CONTACT LITHOGRAPHY APPARATUS, SYSTEM AND METHOD
    22.
    发明申请
    CONTACT LITHOGRAPHY APPARATUS, SYSTEM AND METHOD 审中-公开
    联系人地平线设备,系统和方法

    公开(公告)号:WO2008048215A3

    公开(公告)日:2008-07-24

    申请号:PCT/US2006028299

    申请日:2006-07-21

    CPC classification number: G03F7/7035 B82Y10/00 B82Y40/00 G03F7/0002

    Abstract: A contact lithography apparatus (100,220), system (200) and method (300) use a deformation (320) to facilitate pattern transfer (300). The apparatus (100,220), system (200) and method 300 include a spacer (120,226) that provides a spaced apart parallel and proximal orientation 310 of lithographic elements, such as a mask (110,228a,222) and a substrate (130,228b,224), when in mutual contact with the spacer (120,226). One or more of the mask (110,228a,222), the substrate (130,228b,224) and the spacer (120,226) is deformable, such that deformation (320) thereof facilitates the pattern transfer (300).

    Abstract translation: 接触光刻设备(100,220),系统(200)和方法(300)使用变形(320)以便于图案转印(300)。 设备(100,220),系统(200)和方法300包括间隔物(120,226),其提供光刻元件的间隔开的平行和近端取向310,例如掩模(110,228a,222)和基底(130,228b, 224),当与间隔物(120,226)相互接触时。 掩模(110,228a,222),基板(130,228b,224)和间隔件(120,226)中的一个或多个可变形,使得其变形(320)有助于图案转印(300)。

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