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31.发明专利Liquid droplet discharge apparatus and manufacturing method of electrooptical device 审中-公开液体放电装置和电子装置的制造方法
公开(公告)号：JP2005125143A
公开(公告)日：2005-05-19
申请号：JP2003360641
申请日：2003-10-21
Applicant: Seiko Epson Corp , セイコーエプソン株式会社
Inventor： KAKIZAWA TAKESHI , USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a liquid droplet discharge apparatus capable of easily forming a membrane using a highly viscous liquid material and capable of accurately controlling the amount of the liquid material to be discharged to form the membrane with a desired thickness with high precision, and a manufacturing method of an electrooptical device using it.
SOLUTION: This liquid droplet discharge apparatus 1 is equipped with a container T for storing the liquid material L, a liquid droplet discharge head 2 for discharging the liquid material and transfer piping 3 and has a temperature control means 5 for controlling the temperatures of all of them to the same temperature. This liquid droplet discharge apparatus is further equipped with a lift means 30 for raising and lowering the container T, a temperature detection means 31 for detecting the temperature of the liquid material of either one of the container T, the transfer piping 3 and the liquid droplet discharge head 2, and a rising/falling control means 32 for controlling the lift means 30 so as to raise and lower the container T so that a change in the liquid surface level of the liquid material in the container T, caused by the difference between the temperature detected by the temperature detection means 31 and the temperature controlled by the temperature control means 5, is corrected so as to obtain a normal liquid surface level.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：提供一种能够使用高粘度液体材料容易地形成膜的液滴喷射装置，并且能够精确地控制要排出的液体材料的量以形成具有期望厚度的膜， 高精度，以及使用它的电光装置的制造方法。 解决方案：该液滴喷射装置1装备有用于储存液体材料L的容器T，用于排出液体材料和输送管道3的液滴喷射头2，并具有用于控制温度的温度控制装置5 他们都在相同的温度。 该液滴喷出装置还具备用于升降容器T的升降装置30，用于检测容器T，输送配管3和液滴中的任一个的液体材料的温度的温度检测单元31 排出头2，以及用于控制提升装置30以升高和降低容器T的上升/下降控制装置32，使得容器T中的液体材料的液面水平的变化是由 由温度检测装置31检测到的温度和由温度控制装置5控制的温度被校正，以获得正常的液面水平。 版权所有（C）2005，JPO＆NCIPI
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32.发明专利
公开(公告)号：JP2004358729A
公开(公告)日：2004-12-24
申请号：JP2003157860
申请日：2003-06-03
Applicant: Seiko Epson Corp , セイコーエプソン株式会社
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To eject a liquid drop accurately even when a temperature distribution appears in an ejection head.
SOLUTION: The liquid drop ejection head has a nozzle plate 120 provided with a plurality of nozzles 100a and arranged to eject drops of functional liquid from the nozzles 100a through temperature regulation. The plurality of nozzles 100a are formed at a pitch Ln based on a temperature distribution appearing in the nozzle plate 120 by temperature regulation.
COPYRIGHT: (C)2005,JPO&NCIPI-
33.发明专利
公开(公告)号：JP2004087303A
公开(公告)日：2004-03-18
申请号：JP2002246924
申请日：2002-08-27
Applicant: Seiko Epson Corp , セイコーエプソン株式会社
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To fill an ink in a head without heating nor leaving air bubbles in a flow path even with the ink of high viscosity. SOLUTION: A head 14 is provided with a discharge nozzle. A sucking apparatus 44 sucks a liquefied material in the head 14 from the discharge nozzle through a suction path. By intermittently sucking the liquefied material from the discharge nozzle, it is filled in the head 14. COPYRIGHT: (C)2004,JPO
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公开(公告)号：JP2003266679A
公开(公告)日：2003-09-24
申请号：JP2002069155
申请日：2002-03-13
Applicant: SEIKO EPSON CORP
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide an ink jet type ejecting method capable of precise control of ejection quantity, and to make possible to fabricate a microlens, a color filter, an organic electroluminescence device, a precise machine device, and the like. SOLUTION: Ejection quantity from an election head is controlled by setting the driving frequency and the temperature of a functional liquid in a cavity at specified values. Inside of the cavity is pressurized with constant driving voltage, driving waveform and driving frequency. COPYRIGHT: (C)2003,JPO
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公开(公告)号：JP2003019790A
公开(公告)日：2003-01-21
申请号：JP2001208475
申请日：2001-07-09
Applicant: Seiko Epson Corp , セイコーエプソン株式会社
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide an ink jet recorder capable of always suitably discharging even a high viscosity functional liquid such as a lubricating oil, a resin or the like and to provide a method for ink jet recording.
SOLUTION: The ink jet recorder 1 comprises a cartridge heater 310, a heater 320 and a heater 330 respectively provided at a recording head 10, a tank 109 and a supply pipe 107, a first temperature sensor 315, and a second temperature sensor 125 and a third temperature sensor 335, respectively. The recorder 1 also comprises a temperature controller 300 for controlling the temperatures of the head 100, the tank 109 and the pipe 107 at respective optimum temperatures.
COPYRIGHT: (C)2003,JPOAbstract translation: 要解决的问题：提供一种能够始终适当地排出诸如润滑油，树脂等的高粘度功能液体并且提供喷墨记录方法的喷墨记录器。 解决方案：喷墨记录器1包括分别设置在记录头10，箱109和供给管107，第一温度传感器315和第二温度传感器125上的盒式加热器310，加热器320和加热器330，以及 第三温度传感器335。 记录器1还包括温度控制器300，用于在相应的最佳温度下控制头部100，罐109和管道107的温度。
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Patent Agency Ranking
公开(公告)号：JP2002208684A
公开(公告)日：2002-07-26
申请号：JP2001003021
申请日：2001-01-10
Applicant: SEIKO EPSON CORP
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To produce an SOI substrate with high electrical characteristics in a manufacturing step, without decreasing the mechanical strength. SOLUTION: An oxide silicon film 102 is formed on the surface of a silicon wafer 101. Two silicon wafers 101 are placed facing each other. The space between the silicon wafers 101 is filled and treated with a hydrofluoric acid gas 103 and jointed with each other by contact under pressure. One face of then united wafer is ground and polished, so that an SOI 104 layer is formed.
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公开(公告)号：JP2001146017A
公开(公告)日：2001-05-29
申请号：JP2000275532
申请日：2000-09-11
Applicant: SEIKO EPSON CORP , SUMITOMO ELECTRIC INDUSTRIES
Inventor： USUI TAKAHIRO , HIRATA YOSHIHIRO
Abstract: PROBLEM TO BE SOLVED: To produce an ink-jet head part with high density and high accuracy. SOLUTION: A synchrotron radiation light(SR) 108 is directed to a conductive substrate 104 coated with a resist 101 to execute lithography. By nickel electrocasting, a nickel layer 110 is formed. Thereafter, the substrate and the resist are eliminated, so that a mold 111 is obtained. With the mold used, a hot embossing process is executed for forming a resin structure on the conductive substrate. Furthermore, a nickel layer is formed by electrocasting so as to obtain a metal part.
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公开(公告)号：JP2001058414A
公开(公告)日：2001-03-06
申请号：JP23270099
申请日：1999-08-19
Applicant: SEIKO EPSON CORP
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing an ink-jet head which will not deteriorate an ink discharge characteristic. SOLUTION: A face of a cavity plate 103 to be joined with a nozzle plate 101 is treated with fluorine, whereby a fluorinated face 105 is formed. The cavity plate 103 and nozzle plate 101 are brought in contact with a predetermined position and held between a support stage 107 and a pressure stage 106. A pressure is applied to the pressure stage 106 in a direction 108 of a pressuring direction. After the pressuring for a predetermined time, the cavity plate and nozzle plate are taken outside, whereby a joined structure is obtained.
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公开(公告)号：JPH11291494A
公开(公告)日：1999-10-26
申请号：JP9649398
申请日：1998-04-08
Applicant: SEIKO EPSON CORP
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide an ink jet head with a high degree of dimensional accuracy at low price by means of an inexpensive substrate and manufacturing device by a simple manufacturing process. SOLUTION: The ink jet head is manufactured in the following manufacturing steps. A substrate 101 is shown in step (1-1). Holes 102 are formed in the substrate 101 in step (1-2). A dummy material 103 is filled into each hole 102 in step (1'-3). A lower electrode 104, a piezoelectric material 105, and an upper electrode 106 are formed in the form of film in step (1-4). In step (1-5), piezoelectric elements 107 each of predetermined pattern are formed from the lower electrode 104, piezoelectric material 105, and upper electrode 106 at positions corresponding to the holes 102, repectively. In step (1-6), the dummy material 103 is removed.
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公开(公告)号：JPH10217457A
公开(公告)日：1998-08-18
申请号：JP2185197
申请日：1997-02-04
Applicant: SEIKO EPSON CORP
Inventor： USUI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To facilitate adhering of a rear face of a nozzle face with the other member by providing ink-repellency on the rear face of the nozzle face of a nozzle member and an adhesive by a method wherein when a thin film of gold is formed on the nozzle member, the gold thin film is slightly stuck on the rear face of the nozzle face and the substrate is dipped into a solvent in which sulfur compound is dissolved, then the sulfur compound having the ink- repellency is stuck thereto. SOLUTION: A thin film of gold is formed on a nozzle face side of a nozzle member 401 by a spattering method. The film of the gold 402 is uniformly formed on the nozzle face side. The film of the gold 403 is slightly formed in the vicinity of a nozzle hole 407 on a face opposite the nozzle face side via the nozzle hole 407. Next, sulfur compound is stuck on the gold. The sulfur compound 404 is formed on the gold 403 on both of the nozzle face side and rear face side. The rear face side is irradiated with ultraviolet rays 406. The sulfur compound is decomposed to be removed therefrom by the ultraviolet rays 406.
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