公开(公告)号：KR1020140026786A

公开(公告)日：2014-03-06

申请号：KR1020120092408

申请日：2012-08-23

Applicant: 엘지디스플레이 주식회사

Inventor： 김용철 ,  김세준

IPC: H01L29/786

CPC classification number: B81B7/0016 ,  B81B2201/012 ,  B81B2203/04

Abstract: A micro electro-mechanical system switch capable of improving endurance includes: a substrate; a fixing electrode and a signal line which are separated from each other on the substrate; an operation beam which is partially overlapped with the fixing electrode and the signal line with a preset air gap on the substrate, and is electrically connected to the signal line according to the operation of the fixing electrode. And, the operation beam is formed in a conductive metal layer. The thickness of the metal layer of a first region where the fixing electrode is formed is thicker than that of the metal layer of a second region where the signal line is formed.

Abstract translation: 能够提高耐久性的微机电系统开关包括：基板; 在基板上彼此分离的固定电极和信号线; 与固定电极部分重叠的操作光束和在基板上具有预设气隙的信号线，并根据固定电极的操作与信号线电连接。 并且，操作光束形成在导电金属层中。 形成有固定电极的第一区域的金属层的厚度比形成信号线的第二区域的金属层的厚度厚。