태양전지 및 그 제조방법
    31.
    发明公开
    태양전지 및 그 제조방법 有权
    太阳能电池及其制造方法

    公开(公告)号:KR1020130102902A

    公开(公告)日:2013-09-23

    申请号:KR1020120024094

    申请日:2012-03-08

    Abstract: PURPOSE: A solar cell and a method for fabricating the same are provided to obtain a large-sized substrate by maintaining a plasmon formation distance. CONSTITUTION: A first conductive electrode includes a concave-convex part. Nanoparticles are in contact with the first conductive electrode. A photoactive layer (140) covers the nanoparticles. An anti-reflective coating (150) is formed on the photoactive layer. A second conductive electrode (160) is formed on the anti-reflective coating.

    Abstract translation: 目的:提供一种太阳能电池及其制造方法,以通过维持等离子体激元的形成距离来获得大尺寸的基板。 构成:第一导电电极包括凹凸部。 纳米颗粒与第一导电电极接触。 光敏层(140)覆盖纳米颗粒。 在光敏层上形成抗反射涂层(150)。 在抗反射涂层上形成第二导电电极(160)。

    노광 장치, 노광 방법 및 그에 따른 패턴 형성방법
    32.
    发明公开
    노광 장치, 노광 방법 및 그에 따른 패턴 형성방법 失效
    曝光装置,曝光方法及其制图方法

    公开(公告)号:KR1020090092412A

    公开(公告)日:2009-09-01

    申请号:KR1020080017645

    申请日:2008-02-27

    CPC classification number: G03F7/70091 H01L21/0274

    Abstract: An apparatus of exposure, a method of exposure and a fabrication method of a pattern thereof are provided to form a polymer mold of various uniform patterns by using a rotating stage which is inclined by a certain degree. In an apparatus of exposure, a method of exposure and a fabrication method of a pattern thereof, a transport unit(100) transfers a substrate arranged with a mask to a stage(310). An inclination adjuster(200) controls the angle of inclination of the stage in which mask and substrate are transferred. A rotating unit(300) rotates the stage where the angle of inclination is controlled. An illuminating unit(400) radiates a light to a mask and a substrate which is rotated.

    Abstract translation: 提供曝光装置,曝光方法及其图案的制造方法,通过使用倾斜一定程度的旋转台来形成各种均匀图案的聚合物模具。 在曝光装置,曝光方法及其图案的制造方法中,传送单元(100)将布置有掩模的基板传送到台(310)。 倾斜调节器(200)控制掩模和基底传送的台阶的倾斜角度。 旋转单元(300)旋转倾斜角度被控制的台。 照明单元(400)将光照射到旋转的掩模和基板。

    미세 유체 장치 제조용 사출성형장치

    公开(公告)号:KR1020210001479A

    公开(公告)日:2021-01-06

    申请号:KR1020190077640

    申请日:2019-06-28

    Abstract: 본발명의실시예에따른미세유체장치제조용사출성형장치는일면에유체가흐르는유로가형성되고, 타면에상기유로와연통되어상기유로를통해흐르는유체를안내하여액적형태로낙하시키도록구성되는노즐부가형성되는미세액적생성장치등과같이표면에미세패턴이형성되는미세유체장치를제조하기위해사용되는미세유체장치제조용사출성형장치로서, 내측에적어도하나의채널을구비하는스탬프가설치되어, 사출시 사출물의일면에상기유로를형성하는제1 금형; 상기제1 금형에대향배치되고, 내측에사출시 상기사출물의타면에상기노즐부를형성하는사출홈이형성되는제2 금형; 및상기제1 금형의평면상에서상기스탬프의위치를 X축방향및 Y축방향으로조정가능한정렬부;를포함한다. 본발명의실시예에따르면, 스탬프가금형에설치된경우, 금형에충격을가하거나, 스탬프를재설치하지않고, 스탬프의외면을가압하여스탬프를 X축방향및 Y축방향으로미세하게이동시켜스탬프의위치를조정함으로써, 스탬프를정확한설정위치에배치시킬수 있음은물론, 작업시간을단축시킬수 있고, 금형의변형및 파손을예방할수 있다.

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