Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric element having good dielectric properties by reducing the difference of displacement caused by the polarization of applied voltage, and to provide a method of manufacturing the same and a piezoelectric application device using the same. SOLUTION: The piezoelectric element includes a substrate 6, a metal layer 7 arranged on the substrate 6, a dielectric film 8 arranged on the metal layer 7, a dielectric film 10 arranged over the dielectric film 8 through an adhesive layer 9, and a metal layer 11 arranged on the dielectric film 10. The crystalline orientation tendency of the dielectric film 8 and dielectric film 10 is set to become higher as the films approach the junction surface with the adhesion layer 9. In this arrangement, the difference of voltage-displacement properties caused by the polarization of applied voltage can be reduced as a whole of the piezoelectric element. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide an element for a micro-mechanical switch surely driven even at a low voltage of several volts. SOLUTION: The element for the micro-mechanical switch has a substrate 9 with a through-hole 10, an elastic body section 13 and a driving section 14. The element has a supporter 15 holding one end on the driving section 14 side in the peripheral sections of the opposed two sides of the through-hole 10 and a transfer electrode section 12 having a conductor section 11 in a part of a surface and supporting the opposed two sides by the elastic body section 13 and being suspended on the through-hole 10. The driving section 14 is composed of a lower electrode layer 17, a piezoelectric body layer 18, and an upper electrode layer 19 from a lower section. The transfer electrode section 12 is moved vertically by warping the piezoelectric body layer 18 by applying a voltage to these upper and lower electrode layers 17 and 19. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a dispensing apparatus capable of dispensing prescribed liquid and solid components while extracting/moving the solid component into other liquid in approximate synchronism with its dispensing operation. SOLUTION: The dispensing apparatus is composed of a component separating section and a pipette section 11. The component separating section includes an introducing channel 7 for introducing a first solution 6 containing solid particles 4, a flow channel 2 for introducing a second solution 9, concentration gradient generating means 3 for generating a concentration gradient of the solid particles 4 in the middle portion of the flow channel 2, and a lead-out channel 8 for leading out the first solution 6. The pipette section 11 is disposed so as to communicate with an end of the flow channel 2 from which the second solution 9 containing separated solid particles 4 moved from the first solution 6 into the second solution 9 by the concentration gradient generating means 3 is discharged. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To improve the measuring accuracy of a cell electrophysiological sensor. SOLUTION: A device for the cell electrophysiological sensor is equipped with a cell-holing chip 11 and a substrate 9 for covering the sides of the cell-holding chip 11 so as to attain the objectives. Furthermore, the cell-holing chip 11 is provided with a conducting hole 14 connecting the upper and the lower surfaces thereof. The cell-holding chip 11 comprises silicon as the principal component. The substrate 9 is formed of glass and a hydrophilic film 16, composed of at least either silicon oxide or silicon nitride, is formed on each side of the cell-holing chip 11. The substrate 9 is heat-fused to the hydrophilic film 16. Thus, gaps between the sides of the cell-holding chip 11 and the substrate 9 can be reduced to raise airtightness and as a result, improve the measurement accuracy of the cell electrophysiological sensor. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To improve the adhesion with a through hole of a cell and improve the measurement precision of a device for measuring cellular potential. SOLUTION: This substrate for the device for measuring the cellular potential includes a single crystal substrate 15 that has a first surface and a second surface facing the first surface and has a diamond structure of (100) plane orientation. A depression 20 is formed in the first surface, through holes 21 are formed from the depression 20 toward the second surface, the depression 20 has an inner wall that extends from openings of the through holes 21 to the outer periphery, bends, and leads to the first surface, and the diameter of the through holes 21 is longer than 0 μm and 3 μm or shorter. Thus, the surface roughness of the inner wall of the depression 20 can be reduced, adhesion of a cell with the through holes 21 can be improved, and as a result, the measurement precision of the device 11 for measuring the cellular potential can be improved. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To improve drawing accuracy. SOLUTION: This optical reflection element unit includes an optical reflection element 5 having a mirror part 6 and a drive part for vibrating the mirror part 6, and a package 18 for accommodating the mirror part 6. The package 18 has a light transmission part 27 above the mirror part 6. The surface 27A of the light transmission part 27 is constituted by a portion of a sphere having a center point 28 at the mirror part 6. Thereby, this optical reflection element restrains emission of unnecessary reflection light onto a scanning surface, such as a screen, and as a result, it can improve the drawing accuracy. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide an inexpensive switch without necessity of another mounting package. SOLUTION: Two sheets of substrates 9, 10 at least at one of which an outside electrode is installed are mutually stuck to form a cavity part in the interior. In this cavity part, a first electrode part 19 which is supported and suspended in the cavity part in both-end support shape and a second electrode 24 which is opposedly arranged with a fixed spacing at the first electrode part 19 are installed via: a driving part 16 in which a lower part electrode layer 20, a piezoelectric layer 21, and an upper part electrode layer 22 are sequentially formed; and an elastic body part 17 consisting of at least one part of these upper part electrode layer 22, the lower part electrode layer 20, and the piezoelectric layer 21. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To improve the measurement accuracy of a cell electrophysiological sensor. SOLUTION: This device for the cell electrophysiological sensor has a cell-holding plate 10 having a conducting hole 9, a storage tank 12 disposed on the cell-holding plate 10, and a cell-introducing route 16 for injecting cells in the storage tank 12, wherein the flow exit 18 of the cell-introducing route 16 is upward directed. Thereby, the present invention enables to catch the cells at the opening of the conducting hole 9 more quickly than cell refuses, to improve the adhesiveness of the cells to the opening of the conducting hole 9, and consequently to improve the measurement accuracy of the cell electrophysiological sensor. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator in which occurrence of disconnection in metal wiring due to stress migration is reduced.SOLUTION: A piezoelectric actuator includes a vibration plate formed of a silicon substrate 15 and a piezoelectric layer 17 at the upper part of the vibration plate. The piezoelectric layer 17 comprises a lower electrode film 19, a piezoelectric film 20 provided at the upper part of the lower electrode film 19, and an upper electrode film 21 provided at the upper part of the piezoelectric film 20. The intrinsic stress of at least one of the electrode films of the upper electrode film 21 or the lower electrode film 19 is made to compressive stress.