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    Angular piezoelectric actuator for a MEMS shutter and manufacturing method thereof
    21.
    发明授权
    Angular piezoelectric actuator for a MEMS shutter and manufacturing method thereof 有权

    公开(公告)号：US12117605B2

    公开(公告)日：2024-10-15

    申请号：US17355861

    申请日：2021-06-23

    Applicant: STMicroelectronics S.r.l.

    Inventor： Domenico Giusti ,  Massimiliano Merli

    IPC: G02B26/00 ,  G02B26/04 ,  H10N30/057 ,  H10N30/20 ,  H10N30/50 ,  H10N30/88

    CPC classification number: G02B26/04 ,  H10N30/057 ,  H10N30/2047 ,  H10N30/506 ,  H10N30/88

    Abstract: A MEMS actuator includes a main body having a central portion, couplable to a substrate, and a peripheral portion suspended over the substrate when the central portion is coupled to the substrate. The peripheral portion has a deformable structure extending around the central portion, and forming successively arranged membranes. The MEMS actuator includes bearing structures and corresponding piezoelectric actuators. The bearing structures are fixed at their top to the deformable structure and laterally delimit corresponding cavities, each having a lateral opening facing the central portion of the main body and closed at the top by a membrane. A fixed part of the membrane is fixed to the underlying bearing structure and a suspended part is laterally offset with respect to the underlying bearing structure. The piezoelectric actuators are controllable to cause deformation of the corresponding membrane and rotation of the bearing structures around the central portion of the main body.

    Resonant MEMS device having a tiltable, piezoelectrically controlled micromirror
    22.
    发明授权
    Resonant MEMS device having a tiltable, piezoelectrically controlled micromirror 有权

    公开(公告)号：US11933966B2

    公开(公告)日：2024-03-19

    申请号：US17715639

    申请日：2022-04-07

    Applicant: STMicroelectronics S.r.l.

    Inventor： Roberto Carminati ,  Nicolo' Boni ,  Massimiliano Merli

    IPC: G02B26/08 ,  B81B3/00

    CPC classification number: G02B26/0858 ,  B81B3/0021 ,  B81B2201/042

    Abstract: Disclosed herein is a method of making a microelectromechanical (MEMS) device. The method includes, in a single structural layer, affixing a tiltable structure to an anchorage portion with first and second supporting arms extending between the anchorage portion and opposite sides of the tiltable structure, and forming first and second resonant piezoelectric actuation structures extending between a constraint portion of the first supporting arm and the anchorage portion, on opposite sides of the first supporting arm. The method further includes coupling a handling wafer underneath the structural layer to define a cavity therebetween, and forming a passivation layer over the structural layer, the passivation layer having contact openings defined therein for routing metal regions for electrical coupling to respective electrical contact pads, the electrical contact pads being electrically connected to the first and second resonant piezoelectric actuation structures.

    Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirror
    24.
    发明授权
    Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirror 有权

    公开(公告)号：US11327295B2

    公开(公告)日：2022-05-10

    申请号：US16830920

    申请日：2020-03-26

    Applicant: STMicroelectronics S.r.l.

    Inventor： Roberto Carminati ,  Nicolo' Boni ,  Massimiliano Merli

    IPC: G02B26/08 ,  B81B3/00

    Abstract: A MEMS device is formed in a die of semiconductor material having a cavity defined therein and having an anchorage portion. A tiltable structure is elastically suspended over the cavity and has a main extension in a horizontal plane. First and second supporting arms extend between the anchorage portion and opposite sides of the tiltable structure. First and second resonant piezoelectric actuation structures are intended to be biased to thereby cause rotation of the tiltable structure about a rotation axis. The first supporting arm is formed by first and second torsion springs, which are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis and are coupled together at a constraint region. The first and second resonant piezoelectric actuation structures extend between the anchorage portion and the constraint structure, on first and second sides of the first supporting arm.

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