公开(公告)号：US20070195307A1

公开(公告)日：2007-08-23

申请号：US11644406

申请日：2006-12-21

Applicant: Karl-Heinz Schuster ,  Eric Eva

Inventor： Karl-Heinz Schuster ,  Eric Eva

IPC: G03B27/32

CPC classification number: B82Y20/00 ,  G02B1/02 ,  G02B13/143 ,  G02B2207/101 ,  G03F7/70241 ,  G03F7/70258 ,  G03F7/70308 ,  G03F7/70341

Abstract: A projection lens for microlithography is provided comprising transparent optical elements not having direct contact and being spaced apart at most half of the wavelength the lens is designed for by a separator. Thus the corresponding gap is optically almost equivalent to a direct contact.

Abstract translation: 提供了一种用于微光刻的投影透镜，其包括不具有直接接触的透明光学元件，并且间隔开透镜被分离器设计的波长的最大一半。 因此，对应的间隙在光学上几乎等同于直接接触。

公开(公告)号：US07196842B2

公开(公告)日：2007-03-27

申请号：US10998050

申请日：2004-11-29

Applicant: Bernhard Weigl ,  Hans-Jochen Paul ,  Eric Eva

Inventor： Bernhard Weigl ,  Hans-Jochen Paul ,  Eric Eva

IPC: F21V9/06 ,  G02B5/20

CPC classification number: G02B5/208

Abstract: An attenuating filter provides a prescribed attenuation of the intensity of transmitted, short-wavelength, ultraviolet light, in particular, at wavelengths below 200 nm, that is governed by a predefinable spatial distribution of its spectral transmittance. The filter has a transparent substrate (3), e.g. fabricated from crystalline calcium fluoride. A filter coating (5) fabricated from a dielectric material that absorbs over a predefined wavelength range is applied to at least one surface (4) of the substrate. In the case of operating wavelengths of about 193 nm, the filter coating consists largely of tantalum pentoxide. Filters of the type, which may be inexpensively fabricated with high yields, are noted for their high abilities to withstand laser radiation and may be effectively antireflection coated employing simply designed antireflection coatings.

Abstract translation: 衰减滤波器提供了发射的，短波长的紫外光的强度的规定衰减，特别是在200nm以下的波长处，其受其光谱透射率的预定义空间分布的约束。 滤光器具有透明基板（3），例如 由结晶氟化钙制成。 由吸收预定波长范围的介电材料制成的过滤器涂层（5）被施加到衬底的至少一个表面（4）。 在工作波长约193nm的情况下，过滤器涂层主要由五氧化二钽组成。 由于它们能承受激光辐射的高能力并且可以使用简单设计的抗反射涂层可以有效地防反射，因此注意到可以以高产率廉价地制造的类型的过滤器。