Abstract:
PROBLEM TO BE SOLVED: To provide a liquid supply mechanism which mixes uniformly a liquid and a liquid in line to supply, without using a mixing apparatus such as commercially available static mixer. SOLUTION: The liquid supply mechanism provided with a main pipe 52 through which purified water flows, a branch pipe 56 through which a surfactant solution flows, and a mixing portion 61 in which the branch pipe 56 is connected to the main pipe 52 to allow the purified water and the surfactant solution to flow together inside the main pipe 52 to mix, allows a rinse agent composed of a mixture of the purified water and the surfactant solution to flow through the main pipe 52 to supply, and is characterized in that when the purified water and the surfactant solution flow together, the flow rate of the purified water and the surfactant solution, and the inside diameter of the main pipe 52 and the branch pipe 56 are set such that Reynolds Number Re1 of the purified water and Reynolds Number Re2 satisfy Re1≤Re2. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a method of transforming the crystal structure of a group 13 element nitride, which method can transform the crystal structure of the nitride by using an apparatus of a structure simpler than that used in a method for transforming the crystal structure of a group 13 element nitride by a static pressure application method. SOLUTION: The method of transforming the crystal structure of a group 13 element nitride comprises converting carrier gas He and a powder of hexagonal aluminum nitride into an aerosol in an aerosol formation chamber 2, sending the aerosol to a film formation chamber 4 through a conveying pipe 3, previously evacuating the film formation chamber 4 by a vacuum pump 5 so that the chamber 4 may be kept at a degree of vacuum of 200 to 8,000 [Pa] after the aerosol is supplied thereto, and spraying the aerosol onto a substrate fixed to a substrate holder 7 from a nozzle 6 formed on the end of the conveying pipe 3 in the chamber 4 under conditions in which the impact strength at the time of collision of particles is 4 [GPa] or higher. The crystal structure of the aluminum nitride is transformed from a hexagonal crystal system to a cubic crystal system to progress the deposition of the cubic aluminum nitride on the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PURPOSE:To prepare safely, easily and continuously a cubic boron nitride (BN) in high purity, by generating an impact pressure in a mixture of a simple hexagonal BN powder or further containing a fine powder of a catalyst with a pressure transmission fluid by an intermittent electric discharge in a pressure vessel. CONSTITUTION:Hexagonal boron nitride (BN) powder in a simple substance or further containing one or more catalyst powders selected from Si, Al, Mg, Sb, Li, Cu, Ag, Sn and Pb is mixed with a pressure transmission fluid, e.g. transformer oil, and the resultant mixture is then filled in a pressure vessel. The vessel is then closed to generate an intermittent electrical discharge in the mixture, apply an impact pressure thereto and prepare the aimed cubic BN.