公开(公告)号：JP2013139352A

公开(公告)日：2013-07-18

申请号：JP2011290375

申请日：2011-12-29

Applicant: Sumco Corp ,  株式会社Sumco

Inventor： SUDO TOSHIAKI ,  SATO TADAHIRO ,  KITAHARA MASARU ,  OHARA MAMI

IPC: C30B15/10 ,  C30B29/06

Abstract: PROBLEM TO BE SOLVED: To provide a silica glass crucible producible by an easy method and suppressing melt level vibration.SOLUTION: The silica glass crucible includes: a straight body extending in the vertical direction and having an approximately cylindrical shape; a curved bottom; and a corner part connecting smoothly the straight body and the bottom. The inner surface of the crucible has a fine uneven structure.

Abstract translation: 要解决的问题：提供一种易于制造并抑制熔融水平振动的二氧化硅玻璃坩埚。解决方案：二氧化硅玻璃坩埚包括：在垂直方向上延伸并具有大致圆筒形状的直体; 一个弯曲的底部; 以及将直体和底部平滑连接的角部。 坩埚的内表面具有细小的不均匀结构。

公开(公告)号：JP2010105881A

公开(公告)日：2010-05-13

申请号：JP2008281170

申请日：2008-10-31

Applicant: Japan Siper Quarts Corp ,  Sumco Corp ,  ジャパンスーパークォーツ株式会社 ,  株式会社Sumco

Inventor： SATO TADAHIRO ,  MORIKAWA MASAKI

IPC: C03B20/00 ,  C30B15/10 ,  C30B29/06

CPC classification number: C03B19/095

Abstract: PROBLEM TO BE SOLVED: To provide a new method for manufacturing a quartz glass crucible for pulling a silicon single crystal, in which the bubble amount in a transparent layer is reduced without performing the polishing treatment of the whole inner surface.
SOLUTION: The method for manufacturing a quartz glass crucible includes: a process for forming a quartz glass crucible in which the inner surface side is a transparent layer and the outer surface side is a bubble layer, by subjecting a crucible-shaped molding formed from a quartz raw material powder to arc melting while imparting reduced pressure to the crucible-shaped molding from the inner surface in the outer surface direction and rotating the crucible-shaped molding; a bottom part direction movement process for moving bubbles present in the transparent layer of the inner surface of the wall part in the bottom part direction of the inner surface of the wall part by remelting the inner surface of the wall part of the quartz glass crucible by arc melting; and an outer peripheral direction movement process for moving the bubbles present in the transparent layer of the inner surface of the bottom part in the outer peripheral direction of the inner surface of the bottom part by remelting the inner surface of the bottom part of the quartz glass crucible by arc melting. Thereby, a quartz glass crucible in which the bubbles are accumulated in the corner part of the transparent layer formed by the inner surface of the wall part and the inner surface of the bottom part. Either of the bottom part direction movement process and the outer peripheral direction movement process can be carried out first.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：为了提供一种用于制造用于拉伸单晶的石英玻璃坩埚的新方法，其中透明层中的气泡量在不进行整个内表面的抛光处理的情况下减少。 解决方案：石英玻璃坩埚的制造方法包括：通过对坩埚状成形体进行成形，形成内表面侧为透明层，外表面侧为气泡层的石英玻璃坩埚的工序 由石英原料粉末形成电弧熔融，同时从外表面方向的内表面向坩埚形模制品施加减压并旋转坩埚形模制品; 通过重新熔化石英玻璃坩埚的壁部的内表面，在壁部的内表面的底部方向上的壁部的内表面的透明层中存在的气泡的底部方向移动过程 电弧熔化 以及外周方向运动处理，用于通过重新熔化石英玻璃的底部的内表面来移动存在于底部的内表面的内表面的透明层中的气泡在底部内表面的内表面的外周方向上 坩埚通过电弧熔化。 由此，在由壁部的内表面和底部的内表面形成的透明层的角部积聚有气泡的石英玻璃坩埚。 可以首先进行底部方向移动处理和外周方向移动处理。 版权所有（C）2010，JPO＆INPIT