公开(公告)号：FR2890438A1

公开(公告)日：2007-03-09

申请号：FR0509173

申请日：2005-09-08

Applicant: PEUGEOT CITROEN AUTOMOBILES SA ,  COMMISSARIAT ENERGIE ATOMIQUE

Inventor： BAVOUX BERNARD ,  DANEL JEAN SEBASTIEN ,  ROBERT PHILIPPE ,  PAULY MAXIME

IPC: G01D5/00 ,  H01T13/58 ,  G08C17/04

Abstract: Cette structure de capteur notamment pour un environnement sévère dans un véhicule automobile, est caractérisée en ce qu'elle comprend un corps de capteur (1) comportant à une extrémité, un élément (2) sensible à la grandeur à mesurer dans l'environnement sévère et à une autre extrémité, un circuit (3) de raccordement de celui-ci, placé hors de l'environnement sévère, séparés physiquement l'un de l'autre, raccordés par des moyens de transmission d'informations par courant porteur sur un conducteur électrique (5) du capteur auquel l'élément sensible et le circuit de raccordement sont associés par des moyens de couplage sans fil et entre lesquels sont prévus des moyens (4) de protection du circuit de raccordement à l'encontre de l'environnement.

公开(公告)号：FR2880128A1

公开(公告)日：2006-06-30

申请号：FR0414033

申请日：2004-12-29

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: G01P15/08

Abstract: Accéléromètre à peignes capacitifs comportant un substrat (5), une électrode mobile (2) par rapport audit substrat (5) munie d'un ensemble de doigts mobiles (7), une électrode (4) fixe par rapport audit substrat (5) munie d'un ensemble de doigts fixes (8A, 8B), chacun desdits doigts mobiles (7) étant disposé entre deux doigts fixes contigus (8A, 8B) de manière à former une microstructure à peignes interdigités.Selon l'invention les doigts mobiles (7) sont solidarisés entre eux par au moins une première poutre de liaison (20) gravée directement dans le substrat (5), et/ou, les doigts fixes (8A, 8B) sont solidarisés entre eux par au moins une deuxième poutre de liaison (22) gravée directement dans le substrat (5).

公开(公告)号：FR2868591B1

公开(公告)日：2006-06-09

申请号：FR0403586

申请日：2004-04-06

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: H01H13/26 ,  B81B3/00 ,  B81B7/00 ,  H01H59/00 ,  H01H61/01 ,  H01P1/12

Abstract: A microswitch comprises a deformable membrane including two substantially parallel flexure arms, attached to a substrate via at least one end thereof and comprising thermal actuating means. An elongated contact arm, substantially parallel with the flexure arms, is arranged therebetween and attached thereto at the high deformation areas thereof. The contact arm moves in a direction substantially parallel to the substrate upon actuation of the microswitch, and comprises electrostatic holding electrodes and a conducting pad.

公开(公告)号：FR2874257A1

公开(公告)日：2006-02-17

申请号：FR0451849

申请日：2004-08-13

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: G01C19/56 ,  G01P3/14

Abstract: L'invention propose un micro-gyromètre (10), avantageusement usiné selon les techniques classiques en microélectronique, basé sur la détection des forces de Coriolis générées par un mouvement angulaire (Ω) perpendiculaire à la direction (X) de vibration de masses (12, 12') mobiles dans le plan (X, Y) du gyromètre (10).La détection des forces de Coriolis est effectuée par le déplacement que celles-ci exercent sur le mode propre d'un résonateur (22) couplé au dispositif mobile (20).

公开(公告)号：FR2849016B1

公开(公告)日：2005-06-10

申请号：FR0216088

申请日：2002-12-18

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE ,  MICHEL FRANCE ,  MAEDER PACHURKA CATHERINE ,  SILLON NICOLAS

IPC: B81B3/00 ,  B81C1/00

公开(公告)号：FR2848021B1

公开(公告)日：2005-05-06

申请号：FR0214946

申请日：2002-11-28

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: H01H59/00 ,  B81B7/02

Abstract: The invention relates to an electrostatic microswitch which is intended to connect electrically two strip conductors which are disposed on an insulating support ( 21 ), the two strip conductors are connected electrically by conducting means ( 38 ) which are provided in the central part of deformable means ( 28 ) which can be deformed in relation to the support under the effect of an electrostatic force generated by control electrodes ( 25, 48; 26, 58 ). The control electrodes are distributed facing one another on the deformable means and the support, such as to form capacitive means around the aforementioned conducting means. The control electrodes are associated with insulating stop elements ( 35, 36 ) which are provided in order to prevent a short circuit between electrodes of the capacitive means during the deformation of the deformable means. The distance between the deformable means and the ends of the strip conductors is less than or equal to the distance between the insulating stop elements associated with the control electrodes and the control electrodes located opposite.

公开(公告)号：FR2848020B1

公开(公告)日：2005-01-07

申请号：FR0214944

申请日：2002-11-28

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: H01H59/00 ,  B81B7/02

公开(公告)号：FR2831705B1

公开(公告)日：2004-08-27

申请号：FR0113796

申请日：2001-10-25

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: H01G5/04 ,  H01G5/18 ,  H01G5/06 ,  H01G5/16

Abstract: A MEMS micro-capacitor having a variable capacity is disclosed. The MEMS micro-capacitor has at least one fixed electrode ( 3 ) positioned on one surface of a substrate ( 1 ); bending means with respect to the surface of the substrate including at least one moveable electrode ( 5 ) located opposite the fixed electrode ( 3 ); a layer of solid dielectric material interposed between the fixed electrode and the moveable electrode; and means ( 5, 6 and 7 ) for applying a bending force to the bending means. The bending force is intended to move the moveable electrode ( 5 ) with respect to the fixed electrode ( 3 ) in order to obtain, between these electrodes, a capacity that varies according to the applied bending force. The bending means are designed to clamp the layer of dielectric material between the moveable electrode and the fixed electrode so as to obtain a variable surface of the clamped layer of dielectric material.

公开(公告)号：AU2003299341A1

公开(公告)日：2004-07-14

申请号：AU2003299341

申请日：2003-12-18

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： MAEDER-PACHURKA CATHERINE ,  SILLON NICOLAS ,  ROBERT PHILIPPE ,  MICHEL FRANCE

IPC: B81B3/00 ,  B81C1/00

公开(公告)号：FR2757941B1

公开(公告)日：1999-01-22

申请号：FR9616198

申请日：1996-12-30

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE ,  MICHEL FRANCE ,  GRANGE HUBERT

IPC: G01P9/00 ,  B81C1/00 ,  G01L9/00 ,  G01P15/02 ,  H01L29/84 ,  G01D5/00 ,  G01P15/00 ,  G01L7/00

Abstract: A process for making at least one suspended element uses an etching technique for micro-machining a structure comprising a substrate covered in sequence by a first layer called a stop layer made of a first material, and a second layer made of a second material in which the suspended element is formed. The process uses a dry etching technique using a gas with sufficient selectivity to enable etching of the second layer without etching the stop layer, under conditions defined to enable anisotropic etching of the second material, the etching being carried out according to a first phase to delimit the suspended element as far as the level of the stop layer and being continued in a second phase during which the suspended element is released by etching of the surface layer of the suspended element delimited in the first phase and which is adjacent to the stop layer.