Abstract:
The present invention relates to an oxide sintered body consisting of an indium oxide and a cerium oxide, wherein the cerium content is 0.3 to 9% by atom characterized in that said oxide sintered body has an In 2 O 3 phase of a bixbyite structure as a main crystal phase, has a CeO 2 phase of a fluorite-type structure finely dispersed as crystal grains having an average particle diameter of equal to or smaller than 3 µm, as a second phase; a production method for an oxide sintered body; a target for sputtering obtained by fabricating the oxide sintered body; and a transparent conductive film characterized by being formed on a substrate by a sputtering method, using the target.
Abstract translation:能够实现适合于蓝色LED或太阳能电池的透明导电膜的高速成膜和无节点成膜,最适合于获得该氧化物烧结体的溅射靶和制造方法 它们。 包含氧化铟和氧化铈的氧化物烧结体,还包含选自钛,锆,铪,钼和钨的金属元素组中的一种或多种金属元素(M元素)作为氧化物。 其中铈含量为0.3〜9原子%,作为Ce /(In + Ce + M)的原子数比,M元素含量为1原子%以下,原子比为M / (In + Ce + M),并且铈和M元素的总含量等于或低于9原子%,作为(Ce + M)/(In + Ce + M)的原子数比,其特征在于 所述氧化物烧结体具有作为主晶相的二氧化物结构的In 2 O 3相,具有以平均粒径为3以下的晶粒微分散的萤石型结构的CeO 2相 μm,作为第二相; 通过混合氧化铟粉末和氧化铈粉末得到的氧化物烧结体的制造方法以及含有M元素的氧化物粉末的平均粒径等于或小于1.5μm的原料粉末,然后将该混合粉末 ,并通过常压烧结法烧结成型体,或者通过热压法成型和烧结混合粉末等。
Abstract:
The present invention provides methods for fabricating an electrode device component, the method comprising the steps of: (i) providing a biocompatible carrier material, and (ii) performing an ablative method on the biocompatible carrier material to form a recess, the recess capable of receiving a biocompatible electrode material. The components so fabricated are useful as carriers for biological electrodes, such as cochlear electrodes and nerve cuff electrodes.
Abstract:
An activated gas injector includes a flow passage defining member partitioned into a gas activation passage and a gas introduction passage by a partition wall; a gas introduction port through which a process gas is introduced into the gas introduction passage; a pair of electrodes to be supplied with electrical power to activate the process gas, wherein the electrodes extend along the partition wall in the gas activation passage; through-holes formed in the partition wall and arranged along a longitudinal direction of the electrodes, wherein the through-holes allow the process gas to flow from the gas introduction passage to the gas activation passage; and gas ejection holes provided in the gas activation passage along the longitudinal direction of the electrodes, wherein the gas ejection holes allow the process gas activated in the gas activation passage to be ejected therefrom.
Abstract:
The present invention provides methods for fabricating an electrode device component, the method comprising the steps of: (i) providing a biocompatible carrier material, and (ii) performing an ablative method on the biocompatible carrier material to form a recess, the recess capable of receiving a biocompatible electrode material. The components so fabricated are useful as carriers for biological electrodes, such as cochlear electrodes and nerve cuff electrodes.
Abstract:
The present invention provides methods for fabricating an electrode device component, the method comprising the steps of: (i) providing a biocompatible carrier material, and (ii) performing an ablative method on the biocompatible carrier material to form a recess, the recess capable of receiving a biocompatible electrode material. The components so fabricated are useful as carriers for biological electrodes, such as cochlear electrodes and nerve cuff electrodes.