Abstract:
The present invention describes a novel method of fabricating nano-resistors (22) which allows full integration with standard CMOS fabrication process. The resistor comprises long and thin nano-structures as resistive element. It is formed by conductive nano-spacers (18B) on insulating layer. An embodiment of such structure is polysilicon nano-structures doped or implanted with n-type or p-type ions (20) to improve material conductance. The electrical properties of the device will change with respect to the dimension of these nano-structures. Resistors with polysilicon nano-structures down to 10 nm can be produced with resulting measured resistance in the MOhm scale.
Abstract:
The present invention relates to a gas sensing system (100) for detecting a particular gas from an environment. The gas sensing system (100) comprises of a micropump device (110), a diffuser (120), a micro-channel (130), a gas sensor (140), and an exhaust micro-channel (150). The micropump device (110), the diffuser (120), the micro-channel (130), the gas sensor (140), and the exhaust micro-channel (150) are fabricated on different substrates and are stacked and bonded on top of each other.
Abstract:
The present invention discloses a micro check valve (100) for use in controlling the flow of fluid across a channel (160) in a micro-fluidic system, said valve (100) housed within a valve seat (140) and comprising a polygonal mass (110) connected to a base (120) through a resilient means (130). The mass (110) is a polygonal member with a predetermined thickness having a first side surface (101 ) exposed to the entry of fluid flowing in the channel (160), a second side surface (102) distanced apart and parallel to the first side surface (101 ), and having a longer length than the first side surface (101 ), a third side surface (103) and a fourth side surface (104) adjoining both ends of the first side surface (101 ) and the second side surface (102), said third side surface (103) and fourth side surface (104) disposed with a plurality of protruding dimples (106). Elastic deformation of the resilient means (130) due to pressure exerted on the mass (110) controls the flow of fluid across the channel (160), whereby establishment of a sealing contact between the mass (110) and the valve seat (140) blocks the flow of fluid across the channel (160) and a release of sealing contact between the mass (110) and the valve seat (140) allows the flow of fluid across the channel (160).
Abstract:
The present invention relates to a fully integrated ISFET valveless micropump for use as a pH sensor and as a chemical based sensor especially intended for Wireless Sensor Network (WSN) characterized in that wherein the valveless pump with ISFET is embedded along a pump channel and temperature sensors at its inlet and wherein a membrane in the middle is the pump diaphragm and is electrostatically actuated by an electrode above it which is deposited on the glass and wherein when the membrane controlled by a microcontroller is in motion, fluid or gas would be pumped in thru the inlet and travels thru the channel where ISFET is located and out thru the outlet.
Abstract:
A chemical sensor having an ion sensitive field effect transistor (ISFET) comprising a substrate (10) situated with a source (4) and a drain (3); an ion sensing gate (5) disposed between the source and the drain; an ion-sensitive film (1) formed on the surface of the substrate and the ion sensing gate; an electrode domain (6) formed on the ion-sensitive film surrounding the periphery of the ion sensing gate (5) characterized in that the electrode domain (6) is made of tungsten, titanium or tungsten suicide.