骤。 碳化物是陶瓷材料。 形成碳化物的方法包括通过加速在碳化物膜上产生碳结晶来提高无定形碳膜的韧性的步骤。
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23.发明公开나노 다이아몬드 입자의 정전하 자기조립 방법을 이용한기판의 전처리방법 및 이를 이용한 다이아몬드 박막증착방법 失效使用具有纳米金刚石颗粒的静电自组装工艺预处理脱模剂的方法和使用其的金刚石薄膜的沉积方法
公开(公告)号：KR1020080063227A
公开(公告)日：2008-07-03
申请号：KR1020070141892
申请日：2007-12-31
Applicant: 고려대학교 산학협력단
IPC: H01L21/208 , B82Y10/00
CPC classification number: C23C16/02 , B82Y40/00 , C23C16/27 , H01L21/02697
Abstract: A method for pre-treating a substrate using an electrostatic self-assembly process with nano diamond particles and a method for depositing a diamond thin film using the same. A surface of a nano diamond particle is coated with a polymer having an opposite polarity with respect to an electrostatic charge on the surface of the nano diamond particle. A surface of a substrate is treated with a polymer having an opposite polarity with respect to an electrostatic discharge on the substrate. The surface-treated substrate is immersed into a solution in which the coated nano diamond particles are dispersed. The nano diamond particle is deposited on the substrate through an electrostatic self-assembly process, so that it is used as a deposition core during a diamond thin film deposition. The polymer is selected from a group consisting of PSS(Poly Sodium 4-styrenen sulfonate), poly S-119, polyaniline, nafion, and PDDA(Poly DiallylDimethyl Ammonium chloride).
Abstract translation: 使用具有纳米金刚石颗粒的静电自组装工艺预处理衬底的方法和使用其沉积金刚石薄膜的方法。 纳米金刚石颗粒的表面涂覆有相对于纳米金刚石颗粒表面上的静电电荷具有相反极性的聚合物。 用相对于衬底上的静电放电具有相反极性的聚合物处理衬底的表面。 将表面处理的基材浸入其中分散有涂覆的纳米金刚石颗粒的溶液中。 纳米金刚石颗粒通过静电自组装工艺沉积在衬底上，使得其在金刚石薄膜沉积期间用作沉积芯。 聚合物选自PSS（聚4-苯乙烯磺酸钠），聚S-119，聚苯胺，nafion和PDDA（聚二烯丙基二甲基氯化铵）组成的组。
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24.发明授权
公开(公告)号：KR101777945B1
公开(公告)日：2017-09-12
申请号：KR1020160013851
申请日：2016-02-04
Applicant: 고려대학교 산학협력단
IPC: C08J5/06 , C08J5/00 , C08K9/04 , C08K7/06 , C08L101/00 , D06M14/36 , D06M10/02 , D06M101/40
CPC classification number: C08J5/00 , C08J5/06 , C08K7/06 , C08K9/04 , C08L101/00 , D06M10/02 , D06M14/36
Abstract: 본발명은엔지니어링플라스틱복합재및 그제조방법을제공한다. 이엔지니어링플라스틱복합재는수소플라즈마에의하여그 표면이개질되어기능기를구비한탄소섬유; 및엔지니어링플라스틱을포함한다. 상기탄소섬유는상기엔지니어링플라스틱에혼합되어복합재를구성한다.
Abstract translation: 本发明提供一种工程塑料复合材料及其制造方法。 工程塑料材料是一种碳纤维，其表面被氢等离子体改性而具有官能团; 和工程塑料。 碳纤维与工程塑料混合形成复合材料。
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公开(公告)号：KR1020170092767A
公开(公告)日：2017-08-14
申请号：KR1020160013851
申请日：2016-02-04
Applicant: 고려대학교 산학협력단
IPC: C08J5/06 , C08J5/00 , C08K9/04 , C08K7/06 , C08L101/00 , D06M14/36 , D06M10/02 , D06M101/40
CPC classification number: C08J5/00 , C08J5/06 , C08K7/06 , C08K9/04 , C08L101/00 , D06M10/02 , D06M14/36
Abstract: 본발명은엔지니어링플라스틱복합재및 그제조방법을제공한다. 이엔지니어링플라스틱복합재는수소플라즈마에의하여그 표면이개질되어기능기를구비한탄소섬유; 및엔지니어링플라스틱을포함한다. 상기탄소섬유는상기엔지니어링플라스틱에혼합되어복합재를구성한다.
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Patent Agency Ranking26.发明授权플라즈마 처리를 통한 나노 결정 다이아몬드가 포함된 탄소막의 제조방법 및 이를 통해 제조된 나노 결정 다이아몬드를 포함하는 탄소막 有权通过等离子体处理制造含有纳米结晶金刚石的碳层的制造方法，由此形成含有纳米结晶金刚石的碳层
公开(公告)号：KR101557936B1
公开(公告)日：2015-10-19
申请号：KR1020140013118
申请日：2014-02-05
Applicant: 고려대학교 산학협력단
Abstract: 본발명은플라즈마처리를통한나노결정다이아몬드(NCD)가포함된탄소막의제조방법에관한것으로이에따르면, 탄화물세라믹스를고온에서할로겐가스와반응시켜제조된탄소막(CDC)는 OLC(onion like carbon), 그라파이트, CNT(carbon nano tube)의나노결정구조를갖는다. 이에의해제조된탄소막(CDC)은기재와의밀착력은높으나, 공극의발생으로경도및 마찰특성이저하되는문제가있으므로플라즈마처리하여상기탄소막(CDC) 내에나노결정다이아몬드(NCD) 구조가생성되므로내마모성, 기재와의밀착력및 마찰특성을향상시킬수 있다. 따라서, 본공정을통해제조된나노결정다이아몬드(NCD)가포함된탄소막을고분자물질의코팅혹은탄소계열물질의코팅과같이다양한분야에적용이가능하며, 특히, 우수한기계적특성이요구되는슬라이딩부품, 피스톤링 및압축기의베인과같은기계부품의코팅에적합하다.
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公开(公告)号：KR1020150093397A
公开(公告)日：2015-08-18
申请号：KR1020140014122
申请日：2014-02-07
Applicant: 고려대학교 산학협력단
CPC classification number: C25B11/0405
Abstract: 본 발명은 붕소 코팅 다이아몬드가 결합된 폐수처리용 전극 및 이의 제조방법에 관한 것이다.
본 발명에 따른 붕소 코팅 다이아몬드가 결합된 폐수처리용 전극 및 이의 제조방법에 따라 제조된 전극은 비표면적이 보다 넓다. 그러므로 본 발명에 따른 폐수처리용 전극을 사용하여 폐수처리를 하게 되면 폐수처리의 효과가 월등히 향상되게 된다. 특히 TOC 및 COD 등의 수질 오염 측정 지표가 기존에 사용되던 전극에 비해 월등히 향상되게 된다.Abstract translation: 本发明涉及一种用于处理与硼涂层金刚石组合的废水的电极及其制造方法。 根据本发明，电极具有相当宽的比表面积。 因此，使用处理废水的电极处理废水时，处理废水的效果显着提高。 特别是与过去使用的现有电极相比，TOC，COD等水污染测量指标显着提高。
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公开(公告)号：KR1020130123110A
公开(公告)日：2013-11-12
申请号：KR1020120046276
申请日：2012-05-02
Applicant: 고려대학교 산학협력단
IPC: H01L21/8247 , H01L27/115
CPC classification number: H01L45/06 , H01L45/1233 , H01L45/143 , H01L45/144
Abstract: The present invention relates to a manufacturing method for a phase-change memory device. The manufacturing method for a phase-change memory device comprises a substrate preparing step for preparing a semiconductor substrate on which a contact plug is formed on a lower electrode; an insulating film forming step for forming an insulating film on the semiconductor substrate with the contact plug; a phase-change film forming step for forming a phase-change film on the contact plug and the insulating film; a nitrogen doping step for doping the surface of the phase-change film with nitrogen; a polishing step for polishing the surface of the phase-change film on which the nitrogen is doped; and an electrode forming step for forming an upper electrode on the upper part of the phase-change film. According to the configuration, the manufacturing method for a phase-change memory device of the present invention performs a chemical or mechanical polishing process after doping the surface of a GST film with nitrogen, easily stabilizes the GST film consisting of different compounds, and improves the surface roughness of the GST film. [Reference numerals] (AA) Start;(BB) End;(S110) Prepare a semiconductor substrate on which a contact plug is formed on a lower electrode;(S120) Form an insulating film on the semiconductor substrate;(S130) Form a phase-change film on the contact plug and the insulating film;(S140) Dope the surface of the phase-change film with nitrogen;(S150) Polish the surface of the phase-change film on which the nitrogen is doped;(S160) Form an upper electrode on the upper part of the phase-change film
Abstract translation: 本发明涉及一种用于相变存储器件的制造方法。 相变存储器件的制造方法包括：准备在下电极上形成有接触插塞的半导体衬底的衬底准备步骤; 绝缘膜形成步骤，用于在所述半导体衬底上用所述接触插塞形成绝缘膜; 相变膜形成步骤，用于在接触插塞和绝缘膜上形成相变膜; 氮掺杂步骤，用于用氮掺杂相变膜的表面; 用于抛光其上掺杂有氮的相变膜的表面的抛光步骤; 以及在所述相变膜的上部形成上部电极的电极形成工序。 根据该结构，本发明的相变存储器件的制造方法在用氮掺杂GST膜的表面后进行化学或机械抛光工艺，容易稳定由不同化合物组成的GST膜，并且改善 GST膜的表面粗糙度。 （AA）开始;（BB）端;（S110）准备在下电极上形成有接触插塞的半导体衬底;（S120）在半导体衬底上形成绝缘膜;（S130）形成 接触塞和绝缘膜上的相变膜;（S140）用氮气对相变膜的表面进行掺杂;（S150）对掺杂有氮的相变膜的表面进行抛光;（S160） 在相变膜的上部形成上电极
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公开(公告)号：KR1020130097339A
公开(公告)日：2013-09-03
申请号：KR1020120018925
申请日：2012-02-24
Applicant: 고려대학교 산학협력단
IPC: C12Q1/68 , G01N27/26 , C12N15/115 , B82Y15/00
CPC classification number: C12N15/115 , G01N27/26 , G01N27/302 , G01N2291/0255
Abstract: PURPOSE: An electrochemical pH sensor using a ferrocene-labeled aptamer is provided to measure pH concentration with high sensitivity in a wider range than an existing gold electrode. CONSTITUTION: An electrochemical pH sensor is based on a gold nanoparticle-deposited diamond thin film electrode. The gold nanoparticles are conjugated with a ferrocene-labeled aptamer by covalent bond. A method for manufacturing the pH sensor comprises the steps of: depositing the gold nanoparticles on the boron-doped diamond electrode; and binding the gold nanoparticles with ferrocene-labeled ss-DNA.
Abstract translation: 目的：提供使用二茂铁标记的适体的电化学pH传感器，在比现有金电极更宽的范围内以高灵敏度测量pH浓度。 构成：电化学pH传感器基于金纳米颗粒沉积金刚石薄膜电极。 金纳米颗粒通过共价键与二茂铁标记的适配体缀合。 制备pH传感器的方法包括以下步骤：在掺杂硼的金刚石电极上沉积金纳米颗粒; 并将金纳米颗粒与二茂铁标记的ss-DNA结合。
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公开(公告)号：KR1020130053004A
公开(公告)日：2013-05-23
申请号：KR1020110118433
申请日：2011-11-14
Applicant: 고려대학교 산학협력단
IPC: H01L21/304 , H01L21/8247 , H01L27/115
CPC classification number: H01L21/30604
Abstract: PURPOSE: A chemical mechanical polishing method and a chemical mechanical polishing apparatus for a GST layer in a PRAM are provided to improve the surface roughness of the GST layer by controlling a polishing pad at a specific temperature without hydrogen peroxide. CONSTITUTION: A heating unit(140) controls the temperature of a polishing pad(120) between 30 and 38 degrees centigrade in a chemical mechanical polishing process. A slurry supply unit(170) injects slurry to the upper side of the polishing pad. The polishing pad polishes a GST layer on a holder. The temperature of the slurry is controlled between 30 and 38 degrees centigrade.
Abstract translation: 目的：提供一种用于PRAM中的GST层的化学机械抛光方法和化学机械抛光装置，以通过在不具有过氧化氢的情况下控制在特定温度下的抛光垫来改善GST层的表面粗糙度。 构成：加热单元（140）在化学机械抛光工艺中将抛光垫（120）的温度控制在30和38摄氏度之间。 浆料供给单元（170）将浆料注入到抛光垫的上侧。 抛光垫在支架上抛光GST层。 浆料的温度控制在30和38摄氏度之间。
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