GROOVING METHOD AND GROOVING DEVICE

    公开(公告)号:JPH10249472A

    公开(公告)日:1998-09-22

    申请号:JP7050597

    申请日:1997-03-07

    Applicant: CANON KK

    Inventor: ASAMI MASAYOSHI

    Abstract: PROBLEM TO BE SOLVED: To prevent a grooving ball from deviating with respect to a tool shaft or falling out. SOLUTION: The tool shaft 3 is provided with a shaft part 3a, and respective balls 31 are held between ball holding members 41, 42 and held with the shaft part 3a of the tool shaft 3. The ball holding parts 41a, 42a of the ball holding members 41, 42 are provided with the holding groove extending in the radial direction and the curved surface curving in the axial direction, and the positional deviation and falling away of the ball are prevented by restricting respective balls 31 with both. Also, the ball 31 is freely changed with a nut 43 loosened.

    STATIC PRESSURE FLUID BEARING
    32.
    发明专利

    公开(公告)号:JPH06173952A

    公开(公告)日:1994-06-21

    申请号:JP32807092

    申请日:1992-12-08

    Applicant: CANON KK

    Abstract: PURPOSE:To improve the bearing rigidity and adapt to high-speed rotation by setting both ends of a radial bearing to the opened state to the outside air, and setting only one side of a thrust bearing to the opened state to the outside air. CONSTITUTION:When the pressure gas is guided to an intake hole 5, the pressure gas is squeezed by a cylindrical porous member 2 and a circular porous member 3, flows into a bearing gap Cr between a rotary shaft 1 and a bearing, and rotatably supports the rotary shaft 1 in no contact. The pressure gas of a radial bearing is discharged to the outside from a center discharge hole 6 and a radial bearing end section discharge hole 7, the pressure gas of a thrust bearing on the opposite side to a gas sump 8 is discharged to the outside as it is, the pressure gas on the gas sump 8 side is partially discharged from the radial bearing end section discharge hole 7 because the seal section 2a of the cylindrical porous member 2 has the same gap as the bearing gap Cr and serves as discharge resistance, and the gas sump 8 is kept at the pressure Pm higher than the external pressure Pa. The thrust rigidity can be improved without reducing the radial rigidity, and high bearing rigidity is obtained. This device can be miniaturized, and it can be used at a high speed.

    WORKING DEVICE
    33.
    发明专利

    公开(公告)号:JPH0557520A

    公开(公告)日:1993-03-09

    申请号:JP22295591

    申请日:1991-09-03

    Applicant: CANON KK

    Abstract: PURPOSE:To embody a groove depth error of 1/100mum at the time of straight groove working, or that of a several nm order necessary at the time of mold working, unrealized by conventional machining technique. CONSTITUTION:A coarse motion Y slider 11 is mounted on a X slier 1, and moreover a fine motion Y slider 12 is fitted to the coarse motion Y slider 11 with fixtures mounted on the X slider 1. Work 14 is fixed to the fine motion Y slider 12. The fine motion Y slider 12 is composed of a fine motion mount for moving the work 14, a fine motion actuator, and a fine motion displacement sensor, etc., detecting the displacement of the fine motion mount. A cutting tool 9 is set at a given standard surface position, a cutting depth between the cutting tool 9 and a given bottom surface is set by electrifying the fine motion actuator, and control is made so as to fix the cutting depth based on the output of the fine motion displacement sensor.

    CRYSTAL MANUFACTURING EQUIPMENT
    34.
    发明专利

    公开(公告)号:JP2002326893A

    公开(公告)日:2002-11-12

    申请号:JP2001292873

    申请日:2001-09-26

    Applicant: CANON KK

    Abstract: PROBLEM TO BE SOLVED: To provide a crystal manufacturing equipment for manufacturing a single crystal having excellent optical characteristics, by forming a flat or a little convex isothermal surface towards upwards, and also deciding a starting point of crystal growth to make one point. SOLUTION: The crystal growing equipment comprises: a crucible which is almost cylindrical, containing raw material and growing the crystal, before starting the crystal growth, the lateral sectional shape of lower part of the crucible is convex toward upward, or ring shaped flat plate; a heating part which is arranged around the cylindrical surface of the crucible and heats to melt the raw material via the crucible.

    KINETIC PRESSURE OIL BEARING WITH LUBRICATING OIL SEAL

    公开(公告)号:JP2001208068A

    公开(公告)日:2001-08-03

    申请号:JP2000013655

    申请日:2000-01-24

    Abstract: PROBLEM TO BE SOLVED: To provide a kinetic pressure oil bearing which has a space to be able to absorb a dispersion of a lube oil injected and is equipped with a seal mechanism of less sensitive to the lube oil leakage by which a splash of the lube oil to the outside of the bearing during high speed operation and the required quantities of lube oil for the bearing can be secured all the time. SOLUTION: In a radial bearing, a kinetic pressure generating herringbone type grooves are formed at least on one of an inner diameter surface of a bearing sleeve or an outer diameter surface of a bearing shaft, and the bearing sleeve and the bearing shaft face each other with fine clearance filled up with the lube oil. And, in the kinetic pressure oil bearing wherein shaft loads are supported by a pumping action generated by a relative motion between the bearing sleeve and the bearing shaft, in order for a concave to be formed on the shaft sleeve surface together with the bearing shaft for the formation of a ring type lube oil retention space on the open air side of a bearing section of the bearing sleeve and for a clearance to be maintained against the bearing shaft axially outside of the ring type lube oil retention space, and more particularly, in order for the clearance to be larger than a minimum clearance which can be maintained under the surface tension for the lube oil quantity equivalent to 10% of the interior volume of the bearing and in order for the volume of the clearance to be 10% or less of the interior volume of the bearing, a sealing section is provided for on the open-air side of the lube oil retention space.

    OIL DYNAMIC PRESSURE BEARING DEVICE

    公开(公告)号:JP2001059522A

    公开(公告)日:2001-03-06

    申请号:JP23355499

    申请日:1999-08-20

    Abstract: PROBLEM TO BE SOLVED: To improve holding capability of oil, and prevent a leaking phenomenon of oil even if bubbles are mixed in a bearing by increasing a volume of an oil reserving part disposed in the vicinity of an opening of a sleeve larger than that of filling oil. SOLUTION: After oil is filled in the inner surface of a sleeve 1, a condition in which a shaft 2 is inserted is distributed in a condition in which oil and bubbles are mixed. When high speed rotation of the shaft 2 is started in this condition, oil and bubbles are heated, the bubbles is more expanded, its volume is more enlarged, oil is pushed out to an outside, and is held in an oil sump part C. Since the volume of the oil sump part C is set larger than that of an oil filling quantity, there is a sufficient oil holding capacity, and oil is held in a condition of an upper end part and less in the oil sump part C without attaining an opening part of the sleeve 1. Accordingly it is possible to prevent leakage of oil even if high speed rotation of the shaft 2 is continued for a long time, it is possible to prevent deterioration of an accuracy as a bearing and durability, and it is also possible to improve reliability.

    OPTICAL DEFLECTION SCANNER
    40.
    发明专利

    公开(公告)号:JP2000330066A

    公开(公告)日:2000-11-30

    申请号:JP14310599

    申请日:1999-05-24

    Abstract: PROBLEM TO BE SOLVED: To surely hold the oil in a dynamic pressure bearing and to obtain a rotation effect stable over a long time by providing the maximum opening clearance in a wedge shape with a wall of a narrow angle with respect to a rotating direction, thereby suppressing the leaking out and splashing of lubricant fluid, such as oil, at the time of high-speed rotation of a revolving member. SOLUTION: The opening clearance 41 disposed on a sleeve rotation part side has the wedge shape having gradually widening parts in the cross section perpendicular to an axis in a rotating direction. The maximum opening clearance 44 is provided with the wall of the angle narrow in the rotating angle direction. Since the clearance is provided with the wall, a revolving shaft 3 can surely bring the excess oil 12a adhered to the sleeve aperture during its rotation into abutment on the wall of the narrow angle. The oil 12a imparted with kinetic energy by the rotation of the revolving shaft 3 is changed in a moving direction to a downward direction from the rotating direction. Consequently, since the oil can be surely dropped into an oil sump part, the excess oil 12a adhered to the sleeve aperture may be surely removed.

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