公开(公告)号：KR1020020091930A

公开(公告)日：2002-12-11

申请号：KR1020010030747

申请日：2001-06-01

Applicant: 삼성전기주식회사

Inventor： 강응천 ,  정호철

IPC: G11B5/39

CPC classification number: H01L43/12 ,  Y10T29/49002 ,  Y10T29/49043 ,  Y10T29/49044

Abstract: PURPOSE: A method for fabricating a planar magnetic element is provided to easily manufacture a planar magnetic resistance sensor chip having terminals formed on both sides of the ship using a general relatively cheap glass wafer. CONSTITUTION: A characteristic layer pattern composed of NiCo and NiFe is deposited on the top surface of a glass wafer, exposed and etched, to form sensing parts(120) according to the pattern. A protection layer is formed of SiO2 on each sensing part. Through-holes are formed in the glass wafer through sand blasting. A metal mask adheres to the glass wafer having through-hole, and NiFe(150) is deposited only inside the through-holes and on a terminal connection part. The through-hole portions are cut so as to fabricate a magnetic resistance sensor.

Abstract translation: 目的：提供一种用于制造平面磁性元件的方法，以容易地制造具有使用一般相对便宜的玻璃晶片形成在船舶两侧的端子的平面磁阻传感器芯片。 构成：将由NiCo和NiFe组成的特征层图案沉积在玻璃晶片的顶表面上，暴露并蚀刻，以形成根据图案的感测部件（120）。 在每个感测部分上由SiO 2形成保护层。 通过喷砂在玻璃晶片中形成通孔。 金属掩模粘附到具有通孔的玻璃晶片上，并且NiFe（150）仅沉积在通孔内部和端子连接部分上。 通孔部分被切割以制造磁阻传感器。