公开(公告)号：IT1280841B1

公开(公告)日：1998-02-11

申请号：ITTO950259

申请日：1995-04-05

Applicant: CSELT CENTRO STUDI LAB TELECOM

Inventor： TALLONE LUIGI

IPC: G01N21/21 ,  G01M11/00 ,  G01N21/41 ,  G01N21/45 ,  G01N21/59

Abstract: A light beam is sent on a wafer (4), at different angles of incidence, thus giving rise to fluctuations in the transmittance of the wafer, as the angle of incidence varies, because of interference due to multiple reflections of the beam inside the wafer (4). The transmittance of the wafer (4) is measured as the angle of incidence varies; the angular positions of transmittance maxima and minima are determined with respect to a maximum or minimum corresponding to normal incidence, and the refractive index is obtained from these positions and from the number of maxima and minima in the different angles. The device performing the method is also provided.

公开(公告)号：DE736766T1

公开(公告)日：1997-04-03

申请号：DE96105471

申请日：1996-04-04

Applicant: CSELT CENTRO STUDI LAB TELECOM

Inventor： TALLONE LUIGI

IPC: G01N21/21 ,  G01M11/00 ,  G01N21/41 ,  G01N21/45 ,  G01N21/59

Abstract: A light beam is sent on a wafer (4), at different angles of incidence, thus giving rise to fluctuations in the transmittance of the wafer, as the angle of incidence varies, because of interference due to multiple reflections of the beam inside the wafer (4). The transmittance of the wafer (4) is measured as the angle of incidence varies; the angular positions of transmittance maxima and minima are determined with respect to a maximum or minimum corresponding to normal incidence, and the refractive index is obtained from these positions and from the number of maxima and minima in the different angles. The device performing the method is also provided.

公开(公告)号：DE69201917T2

公开(公告)日：1995-09-07

申请号：DE69201917

申请日：1992-06-26

Applicant: CSELT CENTRO STUDI LAB TELECOM

Inventor： GREGO GIORGIO ,  TALLONE LUIGI

IPC: G01J3/12 ,  G01J3/26 ,  G01J3/28

Abstract: The radiation to be analysed is sent onto an interference filter (6) which selects different portions of the radiation spectrum in correspondence with different incidence angles. The intensity values of the radiation outgoing from the element (6) are stored by a measuring and data processing unit (9) which processes such values with the transfer function of the element to obtain the information on the spectrum.

公开(公告)号：DE69605226D1

公开(公告)日：1999-12-30

申请号：DE69605226

申请日：1996-04-04

Applicant: CSELT CENTRO STUDI LAB TELECOM

Inventor： TALLONE LUIGI

IPC: G01N21/45

公开(公告)号：DE880042T1

公开(公告)日：1999-07-22

申请号：DE98108857

申请日：1998-05-15

Applicant: CSELT CENTRO STUDI LAB TELECOM

Inventor： BOSCHIS LAURA ,  ROSSOTTO ORIANA ,  TALLONE LUIGI

IPC: G02B6/13 ,  B29D11/00 ,  G02B20060101 ,  G02B5/18 ,  G02B5/26 ,  G02B6/02 ,  G02B6/10 ,  G02B6/124 ,  G02B6/136 ,  G02B6/255 ,  G02B6/293 ,  G02B6/34

公开(公告)号：IT1292316B1

公开(公告)日：1999-01-29

申请号：ITTO970424

申请日：1997-05-20

Applicant: CSELT CENTRO STUDI LAB TELECOM

Inventor： BOSCHIS LAURA ,  ROSSOTTO ORIANA ,  TALLONE LUIGI

IPC: G02B6/13 ,  B29D11/00 ,  G02B20060101 ,  G02B5/18 ,  G02B5/26 ,  G02B6/02 ,  G02B6/10 ,  G02B6/124 ,  G02B6/136 ,  G02B6/255 ,  G02B6/293 ,  G02B6/34

公开(公告)号：ITTO981064D0

公开(公告)日：1998-12-21

申请号：ITTO981064

申请日：1998-12-21

Applicant: CSELT CENTRO STUDI LAB TELECOM

Inventor： TALLONE LUIGI ,  BOSCHIS LAURA ,  EMELLI ENRICO ,  ROSSOTO ORIANA

IPC: G02B5/18 ,  G02B20060101 ,  G02B5/26 ,  G02B6/02 ,  G02B6/10

公开(公告)号：CA2070330C

公开(公告)日：1996-02-13

申请号：CA2070330

申请日：1992-06-03

Applicant: CSELT CENTRO STUDI LAB TELECOM

Inventor： GREGO GIORGIO ,  TALLONE LUIGI

IPC: G01J3/12 ,  G01J3/26 ,  G01J3/36 ,  G01J9/02

Abstract: A spectroscopy system based on the use of interference filters is provided, which allows high resolution and high sensitivity to be achieved without specific filter band requirements and without movement of the filter in order to scan wavelengths of interest. The radiation to be analyzed is applied to an interference filter which selects different portions of the radiation spectrum in correspondence with different incidence angles. The intensity values of radiation leaving the filter are stored by a measuring and data processing unit which processes such values using the transfer function of the filter to obtain data as to the spectrum.

公开(公告)号：DE69201917D1

公开(公告)日：1995-05-11

申请号：DE69201917

申请日：1992-06-26

Applicant: CSELT CENTRO STUDI LAB TELECOM

Inventor： GREGO GIORGIO ,  TALLONE LUIGI

IPC: G01J3/12 ,  G01J3/26 ,  G01J3/28

Abstract: The radiation to be analysed is sent onto an interference filter (6) which selects different portions of the radiation spectrum in correspondence with different incidence angles. The intensity values of the radiation outgoing from the element (6) are stored by a measuring and data processing unit (9) which processes such values with the transfer function of the element to obtain the information on the spectrum.

公开(公告)号：ITTO950259D0

公开(公告)日：1995-04-05

申请号：ITTO950259

申请日：1995-04-05

Applicant: CSELT CENTRO STUDI LAB TELECOM

Inventor： TALLONE LUIGI

IPC: G01N21/21 ,  G01M11/00 ,  G01N21/41 ,  G01N21/45 ,  G01N21/59

Abstract: A light beam is sent on a wafer (4), at different angles of incidence, thus giving rise to fluctuations in the transmittance of the wafer, as the angle of incidence varies, because of interference due to multiple reflections of the beam inside the wafer (4). The transmittance of the wafer (4) is measured as the angle of incidence varies; the angular positions of transmittance maxima and minima are determined with respect to a maximum or minimum corresponding to normal incidence, and the refractive index is obtained from these positions and from the number of maxima and minima in the different angles. The device performing the method is also provided.