公开(公告)号：JPH02268228A

公开(公告)日：1990-11-01

申请号：JP8963189

申请日：1989-04-11

Applicant: TORAY INDUSTRIES

Inventor： KATO TOMIO ,  HASHIMOTO NOBUO ,  TAKEDA SHUZO

IPC: G01F1/20 ,  G01F1/32

Abstract: PURPOSE:To prevent damages of a piezoelectric film and to measure flow rates highly sensitively by introducing fluid pressures into pressure chambers on both sides of the macromolecular piezoelectric film through two curved introducing paths, and detecting the differential pressure on both sides with the piezoelectric film. CONSTITUTION:Fluid from the element part of a flowmeter is introduced into pressure chambers 7 and 8 on both sides of a macromolecular piezoelectric film 2 through input nozzles 16 and 17 and curved introducing paths 14 and 15. The reverse differential pressures alternately act on both surfaces of the film 2. The film 2 is deformed alternately. Electric charges are generated in electrode layers 3 and 4 of the film 2 by spontaneous polarization, and the alternating potential difference is generated. The potential difference is transmitted to an amplifier 20 through holder electrodes 5 and 6 and lead wires 18 and 19. A voltage signal is outputted from the amplifier 20. Therefore, the minute fluctuation in pressure can be detected highly sensitively, and the damages of the film 2 due to foreign matters in the fluid can be prevented. The flow rate can be measured highly sensitively with a simple structure.

公开(公告)号：JPS6316237A

公开(公告)日：1988-01-23

申请号：JP15970586

申请日：1986-07-09

Applicant: TORAY INDUSTRIES

Inventor： KATO TOMIO

IPC: G01L1/16

Abstract: PURPOSE:To considerably improve sensitivity by using a high-polymer piezo-electric film which is corrugated and is concentrically formed with waves so that the film is largely deformed and the large electric power is obtd. even if the force acting thereon is small. CONSTITUTION:Electrode 2, 3 are formed on both faces of the corrugated high- polymer piezo-electric film 1, by which the main body part is constituted. The waves of the film 1 form concentrical circles are equal pitches. The main body part is sandwiched by two sheets of upper and lower thin annular metallic holders 4, 5 and are further adhered and supported into another plate holder 6 made of a metal or synthetic resin, etc. having rigidity. The film 1 of such sensor is deformed and the voltage corresponding to the amt. of deformation is generated between the electrodes 2 and 3 when force acts on the upper or lower side face of the main body part. Since the magnitude of the voltage corresponds to the force acted thereon, the magnitude of the force is known therefrom.