公开(公告)号：JP2002014145A

公开(公告)日：2002-01-18

申请号：JP2000196769

申请日：2000-06-29

Applicant: HAMAMATSU PHOTONICS KK

Inventor： SAKAMOTO SHIGERU ,  TAKESHIMA TOMOCHIKA

IPC: G01R1/06 ,  G01J3/18 ,  G01J3/443 ,  G01N21/84 ,  G01R31/302 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a semiconductor device inspection device and a semiconductor device inspection method, capable of efficiently analyzing emission spectrum of an abnormal location in a short time. SOLUTION: A spectroscope 2, which is movable between a spectral position on a light leading optical path in a light leading optical system 1 and a stand-by position which is deviated from the light guide optical path is installed between an objective lens part 11, including objective lenses 11a to 11c, for generating observed image from the image of a semiconductor device S and a imaging camera 3 for capturing the observed image. When emission spectrum analysis is required, spectroscopic operation is conducted, by the spectroscope 2 inserting a light emitting image from the semiconductor device S into the spectral position, to obtain the generated emission spectrum image by the imaging camera 3. Consequently, the acquisition of ordinary light emitting image or reflected light image is made compatible with the capture of emission spectral image, and the emission spectrum in the abnormal location can be analyzed efficiently and a short time.

公开(公告)号：JP2005234058A

公开(公告)日：2005-09-02

申请号：JP2004040514

申请日：2004-02-17

Applicant: Hamamatsu Photonics Kk ,  Sigma Koki Kk ,  シグマ光機株式会社 ,  浜松ホトニクス株式会社

Inventor： IMAIZUMI TETSUO ,  TAMADA TAMOTSU ,  NOZAKI YOSHITAKA ,  SAKAMOTO SHIGERU

IPC: G02B7/00

Abstract: PROBLEM TO BE SOLVED: To provide an optical unit where adhesive force is sufficiently secured in attaching a transparent plate by using photosetting resin while realizing dense installation, and an optical device using the optical unit.
SOLUTION: The optical unit 5 is equipped with an optical component 21 and the transparent plate 23. Since the transparent plate 23 transmits light of prescribed wavelength and also has shape that its projection outside shape in a vertical direction does not project from the projection outside shape of the component 21 in the same direction, the optical units are installed proximately each other. Furthermore, the component 21 has shape that the light is allowed to reach the upper surface 23b of the transparent plate 23 when the plate 23 is irradiated with the light from above. Therefore, when the optical unit 5 is attached by photosetting the photosetting resin on its lower surface 5a, the light completely reaches the photosetting resin, and the adhesive force thereof is sufficiently secured.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种在实现密集安装的同时通过使用光固化树脂安装透明板而充分确保粘合力的光学单元，以及使用该光学单元的光学装置。 解决方案：光学单元5配备有光学部件21和透明板23.由于透明板23透射规定波长的光，并且还具有其在垂直方向上的突出外形不会从其突出的形状 组件21在相同方向上的突出外形，光学单元彼此靠近安装。 此外，部件21具有当板23从上方照射光时允许光到达透明板23的上表面23b的形状。 因此，当光学单元5通过将其设置在其下表面5a上的照相设置树脂来安装时，光完全到达光固化树脂，并且其粘合力得到充分的保证。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005234050A

公开(公告)日：2005-09-02

申请号：JP2004040396

申请日：2004-02-17

Applicant: Hamamatsu Photonics Kk ,  Sigma Koki Kk ,  シグマ光機株式会社 ,  浜松ホトニクス株式会社

Inventor： TAMADA TAMOTSU ,  NOMI KAZUNORI ,  SAKAMOTO SHIGERU

IPC: G02B7/00

CPC classification number: G02B7/003

Abstract: PROBLEM TO BE SOLVED: To provide an optical component holding unit which has improved positioning accuracy, while it is easily assembled to realize the reduction of cost and the securement of reproducibility when assembled.
SOLUTION: The adjacent optical component holding units 35 are guided to a prescribed position, connected so that they can be pulled out, and three-dimensionally positioned by fitting a rectangular projecting part 8a having a non-circular cross section in a rectangular hole and fitting a circular protrusion 11a having a circular cross section in a circular hole, the rectangular protrusion 8a and the rectangular hole surrounding or forming openings 22a and 22b through which light can pass, and also the adjacent optical component holding units 35 are restricted in a rotating direction and positioned in the rotating direction by fitting the rectangular protrusion 8a in the rectangular hole and fitting a spring pin 13a in a fitting hole.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种具有提高的定位精度的光学部件保持单元，同时易于组装以实现成本的降低和组装时的再现性的确保。 解决方案：相邻的光学部件保持单元35被引导到规定位置，连接成可以被拉出，并且通过将具有非圆形横截面的矩形突出部分8a装配成矩形的三维定位 孔，并且在圆形孔中装配圆形的横截面的圆形突起11a，矩形突起8a和围绕或形成光通过的开口22a和22b的矩形孔以及相邻的光学部件保持单元35被限制在 旋转方向并且通过将矩形突起8a嵌合在矩形孔中并将弹簧销13a装配在装配孔中而沿旋转方向定位。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2000162505A

公开(公告)日：2000-06-16

申请号：JP33986898

申请日：1998-11-30

Applicant: HAMAMATSU PHOTONICS KK

Inventor： SAKAMOTO SHIGERU ,  TERADA HIROTOSHI

IPC: G02B21/00 ,  G01N21/88 ,  G01N21/956

Abstract: PROBLEM TO BE SOLVED: To provide a semiconductor inspection device constituted so that the emission of light can be easily observed at the same time that a semiconductor device is tested. SOLUTION: A semiconductor inspection system is constituted of a semiconductor test device B having a wafer prober 5 and a tester head 6 and an emission microscope device A having a microscope device 1. The microscope device 1 is constituted by being provided with a microscope part 11, a camera 12 and a transfer lens 10 installed below. Then, the microscope device 1 is driven to be set by a microscope device driving part 2 so that the lens 10 is inserted in the aperture part 61 of the head 6 and opposed to a semiconductor substrate S. Thus, the semiconductor inspection device constituted so that observing magnification can be easily switched and a visual field range can be easily changed by observing a transferred image transferred outside the head 6 by using the microscope part 11 and the camera 12, is obtained.

公开(公告)号：JPH11326074A

公开(公告)日：1999-11-26

申请号：JP12479298

申请日：1998-05-07

Applicant: HAMAMATSU PHOTONICS KK

Inventor： INOUE TAKAYUKI ,  SAKAMOTO SHIGERU

IPC: G01K11/12 ,  G01J5/08 ,  G01J5/58

Abstract: PROBLEM TO BE SOLVED: To provide a temperature measuring method and a device capable of measuring temperature at a high speed and having a small circuit scale. SOLUTION: A pulse-shaped laser beam having different oscillation wave- lengths at the time immediately after a pulse rise and at the stationary time is repeatedly radiated to a measured object 20 from a laser light source 16, the aging change of the intensity of the interference light by the reflected light of the laser beam from the measured object 20 is detected by a light detection section 32 and sampled by a sampling section 34 to obtain the interference light intensity change for each pulse. The value at the stationary time of the intensity of the interference light from the measured object 20 obtained for the preceding pulse of each pulse is stored in a memory section 36 as an offset value, the interference light intensity change is compared in size with the offset value by a judgment section 40, and the changing direction of the temperature of the measured object 20 is judged based on the compared result.

公开(公告)号：JP2000241344A

公开(公告)日：2000-09-08

申请号：JP4309099

申请日：1999-02-22

Applicant: HAMAMATSU PHOTONICS KK

Inventor： SAKAMOTO SHIGERU

IPC: G01N33/497 ,  G01N1/02 ,  G01N21/17

Abstract: PROBLEM TO BE SOLVED: To obtain the subject surface inspecting device capable of inspecting an article to be inspected with high accuracy by using a dark visual field method and capable of being reduced in size and weight. SOLUTION: The surface inspecting device 1 for a transparent substrate inspects the article W to be inspected on the transparent substrate 2 and is equipped with an illumination means 10 for illuminating the transparent substrate 2 with almost parallel light, the reflecting mirror 3 arranged at the position reflecting the light emitted from the illumination means 10 to be transmitted through the transparent substrate 3, a light converging means 20 for separating the light reflected from the reflecting mirror 3 into direct reflected light L1 and scattered light L2 and determining the reflecting directions of both lights, and an imaging means 30 arranged at the position missing the direct reflected light L1 and taking in the scattered light L2 to take the image of the transparent substrate 2.

公开(公告)号：JP2000126157A

公开(公告)日：2000-05-09

申请号：JP30540098

申请日：1998-10-27

Applicant: HAMAMATSU PHOTONICS KK

Inventor： BA TOSHITAKE ,  SAKAMOTO SHIGERU ,  SHINODA KAZUNORI

IPC: A61B5/08 ,  A61B5/087

Abstract: PROBLEM TO BE SOLVED: To provide a nasal cavity ventilation rate-inspecting instrument which can measure a snorting pattern of a subject at a higher accuracy. SOLUTION: An inspecting instrument 10 which is designed to inspect the degree of nostril snorting of a subject P by imaging a snorting pattern of waster drops W generated on the entire surface 1a of an examination plate 1 is provided with an optical system to irradiate the plate 1 with parallel light from the side of the other surface 1b thereof, a spot light source 5 to admit the light into the plate 7, an imaging device 6 which receives the light emitted fro the plate 1 through the optical system to photograph a snorting pattern and a case 8 which has an opposed surface 11a facing the mouth of the subject P while covering the light source 5, the optical system and the imaging device with the one surface arranged with the opposed surface 11a at an acute angle. In this case, when the subject places his nose on the plate 1, his mouth is becomes hard to hit against the case thereby enabling stale arrangement thereof at a proper position. Moreover, the combination of the light source 5 and the optical system allows reduction in occupying spaces of the light source 5, the optical system and the imaging device 6.

公开(公告)号：JP2000060893A

公开(公告)日：2000-02-29

申请号：JP23366098

申请日：1998-08-20

Applicant: KOWA CO ,  HAMAMATSU PHOTONICS KK ,  OBANA AKIRA ,  MIKI NORIHIKO

Inventor： KOBAYASHI KOJI ,  HIRANO TATSU ,  SAKAMOTO SHIGERU ,  NIWA HIDEAKI ,  OBANA AKIRA ,  MIKI NORIHIKO

IPC: A61B18/20 ,  A61B3/12 ,  A61B3/15 ,  A61F9/007 ,  A61F9/008

Abstract: PROBLEM TO BE SOLVED: To provide an ophthalmological treatment device capable of surely treating a neovascular lesion without affecting normal tissues. SOLUTION: Laser beams from a laser beam source 1 for treatment and a laser beam source 5 for diagnosis are two-dimensionally deflected by a light deflection element 8 and a galvano-mirror 13, are irradiated to an eyeground and the eyeground images are displayed on a monitor 26. A photosensitive material provided with a specific accumulation property to a neo vascular is administered to a person to be tested, the fluorescent images of the eyeground are observed and a part including the neo vascular is specified. At the time of treating a disease part, the laser light source 1 for the treatment is operated, and when a light beam scans the specified disease part, the intensity of the light beam is reinforced through a control circuit 29 and a driving circuit 28 for driving an optical modulator 2. In the constitution, since the disease part is surely specified and the light intensity of the laser beam is reinforced at the part, only the neo vascular is surely nectrotized or closed.