公开(公告)号：WO2018129435A1

公开(公告)日：2018-07-12

申请号：PCT/US2018/012755

申请日：2018-01-08

Applicant: MKS TECHNOLOGY, INC.

Inventor： CARRON, Keith, T. ,  ZEMTSOP, Celestin, P. ,  BULLER, Shane, A. ,  RUDDER, Scott, L. ,  GUENTHER, Harald, R.

IPC: G01J3/44 ,  H01S3/08 ,  H01S3/042

Abstract: A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.

公开(公告)号：WO2018148747A1

公开(公告)日：2018-08-16

申请号：PCT/US2018/018049

申请日：2018-02-13

Applicant: MKS TECHNOLOGY, INC. (D/B/A SNOWY RANGE INSTRUMENTS)

Inventor： BARKHURST, Danial, Clark ,  WOODWARD, Sean, Patrick ,  CARRON, Keith, Thompson ,  BULLER, Shane, Alan

IPC: G02B7/182 ,  G01J3/02 ,  G01N21/17 ,  G01J3/06

Abstract: Optical systems have uses, such as in spectrometers, for directing a beam. A spectrometer, for example, utilizes an optical system for directing an incident beam toward a sample and receiving a spectroscopy signal from the sample. In various implementations, for example, an optical system may be further configured to move a beam with respect to a target, such as a sample, and still provide a home position where the beam is directed in a stationary configuration. A self-homing (e.g., self-centering) optical system may provide a "home" position in which the beam is directed in a first stationary mode while still allowing a focused beam to be moved with respect to a target in a second dynamic mode.

公开(公告)号：WO2023039291A1

公开(公告)日：2023-03-16

申请号：PCT/US2022/043368

申请日：2022-09-13

Applicant: MKS TECHNOLOGY (D/B/A SNOWY RANGE INSTRUMENTS)

Inventor： ZEMTSOP, Celestin ,  VOHRA, Quaid ,  YU, Wei ,  CARRON, Keith

IPC: G01J3/44 ,  G01N21/65 ,  G01N21/63

Abstract: Optical data captured in an optical system may be distorted or otherwise affected by various factors, such as but not limited to physical interference, fluorescence, noise or other factors. The effects on the optical data may interfere with any number of uses of the optical data, such as identification, presentation, or the like. Although various embodiments are provided, such as but not limited to spectroscopy, chromatography, and image processing, these are merely example embodiments, and the processing and/or removal of one or more components within the optical data to account for the distortions or other effects. Other applications may include any x,y or x,y,z dataset of optical data.

公开(公告)号：WO2016054609A1

公开(公告)日：2016-04-07

申请号：PCT/US2015/053887

申请日：2015-10-02

Applicant: MKS TECHNOLOGY (D/B/A SNOWY RANGE INSTRUMENTS)

Inventor： CARRON, Keith T. ,  BULLER, Shane A. ,  WATSON, Mark A. ,  WOODWARD, Sean Patrick

IPC: G01N21/01 ,  G01N21/47

CPC classification number: G01J3/4412 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/027 ,  G01J3/0297 ,  G01J3/10 ,  G01J3/44 ,  G01N21/65 ,  G01N2021/4711 ,  G01N2201/0612 ,  G01N2201/068 ,  G01N2201/12

Abstract: Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.

Abstract translation: 提供了用于确定材料是否存在或与其他材料接近和/或组合的光谱仪和方法。 在一个具体示例中，提供了包括光源，检测器和光学系统的光谱仪。 在该实现中，光源被配置为提供激励入射光束。 检测器被配置为检测光谱信号。 光学系统被配置为将激发入射光束从零角参考以非零角度引向样本。 光学系统还被配置为从样品接收光谱信号，并向检测器提供光谱信号。 检测器被配置为去除光谱信号的光谱干涉分量。

公开(公告)号：WO2014191834A3

公开(公告)日：2015-12-17

申请号：PCT/IB2014001434

申请日：2014-07-31

Applicant: MKS TECHNOLOGY INC

Inventor： WATSON MARK ,  BULLER SHANE ,  CARRON KEITH

IPC: G01J3/00

CPC classification number: G01N21/65 ,  G01J3/021 ,  G01J3/0289 ,  G01J2003/4424 ,  G01N21/658 ,  G01N2021/6417 ,  G01N2201/0221 ,  G02B21/002 ,  G02B26/10

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

Abstract translation: 提供光谱仪。 在一个实施方案中，例如，光谱仪包括激发源，聚焦透镜，可移动反射镜和致动器组件。 聚焦透镜适于聚焦来自激发源的入射光束。 致动器组件适于控制可移动镜以将聚焦的入射光束移动穿过样品的表面。

公开(公告)号：EP3948186A1

公开(公告)日：2022-02-09

申请号：EP20777675.8

申请日：2020-03-25

Applicant: MKS Technology (d/b/a Snowy Range Instruments)

Inventor： VOHRA, Quaid ,  ZEMSTOP, Celestin ,  WATSON, Mark

IPC: G01J3/44 ,  G01N21/65 ,  G06F17/16 ,  G06F17/11

公开(公告)号：EP3004819A2

公开(公告)日：2016-04-13

申请号：EP14804678.2

申请日：2014-07-31

Applicant: MKS Technology Inc.

Inventor： WATSON, Mark ,  BULLER, Shane ,  CARRON, Keith

IPC: G01J3/00

CPC classification number: G01N21/65 ,  G01J3/021 ,  G01J3/0289 ,  G01J2003/4424 ,  G01N21/658 ,  G01N2021/6417 ,  G01N2201/0221 ,  G02B21/002 ,  G02B26/101

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

Abstract translation: 提供光谱仪。 在一个实施方案中，例如，光谱仪包括激发源，聚焦透镜，可移动反射镜和致动器组件。 聚焦透镜适于聚焦来自激发源的入射光束。 致动器组件适于控制可移动镜以将聚焦的入射光束移动穿过样品的表面。