公开(公告)号：JP2013003067A

公开(公告)日：2013-01-07

申请号：JP2011136949

申请日：2011-06-21

Applicant: Panasonic Corp ,  パナソニック株式会社

Inventor： MORI TAKASHI ,  IBARA NOBUYUKI ,  YOSHIDA HITOSHI ,  KAKIMOTO KATSUMI ,  KISHIMOTO SHINICHI ,  UEDA HIDEKI ,  NOMURA MASATOSHI

IPC: G01P15/125 ,  B81B3/00 ,  G01L9/00 ,  G01P15/18 ,  H01L29/84

Abstract: PROBLEM TO BE SOLVED: To provide an MEMS device in which a sensor whose electric potential can be acquired from a side of a support substrate and other sensors can be miniaturized and integrated.SOLUTION: The MEMS device D includes an acceleration sensor (first sensor) S1 in which cross sectional portions of through electrodes 22a to 22e exposed to the side 2e of the support substrate 2a can be used as potential acquiring ports of movable electrodes 4 and 5 and fixed electrodes 20a to 21b; and a pressure sensor (second sensor) S2 having a sensor substrate 1A stacked on the acceleration sensor S1 via the support substrate 2a.

Abstract translation: 要解决的问题：为了提供一种MEMS器件，其中可以从支撑衬底和其他传感器的侧面获取电位的传感器，其可以被小型化和集成。 解决方案：MEMS器件D包括加速度传感器（第一传感器）S1，其中暴露于支撑衬底2a的侧面2e的贯通电极22a至22e的横截面部分可用作可移动电极4的电势获取端口 5和固定电极20a至21b; 和具有经由支撑基板2a堆叠在加速度传感器S1上的传感器基板1A的压力传感器（第二传感器）S2。 版权所有（C）2013，JPO＆INPIT

公开(公告)号：JP2014153133A

公开(公告)日：2014-08-25

申请号：JP2013021909

申请日：2013-02-07

Applicant: Panasonic Corp ,  パナソニック株式会社

Inventor： TAURA TAKUMI ,  EDA KAZUO ,  KISHIMOTO SHINICHI ,  UEDA HIDEKI ,  MORI TAKASHI

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  H01L29/84

Abstract: PROBLEM TO BE SOLVED: To provide a MEMS device capable of preventing a movable part from being bonded to an electrode substrate.SOLUTION: A MEMS device includes: a movable body substrate 1 on which a movable part 11 is formed; and electrode substrates 2a and 2b bonded to the movable body substrate 1, on each of which an electrode acting with the movable part 11 is formed. On substrate surfaces on the sides of at least either one of the movable body substrate 1 or electrode substrates 2a and 2b, semiconductors (semiconductor films 32 and 33) are used as bonding materials.

Abstract translation: 要解决的问题：提供一种能够防止可动部件与电极基板结合的MEMS器件。解决方案：MEMS器件包括：可移动体基板1，可移动部件11形成在该可移动体基板1上; 以及与可移动体基板1接合的电极基板2a，2b，其中形成有与可动部11作用的电极。 在可移动体基板1或电极基板2a，2b的至少任一方的侧面的基板面上，使用半导体（半导体膜32,33）作为接合材料。

公开(公告)号：JP2014013219A

公开(公告)日：2014-01-23

申请号：JP2012151477

申请日：2012-07-05

Applicant: Panasonic Corp ,  パナソニック株式会社

Inventor： MORI TAKASHI ,  IBARA NOBUYUKI ,  YOSHIDA HITOSHI ,  EDA KAZUO ,  TAURA TAKUMI ,  KISHIMOTO SHINICHI ,  UEDA HIDEKI

IPC: G01D18/00

Abstract: PROBLEM TO BE SOLVED: To provide a semiconductor sensor inspection device that can reduce the size and cost of a semiconductor sensor including an inspection element and an output circuit.SOLUTION: A sensor system includes: an ASIC 2 connected to an MEMS sensor 1, detecting a signal according to a physical quantity, outputting a physical quantity signal; and a capacitor Cref provided in the MEMS sensor 1, and having a physical quantity detected for the ASIC 2 in order to inspect a physical quantity signal output from the ASIC 2.

Abstract translation: 要解决的问题：提供一种能够降低包括检查元件和输出电路的半导体传感器的尺寸和成本的半导体传感器检查装置。解决方案：传感器系统包括：连接到MEMS传感器1的ASIC2，检测 根据物理量的信号，输出物理量信号; 以及设置在MEMS传感器1中的电容器Cref，并且具有为ASIC 2检测的物理量，以便检查从ASIC2输出的物理量信号。

公开(公告)号：JP2013231616A

公开(公告)日：2013-11-14

申请号：JP2012102543

申请日：2012-04-27

Applicant: Panasonic Corp ,  パナソニック株式会社

Inventor： KISHIMOTO SHINICHI ,  EDA KAZUO ,  KAKIMOTO KATSUMI ,  TAURA TAKUMI ,  UEDA HIDEKI ,  MORI TAKASHI

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/18 ,  H01L29/84

Abstract: PROBLEM TO BE SOLVED: To provide an acceleration sensor reducing damage to a protrusion and having high reliability.SOLUTION: An acceleration sensor comprises: a plate-like movable electrode 4; a pair of beam parts 41, 42 respectively supporting sides of the movable electrode facing each other so that the movable electrode 4 is swingable; an upper fixed plate 2 arranged to be spaced from the movable electrode 4; fixed electrodes 21, 22, of the upper fixed plate 2, provided on a surface facing the movable electrode 4; and a protrusion 6, of the movable electrode 4, provided in a place being in contact with the fixed electrodes 21, 22. An arrangement part 61, of the movable electrode 4, where the protrusion 6 is arranged, is formed to have a thinner thickness than that of the movable electrode 4 and has a spring property.

Abstract translation: 要解决的问题：提供一种减少对突起的损伤并具有高可靠性的加速度传感器。解决方案：加速度传感器包括：板状可动电极4; 一对梁部分41,42，分别支撑可动电极的面对面，使可动电极4摆动; 布置成与可动电极4间隔开的上固定板2; 设置在面对可动电极4的表面上的上固定板2的固定电极21,22; 以及可动电极4的突出部6，设置在与固定电极21,22接触的位置。可动电极4的布置有突起6的配置部61形成为具有较薄的 厚度比可动电极4的厚度具有弹性。

公开(公告)号：JP2013160953A

公开(公告)日：2013-08-19

申请号：JP2012023449

申请日：2012-02-06

Applicant: Panasonic Corp ,  パナソニック株式会社

Inventor： KONO KIYOHIKO ,  NOGE HIROSHI ,  UEDA HIDEKI

IPC: G02B26/10 ,  H04N5/74

Abstract: PROBLEM TO BE SOLVED: To provide an oscillating device capable of adjusting a deviation between a phase of pulse voltage and a phase of oscillation of a movable plate with a simple method.SOLUTION: The oscillating device oscillates a movable plate 2 on a twisted spring 3 as axis by applying a pulse voltage across interdigital electrodes 2b and 4d. The pulse voltage is supplied at first predetermined time intervals. A time difference from the timing when the pulse voltage is supplied as the reference up to a timing when the swing angle of an oscillation of the movable plate 2 detected by an oscillation detection sensor 19 is zero. Comparing the measured time difference to a second predetermined time, when the difference between the time difference and the second predetermined time exceeds an allowable time difference, a feedback control is performed to increase or decrease the duty ratio of the pulse voltage so that the timing when the swing angle of the oscillation of the movable plate 2 becomes zero comes after a second predetermined time from the timing when the pulse voltage is supplied.

Abstract translation: 要解决的问题：提供一种能够通过简单的方法调节脉冲电压相位与可动板的振荡相位之间的偏差的振荡装置。解决方案：振荡装置使可动板2摆动在扭转弹簧3上 作为轴，通过跨越指状电极2b和4d施加脉冲电压。 以第一预定时间间隔提供脉冲电压。 与作为基准的脉冲电压的定时的时间差与由振动检测传感器19检测出的可动板2的摆动摆动角度为零的定时相同。 将测量的时间差与第二预定时间进行比较，当时间差和第二预定时间之间的差超过允许时间差时，执行反馈控制以增加或减小脉冲电压的占空比，使得当 在从提供脉冲电压的定时开始的第二预定时间之后，可动板2的振荡的摆动角变为零。

公开(公告)号：JP2013003034A

公开(公告)日：2013-01-07

申请号：JP2011136081

申请日：2011-06-20

Applicant: Panasonic Corp ,  パナソニック株式会社

Inventor： KISHIMOTO SHINICHI ,  IBARA NOBUYUKI ,  YOSHIDA HITOSHI ,  NOMURA MASATOSHI ,  KAKIMOTO KATSUMI ,  UEDA HIDEKI ,  MORI TAKASHI

IPC: G01P15/125 ,  G01P15/18 ,  H01L29/84

Abstract: PROBLEM TO BE SOLVED: To provide an electrostatic capacitance type sensor which is capable of reducing variation in output characteristics.SOLUTION: An electrostatic capacitance type sensor comprises movable electrodes 4, 5 which are movable in accordance with a physical quantity given from the outside, an upper fixed plate 2a which is disposed while being opposed to one-side surfaces of the movable electrodes 4, 5, a lower fixed plate 2b which is disposed while being opposed to other-side surfaces of the movable electrodes 4, 5, beams 6a, 6b, 7a, 7b which support the movable electrodes 4, 5 so as to freely oscillate with respect to a frame, fixed electrodes 20a, 21a disposed at a side of the upper fixed plate 2a confronted with the movable electrodes 4, 5, and a detection electrode which detects a change in electrostatic capacitance between the movable electrodes 4, 5 and the fixed electrodes 20a, 21a. A center frame 22 that is a frame in a central portion between the movable electrodes 4, 5 is not coupled partially or entirely with at least one of the upper fixed plate 2a and the lower fixed plate 2b.

Abstract translation: 要解决的问题：提供能够减少输出特性变化的静电电容型传感器。 解决方案：静电电容式传感器包括可根据从外部给出的物理量移动的可移动电极4,5，上固定板2a与可动电极的一侧表面相对设置 如图4,5所示，下固定板2b与可动电极4,5的其他侧面相对设置，支撑可动电极4,5的梁6a，6b，7a，7b，以便与可动电极4,5自由振动， 设置在与可动电极4,5对置的上固定板2a的一侧的固定电极20a，21a以及检测电极4,5和固定电极4,5之间的静电电容变化的检测电极 电极20a，21a。 作为可动电极4,5之间的中央部的框架的中心框架22不与上固定板2a和下固定板2b中的至少一个部分或全部连接。 版权所有（C）2013，JPO＆INPIT