METHOD OF FABRICATING NANO-RESISTORS
    21.
    发明申请
    METHOD OF FABRICATING NANO-RESISTORS 审中-公开
    制备纳米电阻的方法

    公开(公告)号:WO2011096790A3

    公开(公告)日:2011-11-10

    申请号:PCT/MY2010000317

    申请日:2010-12-13

    CPC classification number: H01L27/0802

    Abstract: The present invention describes a novel method of fabricating nano-resistors (22) which allows full integration with standard CMOS fabrication process. The resistor comprises long and thin nano-structures as resistive element. It is formed by conductive nano-spacers (18B) on insulating layer. An embodiment of such structure is polysilicon nano-structures doped or implanted with n-type or p-type ions (20) to improve material conductance. The electrical properties of the device will change with respect to the dimension of these nano-structures. Resistors with polysilicon nano-structures down to 10 nm can be produced with resulting measured resistance in the MOhm scale.

    Abstract translation: 本发明描述了一种制造纳米电阻器(22)的新方法,其允许与标准CMOS制造工艺的完全集成。 电阻器包括长而薄的纳米结构作为电阻元件。 它由绝缘层上的导电纳米间隔物(18B)形成。 这种结构的实施例是掺杂或注入n型或p型离子(20)的多晶硅纳米结构,以改善材料电导率。 器件的电学特性将相对于这些纳米结构的尺寸而变化。 可以产生具有低至10nm的多晶硅纳米结构的电阻器,其中产生测量的电阻为莫尔刻度。

    A GAS SENSING SYSTEM
    22.
    发明申请
    A GAS SENSING SYSTEM 审中-公开
    气体传感系统

    公开(公告)号:WO2012154029A1

    公开(公告)日:2012-11-15

    申请号:PCT/MY2012/000093

    申请日:2012-04-27

    Abstract: The present invention relates to a gas sensing system (100) for detecting a particular gas from an environment. The gas sensing system (100) comprises of a micropump device (110), a diffuser (120), a micro-channel (130), a gas sensor (140), and an exhaust micro-channel (150). The micropump device (110), the diffuser (120), the micro-channel (130), the gas sensor (140), and the exhaust micro-channel (150) are fabricated on different substrates and are stacked and bonded on top of each other.

    Abstract translation: 本发明涉及一种用于从环境中检测特定气体的气体感测系统(100)。 气体传感系统(100)包括微泵装置(110),扩散器(120),微通道(130),气体传感器(140)和排气微通道(150)。 微型泵装置(110),扩散器(120),微通道(130),气体传感器(140)和排气微通道(150)制造在不同的基板上,并堆叠并结合在 彼此。

    AN IMPROVED MICRO CHECK VALVE
    24.
    发明申请
    AN IMPROVED MICRO CHECK VALVE 审中-公开
    一种改进的微型止回阀

    公开(公告)号:WO2009066980A3

    公开(公告)日:2009-10-22

    申请号:PCT/MY2008000145

    申请日:2008-11-20

    Inventor: LEE HING WAH

    CPC classification number: F16K99/0001 F16K15/026

    Abstract: The present invention discloses a micro check valve (100) for use in controlling the flow of fluid across a channel (160) in a micro-fluidic system, said valve (100) housed within a valve seat (140) and comprising a polygonal mass (110) connected to a base (120) through a resilient means (130). The mass (110) is a polygonal member with a predetermined thickness having a first side surface (101 ) exposed to the entry of fluid flowing in the channel (160), a second side surface (102) distanced apart and parallel to the first side surface (101 ), and having a longer length than the first side surface (101 ), a third side surface (103) and a fourth side surface (104) adjoining both ends of the first side surface (101 ) and the second side surface (102), said third side surface (103) and fourth side surface (104) disposed with a plurality of protruding dimples (106). Elastic deformation of the resilient means (130) due to pressure exerted on the mass (110) controls the flow of fluid across the channel (160), whereby establishment of a sealing contact between the mass (110) and the valve seat (140) blocks the flow of fluid across the channel (160) and a release of sealing contact between the mass (110) and the valve seat (140) allows the flow of fluid across the channel (160).

    Abstract translation: 本发明公开了用于控制穿过微流体系统中的通道(160)的流体流量的微型止回阀(100),所述阀(100)容纳在阀座(140)内并且包括多边质量块 (110)通过弹性装置(130)连接到基座(120)。 质量块110是具有预定厚度的多边形构件,该多边形构件具有暴露于在通道160中流动的流体的入口的第一侧表面101,与第一侧相平行的第二侧表面102, 其特征在于,所述第一侧面(101)和所述第二侧面(101)的两端相邻的第三侧面(103)和第四侧面(104)具有比所述第一侧面 (102),所述第三侧表面(103)和第四侧表面(104)设置有多个突起凹陷(106)。 由于施加在质量体(110)上的压力而引起的弹性装置(130)的弹性变形控制通过通道(160)的流体流动,由此建立质量体(110)和阀座(140)之间的密封接触, 阻塞通过通道(160)的流体流动,并且质量体(110)与阀座(140)之间的密封接触的释放允许流体流过通道(160)。

    FULLY INTEGRATED ISFET- VALVELESS MICROPUMP
    25.
    发明申请
    FULLY INTEGRATED ISFET- VALVELESS MICROPUMP 审中-公开
    完全集成的ISFET-VALVELESS MICROPUMP

    公开(公告)号:WO2009045092A3

    公开(公告)日:2009-06-11

    申请号:PCT/MY2008000117

    申请日:2008-09-29

    CPC classification number: F04B19/006 G01N27/4148

    Abstract: The present invention relates to a fully integrated ISFET valveless micropump for use as a pH sensor and as a chemical based sensor especially intended for Wireless Sensor Network (WSN) characterized in that wherein the valveless pump with ISFET is embedded along a pump channel and temperature sensors at its inlet and wherein a membrane in the middle is the pump diaphragm and is electrostatically actuated by an electrode above it which is deposited on the glass and wherein when the membrane controlled by a microcontroller is in motion, fluid or gas would be pumped in thru the inlet and travels thru the channel where ISFET is located and out thru the outlet.

    Abstract translation: 本发明涉及用作pH传感器和特别用于无线传感器网络(WSN)的基于化学传感器的完全集成的ISFET无阀微型泵,其特征在于,其中具有ISFET的无阀泵沿泵通道和温度传感器 在其入口处,并且其中中间的膜是泵隔膜,并且由其上方的电极静电致动,沉积在玻璃上,并且其中当由微控制器控制的膜运动时,流体或气体将被泵送通过 入口并通过ISFET所在的通道穿过出口。

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