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公开(公告)号：KR100834037B1
公开(公告)日：2008-05-30
申请号：KR1020070042396
申请日：2007-05-01
Abstract: A particle measuring apparatus is provided to reduce a production cost by being simply constructed and to improve productivity by being applied to semiconductor, TFT-LCD, and PDP processes. A particle measuring apparatus includes a duct(10), an insulation tube(30), first and second electrodes(40,50), a power supply(60), a current meter(70), and a computer(80). The duct is formed to connect a channel of gas including ions and particles having charges to a pipeline(6). The duct has an inlet(12) and an outlet(14). The first and second electrodes are alternately mounted inside of the insulation tube in a circumferential direction. The power supply is connected to the first electrode to apply voltage to form electric field between the first and second electrodes. The power supply attaches the ions and the particles having a polarity to the inside of the duct and the inside of the second electrode. The current meter is connected to the second electrode to measure the current of the second electrode. The computer calculates the concentration of the particles by processing the current from the current meter using a program.
Abstract translation: 提供一种粒子测量装置，通过简单构造来降低生产成本，并通过应用于半导体，TFT-LCD和PDP工艺来提高生产率。 粒子测量装置包括管道（10），绝缘管（30），第一和第二电极（40,50），电源（60），电流计（70）和计算机（80）。 导管形成为将包括离子的气体和具有电荷的颗粒的通道连接到管道（6）。 管道具有入口（12）和出口（14）。 第一电极和第二电极沿圆周方向交替地安装在绝缘管的内部。 电源连接到第一电极以施加电压以在第一和第二电极之间形成电场。 电源将具有极性的离子和颗粒附着到管道的内部和第二电极的内部。 电流表连接到第二电极以测量第二电极的电流。 计算机通过使用程序处理来自电流表的电流来计算颗粒的浓度。
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公开(公告)号：KR1020060022302A
公开(公告)日：2006-03-09
申请号：KR1020060016058
申请日：2006-02-20
Inventor： 안강호
Abstract: 본 발명은 클린룸등의 청정공간내의 저농도의 입자들의 개수와 크기별 분포등을 신속하고 용이하게 측정할 수 있는 입자측정기 및 입자측정방법을 개시한다. 본 발명에 따른 입자측정기 및 입자측정방법은 가이드덕트와 이 가이드덕트 내에 전극을 각각 구비하는 다수의 입자분리장치를 준비하고, 측정하고자 하는 입자들을 단극성으로 하전시킨다. 하전된 입자들과 청정공기를 가이드덕트의 내부로 유입시키며, 전극들에 상호 다른 전압을 인가한다. 입자분리장치들에 의해 분리된 하전입자들의 개수를 측정하고, 측정된 결과로부터 크기별 입자분포를 계산한다. 본 발명에 따른 입자측정기는 1회의 측정으로 공기 중의 입자들의 크기분포를 구할 수 있으며, 공기 중에 포함된 입자의 개수가 적더라도, 그 분포를 신속하고 용이하게 구할 수 있는 효과가 있다.
입자측정기, 입자측정방법-
公开(公告)号：KR1020050087619A
公开(公告)日：2005-08-31
申请号：KR1020040013535
申请日：2004-02-27
Applicant: 안강호
Inventor： 안강호
CPC classification number: B03C3/383 , B01D19/0052 , B03C3/12 , B03C3/49 , B03C2201/08
Abstract: The present invention discloses an apparatus and method for manufacturing ultra-fine particles using corona discharge capable of manufacturing the ultra-fine particles nanometers in size from a reaction gas using the corona discharge. In the apparatus for manufacturing ultra-fine particles of the present invention, a reaction gas feeder supplies a nozzle with reaction gas, and the reaction gas is injected. When a power supply applies a high voltage to the nozzle, the corona discharge occurs at the nozzle. Thus, the injected reaction gas is dissolved, and a large number of ultra-fine particles are produced. Then, a collection plate collects the ultra-fine particles. In addition, a duct encloses the nozzle, so that a passage is formed between the nozzle and duct. Sheath gas supplied to the passage of the duct forms a gas curtain between the nozzle and the collection plate, so that the gas curtain leads the flow of the ultra-fine particles. If other reaction gas is supplied to the passage of the duct and heat energy is supplied thereto, the other reaction gas reacts thermochemically, so that a large number of other ultra-fine particles are produced. The ultra-fine particles produced by the corona discharge are coated with the other ultra-fine particles. If the corona discharge is generated while the ultra-fine particles and the other reaction gas are injected by another nozzle positioned downstream of the nozzle, the ultrafine particles are coated with the other ultra-fine particles produced from the other reaction gas.
Abstract translation: 本发明公开了一种使用电晕放电制造超细颗粒的装置和方法，其能够使用电晕放电从使用反应气体制造尺寸的超细颗粒纳米。 在本发明的超细粒子的制造装置中，反应气体供给器向喷嘴供给反应气体，注入反应气体。 当电源对喷嘴施加高电压时，在喷嘴处发生电晕放电。 因此，注入的反应气体溶解，产生大量的超细粒子。 然后，收集板收集超细颗粒。 此外，管道封闭喷嘴，使得在喷嘴和管道之间形成通道。 供应到管道通道的护套气体在喷嘴和收集板之间形成气幕，使得气幕导致超细颗粒的流动。 如果向管道的通道供应其它反应气体并且向其供应热能，则其它反应气体热化学反应，从而产生大量其它超细颗粒。 由电晕放电产生的超细颗粒被其它超细颗粒涂覆。 如果通过位于喷嘴下游的另一个喷嘴喷射超细颗粒和其它反应气体，则产生电晕放电，则超细颗粒被其它反应气体产生的其它超细颗粒涂覆。
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公开(公告)号：KR1020050081308A
公开(公告)日：2005-08-19
申请号：KR1020040009492
申请日：2004-02-13
Inventor： 안강호
IPC: G01N15/02
CPC classification number: G01N15/0266 , G01N15/1031 , G01N27/66 , G01N2015/0019 , G01N2015/1081 , G01N2021/8592
Abstract: The present invention discloses apparatus and method for rapidly and easily measuring the numbers and size distribution of low concentration particles which exist in a clean space such as a clean room. The apparatus and method according to the present invention measures the numbers of particles by charging particles to a monopolarity, collecting the particles by applying a voltage to an electrode and attaching the charged particles of a certain size or less thereto, separating the charged particles of the certain size or more according to size by the particle separating ducts. The apparatus for measuring the number of particles according to the present invention makes it possible to obtain a size distribution of particles in the air by a single measurement and to rapidly and easily measure it even though the number of the particles in the air is small.
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Patent Agency Ranking
公开(公告)号：KR100442015B1
公开(公告)日：2004-07-30
申请号：KR1020010020890
申请日：2001-04-18
IPC: B01J2/00
CPC classification number: B01J2/04 , B01J2/02 , B05B1/14 , B05B5/0255 , B05B5/0533 , B05B7/168 , B05B7/201
Abstract: An apparatus and method for manufacturing ultra-fine particles using an electrospray device is disclosed. One or more capillary provided at its tip with a nozzle is positioned within a guide duct and precursors such as metal organic materials and metal halogen compounds, or nonvolatile substances or volatile substances are supplied to the capillary. Voltages are applied to the capillary and the guide duct, respectively, so that a voltage difference is generated therebetween and the highly charged liquid droplets from the capillary are sprayed. The sprayed liquid droplets are carried along the guide duct together with carrier gas injected into the guide duct. When heat energy is applied to the liquid droplets, chemical reactions of the liquid droplets occur. A collecting plate positioned in front of the guide duct collects ultra-fine particles formed by the chemical reactions.
Abstract translation: 公开了一种使用电喷射装置制造超细颗粒的设备和方法。 一个或多个在其尖端设有喷嘴的毛细管定位在导管内，并且前体例如金属有机材料和金属卤素化合物，或者非挥发性物质或挥发性物质被供应到毛细管。 分别向毛细管和导管施加电压，从而在它们之间产生电压差并且从毛细管喷射高电荷的液滴。 喷射的液滴与注入导管的载气一起沿着导管输送。 当热能被施加到液滴时，液滴发生化学反应。 位于导管前方的收集板收集由化学反应形成的超细颗粒。
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公开(公告)号：KR100418683B1
公开(公告)日：2004-02-14
申请号：KR1020030042583
申请日：2003-06-27
IPC: H01L21/02
Abstract: PURPOSE: A differential pressure flow controller for gases used in a semiconductor process is provided to control accurately the flow of the gas by using a differential generation element for generating the differential pressure of the semiconductor process gas. CONSTITUTION: A body(10) includes a flow path of gases in a semiconductor process. A control valve(20) is used for controlling the flow of the gases by opening or shutting the flow path of the body. A differential pressure generation element(30) is used for generating the differential pressure from the flow path of the body. A bypass(40) is used for connecting an upper part to a lower part of the flow path. A pressure sensor(50) is installed at the bypass in order to detect the differential pressure of the flow path. A CPU(Central Processing Unit)(60) produces the flow of the gases and controls the control valve according to a detection signal of the pressure sensor.
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公开(公告)号：KR100394371B1
公开(公告)日：2003-08-09
申请号：KR1020000055808
申请日：2000-09-22
IPC: H05F3/04
CPC classification number: B05B5/025
Abstract: Provided is an apparatus for controlling static electricity. The apparatus uses ultra-fine particles with positive polarity and utra-fine particles with negative polarity. The apparatus comprises one or more capillary for spraying liquid supplied from a liquid supply. A high voltage generator with positive polarity and a high voltage generator with negative polarity are connected to the capillary. Also, a ground electrode is spaced apart from the capillary to form an electric field in cooperation with the high voltage generators. The static electricity is easily controlled by the ultra-fine particles with positive polarity and the ultr-fine particles with negative polarity.
Abstract translation: 提供了一种用于控制静电的设备。 该设备使用具有正极性的超细颗粒和具有负极性的超细颗粒。 该设备包括一个或多个毛细管，用于喷射从液体供应源供应的液体。 具有正极性的高压发生器和具有负极性的高压发生器连接到毛细管。 而且，接地电极与毛细管间隔开以与高压发生器配合形成电场。 静电很容易被正极性的超细颗粒和负极性的超细颗粒所控制。
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公开(公告)号：KR1020030028151A
公开(公告)日：2003-04-08
申请号：KR1020010060154
申请日：2001-09-27
Inventor： 안강호
IPC: B05B5/00
CPC classification number: B05B5/1608 , B01D47/06 , B01D53/78
Abstract: PURPOSE: A static pressure maintaining device is provided to spray a great deal of ultra-fine particles uniformly. CONSTITUTION: The static pressure maintaining device comprises a frame(10); a plurality of pipes(20) which are mounted on the frame apart with each other and, provided with a liquid supplying element on the highest upstream pipe; a plurality of tubes(30) which are prepared on each of the pipe; and a plurality of connecting elements consisting of channels for connecting the adjacent upstream pipe and down stream pipe so as to archive communication therebetween and, a plurality of vents are formed on predetermined locations of the channels. A portion of the channel is formed on the higher location than the tubes formed on the upstream pipe so that fluids in the pipes overflow the pipes.
Abstract translation: 目的：提供静压保持装置，以均匀喷射大量超细颗粒。 构成：静压保持装置包括框架（10）; 安装在框架上彼此分离的多个管道（20），并且在最高上游管道上设置有液体供应元件; 多个管（30），其准备在每个管上; 以及由用于连接相邻的上游管道和下游管道的通道组成的多个连接元件，以便归档它们之间的通信，并且多个通风口形成在通道的预定位置上。 通道的一部分形成在比形成在上游管上的管更高的位置，使得管中的流体溢出管。
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公开(公告)号：KR1020010068553A
公开(公告)日：2001-07-23
申请号：KR1020000000514
申请日：2000-01-06
Inventor： 안강호
IPC: G01N1/00
Abstract: PURPOSE: A device for particle sampling and dilution is provided to simplify the construction of a system for measuring a number of particles of high concentration generated at a high temperature and precisely measure the particle number in real time. CONSTITUTION: A device for particle sampling and dilution includes a main body(10) having an opened top part, a lower part formed with a suction hole, and an inner bottom part formed with an upward protrusion part for extending the suction hole to an upper end, at least more than one conduit(20) positioned on the main body, a coupling element(30) to be coupled at an upper part of the main body, a mixing tube(40) incorporated in the main body and communicated with the suction hole, the mixing tube having a lower end part contacting an outer surface of the protrusion part for forming a flow channel and formed with one or more grooves slanted inwardly, an elastic element(50) for continuously contacting a lower end of the mixing tube with the protrusion part, and a control element(60) for pressing the upper end part of the elastic element and coupled with the coupling element.
Abstract translation: 目的：提供用于颗粒取样和稀释的装置，以简化用于测量在高温下产生的高浓度颗粒数量的系统的结构，并实时精确测量颗粒数。 构成：用于颗粒取样和稀释的装置包括具有敞开的顶部的主体（10），形成有吸入孔的下部和形成有用于将吸入孔延伸到上部的向上突出部的内部底部 至少一个位于主体上的一个导管（20），一个要连接在主体上部的耦合元件（30），一个混合管（40），该混合管（40）结合在主体中并与 抽吸孔，所述混合管具有与突出部的外表面接触的下端部，用于形成流路并形成有向内倾斜的一个或多个槽;弹性元件，用于连续地接触混合管的下端 以及用于按压弹性元件的上端部并与联接元件联接的控制元件（60）。
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