Piezoelectric element and method of manufacturing the same, and piezoelectric application device using the same
    21.
    发明专利
    Piezoelectric element and method of manufacturing the same, and piezoelectric application device using the same 审中-公开
    压电元件及其制造方法以及使用其的压电应用器件

    公开(公告)号:JP2009170631A

    公开(公告)日:2009-07-30

    申请号:JP2008006583

    申请日:2008-01-16

    Abstract: PROBLEM TO BE SOLVED: To provide a piezoelectric element having good dielectric properties by reducing the difference of displacement caused by the polarization of applied voltage, and to provide a method of manufacturing the same and a piezoelectric application device using the same. SOLUTION: The piezoelectric element includes a substrate 6, a metal layer 7 arranged on the substrate 6, a dielectric film 8 arranged on the metal layer 7, a dielectric film 10 arranged over the dielectric film 8 through an adhesive layer 9, and a metal layer 11 arranged on the dielectric film 10. The crystalline orientation tendency of the dielectric film 8 and dielectric film 10 is set to become higher as the films approach the junction surface with the adhesion layer 9. In this arrangement, the difference of voltage-displacement properties caused by the polarization of applied voltage can be reduced as a whole of the piezoelectric element. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 解决的问题:为了提供具有良好的介电特性的压电元件,通过减小施加电压极化引起的位移差异,并提供其制造方法和使用该压电元件的压电施加装置。 解决方案:压电元件包括​​基板6,布置在基板6上的金属层7,布置在金属层7上的电介质膜8,通过粘合层9布置在电介质膜8上的电介质膜10, 以及布置在电介质膜10上的金属层11.当膜接近与粘合层9的接合面时,电介质膜8和电介质膜10的结晶取向趋势变得更高。在这种布置中, 由于施加电压的极化引起的电压位移特性可以作为整体的压电元件而降低。 版权所有(C)2009,JPO&INPIT

    Actuator and its manufacturing method
    22.
    发明专利
    Actuator and its manufacturing method 审中-公开
    执行机构及其制造方法

    公开(公告)号:JP2009095180A

    公开(公告)日:2009-04-30

    申请号:JP2007265156

    申请日:2007-10-11

    Abstract: PROBLEM TO BE SOLVED: To provide an element for a micro-mechanical switch surely driven even at a low voltage of several volts. SOLUTION: The element for the micro-mechanical switch has a substrate 9 with a through-hole 10, an elastic body section 13 and a driving section 14. The element has a supporter 15 holding one end on the driving section 14 side in the peripheral sections of the opposed two sides of the through-hole 10 and a transfer electrode section 12 having a conductor section 11 in a part of a surface and supporting the opposed two sides by the elastic body section 13 and being suspended on the through-hole 10. The driving section 14 is composed of a lower electrode layer 17, a piezoelectric body layer 18, and an upper electrode layer 19 from a lower section. The transfer electrode section 12 is moved vertically by warping the piezoelectric body layer 18 by applying a voltage to these upper and lower electrode layers 17 and 19. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:即使在几伏特的低电压下,也可以提供一个确保驱动的微机械开关元件。 解决方案:用于微机械开关的元件具有带有通孔10的基板9,弹性体部分13和驱动部分14.该元件具有支撑件15,支撑件15将一端保持在驱动部分14侧 在通孔10的相对的两侧的周边部分和在表面的一部分中具有导体部分11的转移电极部分12,并且通过弹性体部分13支撑相对的两侧并悬挂在通孔 驱动部14由下部电极层17,压电体层18和下部的上部电极层19构成。 转印电极部分12通过向这些上部和下部电极层17和19施加电压使翘曲压电体层18垂直移动。版权所有(C)2009,JPO&INPIT

    Dispensing apparatus
    23.
    发明专利
    Dispensing apparatus 有权
    分配装置

    公开(公告)号:JP2009058461A

    公开(公告)日:2009-03-19

    申请号:JP2007227734

    申请日:2007-09-03

    Abstract: PROBLEM TO BE SOLVED: To provide a dispensing apparatus capable of dispensing prescribed liquid and solid components while extracting/moving the solid component into other liquid in approximate synchronism with its dispensing operation.
    SOLUTION: The dispensing apparatus is composed of a component separating section and a pipette section 11. The component separating section includes an introducing channel 7 for introducing a first solution 6 containing solid particles 4, a flow channel 2 for introducing a second solution 9, concentration gradient generating means 3 for generating a concentration gradient of the solid particles 4 in the middle portion of the flow channel 2, and a lead-out channel 8 for leading out the first solution 6. The pipette section 11 is disposed so as to communicate with an end of the flow channel 2 from which the second solution 9 containing separated solid particles 4 moved from the first solution 6 into the second solution 9 by the concentration gradient generating means 3 is discharged.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种能够在与其分配操作大致同步地提取/移动固体组分到其它液体的同时分配规定的液体和固体组分的分配装置。 分配装置由分离部分和移液管部分11组成。部件分离部分包括用于引入含有固体颗粒4的第一溶液6的引入通道7,用于引入第二溶液的流动通道2 如图9所示,用于产生固体颗粒4在流动通道2的中间部分的浓度梯度的浓度梯度产生装置3以及用于引出第一溶液6的引出通道8.移液管部分11设置成 与通过浓度梯度发生装置3将分离的固体颗粒4从第一溶液6移动到第二溶液9的第二溶液9从该流路2的一端排出。 版权所有(C)2009,JPO&INPIT

    Device for cell electrophysiological sensor, and cell electrophysiological sensor using the same
    24.
    发明专利
    Device for cell electrophysiological sensor, and cell electrophysiological sensor using the same 有权
    用于细胞电生理传感器的装置和使用其的细胞电生理传感器

    公开(公告)号:JP2008306968A

    公开(公告)日:2008-12-25

    申请号:JP2007157213

    申请日:2007-06-14

    Abstract: PROBLEM TO BE SOLVED: To improve the measuring accuracy of a cell electrophysiological sensor. SOLUTION: A device for the cell electrophysiological sensor is equipped with a cell-holing chip 11 and a substrate 9 for covering the sides of the cell-holding chip 11 so as to attain the objectives. Furthermore, the cell-holing chip 11 is provided with a conducting hole 14 connecting the upper and the lower surfaces thereof. The cell-holding chip 11 comprises silicon as the principal component. The substrate 9 is formed of glass and a hydrophilic film 16, composed of at least either silicon oxide or silicon nitride, is formed on each side of the cell-holing chip 11. The substrate 9 is heat-fused to the hydrophilic film 16. Thus, gaps between the sides of the cell-holding chip 11 and the substrate 9 can be reduced to raise airtightness and as a result, improve the measurement accuracy of the cell electrophysiological sensor. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提高细胞电生理传感器的测量精度。 解决方案:用于细胞电生理传感器的装置配备有电池保持芯片11和用于覆盖电池保持芯片11的侧面的基板9,以达​​到目的。 此外,电池开孔芯片11设置有连接其上表面和下表面的导电孔14。 电池保持片11包含硅作为主要成分。 基板9由玻璃形成,并且在电池孔洞芯片11的每一侧形成由至少一种氧化硅或氮化硅构成的亲水性膜16.基板9被热熔合到亲水膜16。 因此,可以减小电池保持用芯片11和基板9的两侧之间的间隙,以提高气密性,结果提高电池电生理传感器的测量精度。 版权所有(C)2009,JPO&INPIT

    Device for measuring cellular potential, substrate used for the same, and method of manufacturing the substrate for the same
    25.
    发明专利
    Device for measuring cellular potential, substrate used for the same, and method of manufacturing the substrate for the same 有权
    用于测量细胞电位的装置,用于其的底物及其制造方法

    公开(公告)号:JP2011022153A

    公开(公告)日:2011-02-03

    申请号:JP2010186807

    申请日:2010-08-24

    Abstract: PROBLEM TO BE SOLVED: To improve the adhesion with a through hole of a cell and improve the measurement precision of a device for measuring cellular potential. SOLUTION: This substrate for the device for measuring the cellular potential includes a single crystal substrate 15 that has a first surface and a second surface facing the first surface and has a diamond structure of (100) plane orientation. A depression 20 is formed in the first surface, through holes 21 are formed from the depression 20 toward the second surface, the depression 20 has an inner wall that extends from openings of the through holes 21 to the outer periphery, bends, and leads to the first surface, and the diameter of the through holes 21 is longer than 0 μm and 3 μm or shorter. Thus, the surface roughness of the inner wall of the depression 20 can be reduced, adhesion of a cell with the through holes 21 can be improved, and as a result, the measurement precision of the device 11 for measuring the cellular potential can be improved. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题:提高与电池的通孔的粘附性,并提高用于测量细胞电位的装置的测量精度。 解决方案:用于测量细胞电位的装置的该衬底包括单晶衬底15,其具有面向第一表面的第一表面和第二表面,并具有(100)面取向的金刚石结构。 在第一表面上形成有凹部20,从凹部20向第二面形成贯通孔21,凹部20具有从通孔21的开口向外周延伸的内壁,弯曲, 第一表面和通孔21的直径比0μm和3μm或更短。 因此,可以减小凹部20的内壁的表面粗糙度,能够提高电池与通孔21的密合性,结果能够提高用于测定细胞电位的装置11的测定精度 。 版权所有(C)2011,JPO&INPIT

    Optical reflection element unit
    26.
    发明专利
    Optical reflection element unit 审中-公开
    光学反射元件

    公开(公告)号:JP2010060689A

    公开(公告)日:2010-03-18

    申请号:JP2008224405

    申请日:2008-09-02

    Abstract: PROBLEM TO BE SOLVED: To improve drawing accuracy. SOLUTION: This optical reflection element unit includes an optical reflection element 5 having a mirror part 6 and a drive part for vibrating the mirror part 6, and a package 18 for accommodating the mirror part 6. The package 18 has a light transmission part 27 above the mirror part 6. The surface 27A of the light transmission part 27 is constituted by a portion of a sphere having a center point 28 at the mirror part 6. Thereby, this optical reflection element restrains emission of unnecessary reflection light onto a scanning surface, such as a screen, and as a result, it can improve the drawing accuracy. COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:提高绘图精度。 解决方案:该光反射元件单元包括具有镜部6和用于振动镜部6的驱动部的光反射元件5和用于容纳镜部6的封装18.封装18具有透光性 透镜部27的表面27A由在镜部6处具有中心点28的球体的一部分构成。由此,该光反射元件将不需要的反射光发射到 扫描表面,例如屏幕,结果可以提高绘制精度。 版权所有(C)2010,JPO&INPIT

    Switch and its manufacturing method
    27.
    发明专利
    Switch and its manufacturing method 审中-公开
    开关及其制造方法

    公开(公告)号:JP2009140799A

    公开(公告)日:2009-06-25

    申请号:JP2007316901

    申请日:2007-12-07

    Abstract: PROBLEM TO BE SOLVED: To provide an inexpensive switch without necessity of another mounting package. SOLUTION: Two sheets of substrates 9, 10 at least at one of which an outside electrode is installed are mutually stuck to form a cavity part in the interior. In this cavity part, a first electrode part 19 which is supported and suspended in the cavity part in both-end support shape and a second electrode 24 which is opposedly arranged with a fixed spacing at the first electrode part 19 are installed via: a driving part 16 in which a lower part electrode layer 20, a piezoelectric layer 21, and an upper part electrode layer 22 are sequentially formed; and an elastic body part 17 consisting of at least one part of these upper part electrode layer 22, the lower part electrode layer 20, and the piezoelectric layer 21. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供廉价的开关,而不需要另外的安装包装。 解决方案:至少其中一个安装有外部电极的两片基板9,10相互粘合以在内部形成空腔部分。 在该空腔部中,通过以下方式安装第一电极部件19,该第一电极部件19被支撑并悬挂在两端支撑形状的空腔部分中,以及在第一电极部件19处以固定的间隔相对布置的第二电极24 依次形成下部电极层20,压电层21和上部电极层22的部分16; 以及由这些上部电极层22,下部电极层20和压电体层21的至少一部分构成的弹性体部17。(C)2009,JPO&INPIT

    Device for cell electrophysiological sensor and cell electrophysiological sensor using the same
    28.
    发明专利
    Device for cell electrophysiological sensor and cell electrophysiological sensor using the same 审中-公开
    使用细胞电生理传感器和细胞电生理传感器的装置

    公开(公告)号:JP2009027942A

    公开(公告)日:2009-02-12

    申请号:JP2007192804

    申请日:2007-07-25

    Abstract: PROBLEM TO BE SOLVED: To improve the measurement accuracy of a cell electrophysiological sensor.
    SOLUTION: This device for the cell electrophysiological sensor has a cell-holding plate 10 having a conducting hole 9, a storage tank 12 disposed on the cell-holding plate 10, and a cell-introducing route 16 for injecting cells in the storage tank 12, wherein the flow exit 18 of the cell-introducing route 16 is upward directed. Thereby, the present invention enables to catch the cells at the opening of the conducting hole 9 more quickly than cell refuses, to improve the adhesiveness of the cells to the opening of the conducting hole 9, and consequently to improve the measurement accuracy of the cell electrophysiological sensor.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提高细胞电生理传感器的测量精度。 解决方案:用于细胞电生理传感器的该装置具有具有导电孔9的细胞保持板10,设置在细胞保持板10上的储存槽12和用于在细胞保持板10中注入细胞的细胞导入路径16 储存罐12,其中细胞引入路线16的流出口18向上定向。 因此,本发明能够比导电孔9更快地捕获导电孔9的开口处的电池,从而提高电池与导电孔9的开口的密合性,从而提高电池的测量精度 电生理传感器 版权所有(C)2009,JPO&INPIT

    波長可変光フィルタ
    29.
    发明专利
    波長可変光フィルタ 审中-公开
    可变波长光学滤波器

    公开(公告)号:JP2014211466A

    公开(公告)日:2014-11-13

    申请号:JP2013086340

    申请日:2013-04-17

    CPC classification number: B81B3/00 G02B26/00 G02B5/26 G02B5/28

    Abstract: 【課題】本発明は、所定波長の光線を選択的に透過させる波長可変光フィルタに関し、フィルタ特性を向上させることを目的とする。【解決手段】この目的を達成するために、枠体4に支持された一対の反射板2,3の間隔を調節する波長可変光フィルタ1において、反射板2を支持する梁5を、圧電体からなる駆動層9と振動部13と反射板2を含む積層構造とし、複数の梁5を反射板2に対して対称配置するとともに、制御回路10により駆動層9を個別に制御する構成とした。【選択図】図2

    Abstract translation: 要解决的问题:提供具有能够选择性地允许预定波长的光束通过的增强的滤波器特性的可变波长滤光器。解决方案:可变波长光学滤波器1调节一对反射器2和 支撑反射体2的光束5具有包括压电体的驱动层9,振动部13和反射体2的叠层结构。多个光束5相对于反射体2对称地配置 控制电路10隔离地控制驱动层9。

    Piezoelectric actuator and optical reflecting element including the same
    30.
    发明专利
    Piezoelectric actuator and optical reflecting element including the same 审中-公开
    压电致动器和光学反射元件,包括它们

    公开(公告)号:JP2013191790A

    公开(公告)日:2013-09-26

    申请号:JP2012058285

    申请日:2012-03-15

    Abstract: PROBLEM TO BE SOLVED: To provide a piezoelectric actuator in which occurrence of disconnection in metal wiring due to stress migration is reduced.SOLUTION: A piezoelectric actuator includes a vibration plate formed of a silicon substrate 15 and a piezoelectric layer 17 at the upper part of the vibration plate. The piezoelectric layer 17 comprises a lower electrode film 19, a piezoelectric film 20 provided at the upper part of the lower electrode film 19, and an upper electrode film 21 provided at the upper part of the piezoelectric film 20. The intrinsic stress of at least one of the electrode films of the upper electrode film 21 or the lower electrode film 19 is made to compressive stress.

    Abstract translation: 要解决的问题:提供一种压电致动器,其中由于应力迁移导致金属布线中的断开发生减少。压电致动器包括由硅基板15和压电层17形成的振动板,压电层17在上部 振动板。 压电层17包括下电极膜19,设置在下电极膜19的上部的压电膜20和设置在压电膜20的上部的上电极膜21.至少 使上电极膜21或下电极膜19的电极膜之一成为压应力。

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