公开(公告)号：US07920258B2

公开(公告)日：2011-04-05

申请号：US12094475

申请日：2006-11-27

Applicant: Michael L. Myrick ,  Robert P. Freese ,  Luisa T. M. Profeta ,  Jonathan H. James ,  John C. Blackburn ,  Ryan J. Priore

Inventor： Michael L. Myrick ,  Robert P. Freese ,  Luisa T. M. Profeta ,  Jonathan H. James ,  John C. Blackburn ,  Ryan J. Priore

IPC: G01J3/40

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/28 ,  G01J3/36 ,  G01N21/274 ,  G01N21/35 ,  G01N21/3504 ,  G01N21/3563 ,  G01N21/3577

Abstract: A method of selecting components for a multivariate optical computing and analysis system to isolate a spectral region includes selecting a spectral region of interest; selecting a spectral element with a predetermined transmission characteristic to control a spectral range of an illumination source; illuminating a sample with the illumination source; and analyzing an optical frequency returned by the sample relative to the spectral region of interest.

Abstract translation: 选择用于多变量光学计算和分析系统以分离光谱区域的组件的方法包括选择感兴趣的光谱区域; 选择具有预定传输特性的频谱元件以控制照明源的光谱范围; 用照明源照射样品; 以及分析由样本相对于感兴趣的光谱区返回的光频率。

公开(公告)号：US07911605B2

公开(公告)日：2011-03-22

申请号：US12094471

申请日：2006-11-27

Applicant: Michael L. Myrick ,  Robert P. Freese ,  Jonathan H. James ,  Ryan J. Priore ,  John C. Blackburn

Inventor： Michael L. Myrick ,  Robert P. Freese ,  Jonathan H. James ,  Ryan J. Priore ,  John C. Blackburn

IPC: G01J3/40 ,  G02B5/22

CPC classification number: G01J3/28 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0291 ,  G01J3/08

Abstract: A method of developing a multivariate optical element for an optical analysis system includes forming an optically absorptive spectral element having an optically absorptive material, the optically absorptive material being absorbing in a predetermined spectral region; and utilizing the optically absorptive spectral element in the optical analysis system.

Abstract translation: 开发用于光学分析系统的多元光学元件的方法包括形成具有光学吸收材料的光吸收光谱元件，光学吸收材料在预定光谱区域中吸收; 并利用光学分析系统中的光吸收光谱元件。

公开(公告)号：US20100277741A1

公开(公告)日：2010-11-04

申请号：US12834939

申请日：2010-07-13

Applicant: Phillip Walsh ,  Dale A. Harrison

Inventor： Phillip Walsh ,  Dale A. Harrison

IPC: G01N21/55

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/274 ,  G01N21/4788

Abstract: A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r-θ stage to further reduce the footprint.

Abstract translation: 公开了一种用于使用下面的深紫外（DUV）波长反射测量法来测量半导体工件上的衍射和/或散射结构的性质的方法和装置。 该系统可以使用任何入射配置的偏振光，但是本文公开的一种技术有利地使用正常入射配置中的非偏振光。 因此，该系统使用下面的深紫外（DUV）辐射提供增强的光学测量能力，同时保持容易集成到其它工艺工具中的小型光学模块。 进一步细化利用r-＆thetas; 阶段进一步减少占地面积。

公开(公告)号：US20100171953A1

公开(公告)日：2010-07-08

申请号：US12665665

申请日：2008-05-09

Applicant: Helmut Becker-Ross ,  Michael Okruss ,  Stefan Florek

Inventor： Helmut Becker-Ross ,  Michael Okruss ,  Stefan Florek

IPC: G01J3/28

CPC classification number: G01J3/22 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/08 ,  G01J3/1809 ,  G01J3/2823 ,  G01J3/32

Abstract: The invention relates to a spectrometer arrangement (10) having a spectrometer for producing a spectrum of radiation from a radiation source on a detector (34), comprising an optical imaging Littrow arrangement (18, 20) for imaging the radiation entering the spectrometer arrangement (16) in an image plane, a first dispersion arrangement (28, 30) for the spectral decomposition of a first wavelength range of the radiation entering the spectrometer arrangement, a second dispersion arrangement (58, 60) for the spectral decomposition of a second wavelength range of the radiation entering the spectrometer arrangement, and a common detector (34) arranged in the image plane of the imagine optics, characterized in that the imaging optical arrangement (18, 20) comprises an element (20) that can be moved between two positions (20, 50), wherein the radiation entering the spectrometer arrangement in the first position is guided via the first dispersion arrangement and in the second position via the second dispersion arrangement.

Abstract translation: 本发明涉及一种具有用于在检测器（34）上产生来自辐射源的辐射光谱的光谱仪的光谱仪装置（10），该光谱仪包括用于对进入光谱仪装置的辐射进行成像的光学成像Littrow布置（18,20） 16），用于对进入光谱仪装置的辐射的第一波长范围进行光谱分解的第一色散装置（28,30），用于第二波长的光谱分解的第二色散装置（58,60） 进入光谱仪布置的辐射的范围以及布置在想象光学器件的图像平面中的公共检测器（34），其特征在于，成像光学装置（18,20）包括可在两者之间移动的元件（20） 位置（20,50），其中在第一位置进入分光计装置的辐射经由第一分散装置被引导，并且经由 第二分散布置。

公开(公告)号：US20100032582A1

公开(公告)日：2010-02-11

申请号：US12187815

申请日：2008-08-07

Applicant: Hua Xia ,  Li Zhu ,  Eugene Barash ,  Erin Jean Finehout ,  Matthew Damian Pietrzykowski

Inventor： Hua Xia ,  Li Zhu ,  Eugene Barash ,  Erin Jean Finehout ,  Matthew Damian Pietrzykowski

IPC: G01N21/64

CPC classification number: G01N21/645 ,  B01L3/5027 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/08 ,  G01J3/4406 ,  G01N21/6408 ,  G01N2021/6419 ,  G01N2021/6484 ,  G01N2201/0826 ,  G01N2201/0833

Abstract: A fluorescence detection system comprises a light source configured to produce an excitation light, an optical lens and a fiber bundle. The optical lens is configured to focus the excitation light to a sample to emit fluorescence and to collect the fluorescence. The fiber bundle probe comprises a transmitting fiber configured to transmit the excitation light to the optical lens, and a first receiving fiber configured to deliver the collected fluorescence. The fluorescence detection system further comprises a first detector configured to detect the fluorescence delivered by the receiving fiber to generate a response signal, and a processing unit configured to determine information about the samples by analyzing the response signal. Additionally, a fluorescence detection method is also presented.

Abstract translation: 荧光检测系统包括被配置为产生激发光，光学透镜和光纤束的光源。 光学透镜被配置为将激发光聚焦到样品以发射荧光并收集荧光。 纤维束探针包括被配置为将激发光透射到光学透镜的发射光纤和被配置为传送所收集的荧光的第一接收光纤。 荧光检测系统还包括第一检测器，其被配置为检测由接收光纤传送的荧光以产生响应信号;以及处理单元，被配置为通过分析响应信号来确定关于样本的信息。 另外，还提出了荧光检测方法。

公开(公告)号：US20100014076A1

公开(公告)日：2010-01-21

申请号：US11921737

申请日：2006-06-08

Applicant: Morten Henneberg ,  Stefan Ovesen Banke

Inventor： Morten Henneberg ,  Stefan Ovesen Banke

IPC: G01J3/44

CPC classification number: G01J3/08 ,  G01J3/0205 ,  G01J3/0294 ,  G01J3/0297 ,  G01J3/44 ,  G01J2003/4424

Abstract: This invention relates to a spectroscopic apparatus for measuring at least two spectrally shifted spectral distributions of a light beam, said apparatus comprises a dispersive element adapted to generate a spatial dispersion of the spectral components in a light beam when said dispersive element is being illuminated by said light beam; and a detector adapted to measure the intensity of at least a part of said dispersed spectral components where said apparatus further comprises an optical shifting means adapted to illuminate said dispersive element in at least two different ways, such that said light beam hits said dispersive element differently, and whereby said dispersive element generates at least two spatially shifted spatial dispersions of the spectral components in said light beam. The invention further relates to a probing system comprising said spectroscopic apparatus for measuring at least two spectrally shifted spectral distributions of a light beam, and a method for measuring at least two spectrally shifted spectral distributions of a light beam.

Abstract translation: 本发明涉及一种用于测量光束的至少两个光谱偏移光谱分布的分光装置，所述装置包括色散元件，其适用于当所述色散元件被所述色散元件照亮时在光束中产生光谱分量的空间色散 光束; 以及检测器，其适于测量所述分散光谱分量的至少一部分的强度，其中所述装置还包括适于以至少两种不同方式照亮所述色散元件的光学移动装置，使得所述光束不同地撞击所述色散元件 并且由此所述色散元件在所述光束中产生光谱分量的至少两个空间位移空间色散。 本发明还涉及一种包括用于测量光束的至少两个光谱偏移的光谱分布的所述分光装置的探测系统，以及用于测量光束的至少两个光谱移动光谱分布的方法。

公开(公告)号：US20090316150A1

公开(公告)日：2009-12-24

申请号：US12094205

申请日：2006-03-10

Applicant: Michael L. Myrick ,  Robert P. Freese ,  David L. Perkins

Inventor： Michael L. Myrick ,  Robert P. Freese ,  David L. Perkins

IPC: G01J3/28 ,  G01N21/27

CPC classification number: G01J3/42 ,  G01J3/02 ,  G01J3/0232 ,  G01J3/08 ,  G01J2003/1217 ,  G01N21/274 ,  G01N21/31

Abstract: Disclosed is a system and methodologies for providing self-calibration in an optical analysis system. Illumination light is directed toward a material to be sampled while provisions are made to modify the characteristics of at least a portion of the illumination light falling on a reference detector. The modified characteristics may include light presence and/or spectral characteristics. Light presence may be modified by rotating or moving mirror assemblies to cause light to fall on either a sample detector or a reference detector while spectral characteristics may be modified by placing materials having known spectral characteristics in the path of the illumination light.

Abstract translation: 公开了一种用于在光学分析系统中提供自校准的系统和方法。 照明光指向要采样的材料，同时进行调整以改变落在基准检测器上的照明光的至少一部分的特性。 修改的特征可以包括光存在和/或光谱特性。 可以通过旋转或移动镜组件来改变光存在，以使光落在样品检测器或参考检测器上，同时可以通过将具有已知光谱特性的材料放置在照明光的路径中来修改光谱特性。

公开(公告)号：US07507966B2

公开(公告)日：2009-03-24

申请号：US10568528

申请日：2004-08-19

Applicant: Seizi Nishizawa ,  Toshiyuki Iwamoto

Inventor： Seizi Nishizawa ,  Toshiyuki Iwamoto

IPC: G01J5/02

CPC classification number: G01J3/08 ,  G01N21/3586 ,  G01N2201/0696 ,  G01N2201/0698

Abstract: A time-domain pulsed spectroscopy apparatus which has a pulsed laser light source; a splitting unit to split pulsed laser light; a pulsed-light emitting unit; a detector; a sample holder; and a sample-unit entrance and exit optical systems; wherein the time-domain pulsed spectroscopy apparatus further comprises: at least one optical-path-length varying unit for setting a photometric range; at least one optical delay unit for the wave form signal measurement; and, at least one gate member to pass or block the pulsed light to a reflector.

Abstract translation: 一种具有脉冲激光光源的时域脉冲光谱仪; 用于分离脉冲激光的分离单元; 脉冲发光单元; 检测器 样品架 和采样单元入口和出口光学系统; 其中所述时域脉冲光谱装置还包括：用于设定光度范围的至少一个光路长度变化单元; 用于波形信号测量的至少一个光学延迟单元; 以及至少一个栅极件，以将脉冲光传递或阻挡到反射器。

公开(公告)号：US07468504B2

公开(公告)日：2008-12-23

申请号：US11370846

申请日：2006-03-09

Applicant: James Halvis ,  Richard Calve McKee

Inventor： James Halvis ,  Richard Calve McKee

IPC: G01J3/50 ,  H01J5/16 ,  H01J40/14

CPC classification number: G01J3/2823 ,  G01J3/021 ,  G01J3/08 ,  G01J3/36 ,  G01J2003/2826

Abstract: The present invention provides a spectral filter for an optical sensor. The spectral filter includes a substrate having a focus region and a defocus region, a panchromatic filter region disposed on the focus region of the substrate and a multi-spectral filter region disposed on the defocus region of the substrate. The panchromatic filter region includes a plurality of panchromatic pixels, while the multi-spectral filter region includes a plurality of multi-spectral pixels. Each of the multi-spectral pixels includes a plurality of color pixels.

Abstract translation: 本发明提供一种用于光学传感器的光谱滤波器。 光谱滤光器包括具有聚焦区域和散焦区域的基板，设置在基板的焦点区域上的全色滤光器区域和设置在基板的散焦区域上的多光谱滤光器区域。 全色滤波器区域包括多个全色像素，而多光谱滤波器区域包括多个多光谱像素。 每个多光谱像素包括多个彩色像素。

公开(公告)号：US20080042071A1

公开(公告)日：2008-02-21

申请号：US11800026

申请日：2007-05-03

Applicant: Dale Harrison

Inventor： Dale Harrison

IPC: G01N21/33

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。