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公开(公告)号:JP2003243194A
公开(公告)日:2003-08-29
申请号:JP2002042145
申请日:2002-02-19
Applicant: USHIO ELECTRIC INC
Inventor: ARIMOTO TOMOYOSHI , IKEUCHI MITSURU
Abstract: PROBLEM TO BE SOLVED: To provide a driving method for lessening loss of electrode loss, extending life and stabilizing I and light output as a light source for an image projector. SOLUTION: Drive power of a high pressure lamp is selected in such a manner that when a power wave form is frequency-resolved, a frequency of a component not lower than 5% of the whole powder is at least 2 kHz and not higher than the lowest acoustical resonance frequency of the lamp. COPYRIGHT: (C)2003,JPO
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公开(公告)号:JPH1167154A
公开(公告)日:1999-03-09
申请号:JP22702797
申请日:1997-08-11
Applicant: USHIO ELECTRIC INC
Inventor: OYAMA MASAMITSU , KONDO YOSHITERU , KAMAYA YOSHIHARU , ARIMOTO TOMOYOSHI , GOTO KAZUHIRO
Abstract: PROBLEM TO BE SOLVED: To provide an extra-high pressure discharge lamp in which mercury vapor pressure is extremely high and which has sufficient durability. SOLUTION: This lamp consists of a swelling luminous space part 20 and slender sealing parts 21a, 21b extending from its both ends respectively. In the swelling luminous space part 20, a pair of electrodes 3a, 3b facing each other with an interval of not more than 2.5 mm are arranged, also mercury, the vapor pressure of which becomes not less than 80 atmospheres when lighted, is filled and the slender sealing part 21 on the side of the swelling luminous space part 20 is made larger than the other parts.
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公开(公告)号:JPH09326245A
公开(公告)日:1997-12-16
申请号:JP16251196
申请日:1996-06-04
Applicant: USHIO ELECTRIC INC
Inventor: AZUMA TADATOSHI , ARIMOTO TOMOYOSHI
Abstract: PROBLEM TO BE SOLVED: To provide a light source device capable of enhancing the utilization efficiency of light, hardly casting the shadow of conductive wiring on the screen, simply forming a trigger electrode, and reducing the cost. SOLUTION: A light source device is constituted in such a way that one seal part 12 of a short arc metal halide lamp 10 is fixed to a base edge opening 21 of a concave reflecting mirror 20, and the other seal part 13 is extended in the direction of a tip opening 22 of the concave reflecting mirror 20. A conductive wiring 30 connecting to an outer lead rod 15 extending from the seal part 13 extended in the direction of the tip opening 22 of concave reflecting mirror 20 is bonded to the electrode root part of the seal part 12 fixed to the base edge opening 21 of the concave reflecting mirror 20, and the bonded part 41 acts as a triggered electrode.
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公开(公告)号:JPH0831383A
公开(公告)日:1996-02-02
申请号:JP18413994
申请日:1994-07-14
Applicant: USHIO ELECTRIC INC
Inventor: AZUMA TADATOSHI , ARIMOTO TOMOYOSHI
Abstract: PURPOSE:To make the service life of a lamp longer by limiting whitening generated in a light emitting tube in a short-arc metal halide lamp into which rare earth halide and cesium halide are enclosed. CONSTITUTION:A lamp is formed by enclosing, in addition to rare gas and mercury, at least rare earth halide and cesium halide into a quarts light emitting tube 1 equipped, on its both ends, with a pair of tungsten electrodes operating as a negative electrode 3 and a positive electrode 2. This lamp is lit by making an arc axis almost level and using DC power. In this DC lighting short-arc metal halide lamp, the negative electrode 3 is positioned below the center axis of the quartz light emitting tube 1.
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公开(公告)号:JP2002151013A
公开(公告)日:2002-05-24
申请号:JP2000345179
申请日:2000-11-13
Applicant: USHIO ELECTRIC INC
Inventor: ARIMOTO TOMOYOSHI , KITAGAWA TETSUYA , YOSHIOKA MASAKI
IPC: G03F7/20 , H01J65/00 , H01L21/027 , H01S3/00 , H01S3/223
Abstract: PROBLEM TO BE SOLVED: To provide a reference light source for a fluorine laser device emitting light with the wavelength of 157 nm, which can be used as a projection aligner including a stepper, a scan exposure or the like in a practical sense. SOLUTION: This is the reference light source used to stabilize the wavelength of a laser beam with the wavelength of 157 nm oscillated from the fluorine laser device, wherein 0.005 to 0.040 μmol/cc of bromine atom that is a light emitting substance is sealed in a discharge container. Only bromine atom is sealed as the light emitting substance in the discharge container. Furthermore, 0.3 to 3.5 kPa (at room temperature) of at least one kind of rare gas selected from among argon(Ar), xenon(Xe), and krypton(Kr) is sealed as a buffer gas for a startup in the discharge container. Bromine atoms are also sealed in the form of hydrogen bromide(HBr) or ammonium bromide (NH4Br).
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公开(公告)号:JPH11329362A
公开(公告)日:1999-11-30
申请号:JP15394398
申请日:1998-05-19
Applicant: USHIO ELECTRIC INC
Inventor: OYAMA MASAMITSU , ARIMOTO TOMOYOSHI , GOTO KAZUHIRO
IPC: H01J61/073 , H01J61/20 , H01J61/30 , H01J61/88
Abstract: PROBLEM TO BE SOLVED: To provide a high pressure mercury lamp that is lit at an inside pressure not less than a hundred and tens atm. and is excellent in thermal load and air convection. SOLUTION: This high pressure mercury lamp has a structure wherein an electrode 4 located on the upper side and an electrode 5 located on the lower side are arranged opposite to each other in a discharge container 2 formed from quartz glass and the discharge container 2 is filled with 0.155 mg/mm or more of mercury and a rare gas; and has a feature that a length L1 (mm) at which the electrode 4 located on the upper side is projected into the discharge container 2 is larger than a length L2 (mm) at which the electrode 5 located on the lower side is projected into the discharge container 2, and lamp power W (W) and the maximum value D (mm) of the inside diameter in a direction perpendicular to the axis combining both the electrodes 4, 5 in the discharge container 2 satisfy 0.39×(W) and (W/46) .
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公开(公告)号:JPH08153487A
公开(公告)日:1996-06-11
申请号:JP31435094
申请日:1994-11-25
Applicant: USHIO ELECTRIC INC
Inventor: AZUMA TADATOSHI , ARIMOTO TOMOYOSHI
IPC: H01J61/073 , H01J61/86 , H01J61/88
Abstract: PURPOSE: To obtain a light source having the excellent characteristics as a light source for a liquid crystal projecting-type display, and having the long life, by restraining instability of light emission output to be generated in a short arc metal halide lamp for d.c. lamp, wherein opaque white is restrained. CONSTITUTION: In a quartz-made lamp 3 provided with a positive electrode 1 and a negative electrode 2, the tip of the positive electrode is formed into a shape wherein a flat surface 4 having the constant area is made to remain on the tip, and the corner is ground, in order to obtain the stable discharge in lighting wherein an arc shaft is approximately horizontally placed. When the lamp current is taken as I ampere, the positive electrode is so designed that the relationship of 0.45(mm /A) /A) (corresponding to input current from 100W to 250W) may be satisfied between the area of Smm of the flat surface on the tip of the positive electrode and the current I ampere in relation to a lamp having the lamp current having the degree of the range from 1.6 ampere to 4.5 ampere. Moreover, it is desirable that the grinding tilt angle θ on the tip of the electrode is 45 deg. or more.
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公开(公告)号:JPH0887066A
公开(公告)日:1996-04-02
申请号:JP24488894
申请日:1994-09-14
Applicant: USHIO ELECTRIC INC
Inventor: ARIMOTO TOMOYOSHI , AZUMA TADATOSHI
IPC: G02F1/1335 , F21V17/00 , G02F1/13357 , G03B21/14 , H01J61/35 , H01J61/52
Abstract: PURPOSE: To obtain a light source device capable of reducing the mottling of an irradiated face due to the difference in light color depending on the light emitting area characteristic of a DC-lit mixed metallic vapor discharge lamp. CONSTITUTION: This light source device consists of a DC-lit short-arc mixed metallic vapor discharge lamp 100 and a concave mirror 101 with the optical axis aligned with the arc axis of the lamp 100. The bulb 1 of the lamp 100 is frosted from the end of a cathode bulb to >=1/4 of the length from the tip of the cathode 6 to the arc or to 3/4 or lower, and hence a light having a good color distribution is projected on a screen by this light source device. Further, an insulating film 7 of heat-resistant oxide is applied, as required, on the bulb from the end of the cathode bulb to the tip of the cathode 6 or lower, and the cathode 6 side coated with the insulating film 7 is positioned on the open side of the concave mirror 101.
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公开(公告)号:JPH07288101A
公开(公告)日:1995-10-31
申请号:JP10440994
申请日:1994-04-20
Applicant: USHIO ELECTRIC INC
Inventor: AZUMA TADATOSHI , ARIMOTO TOMOYOSHI
Abstract: PURPOSE:To reduce generation of cloudiness of a crystalized light emitting tube, avoid corrosion of electrodes, and ensure its longer survice life by additionally sealing a specific light emitting substance and applying DC power to a lamp with a horizontal arc axis to light the lamp. CONSTITUTION:0.8 to 8.0 micro-mol of halogenated indium, 0.4 or more micro mol of rare-earth element halide, 0.2 or more micro mol of haloganated cesium per 1cm volume of a crystalized light emitting tube l are sealed in the light emitting tube l provided with a tungsten-made anode 2 and a cathode 3, in addition to rare gas and mercury. And, with an arc axis formed by the anode 2 and the cathode 3 being horizontal, the lamp is lighted by the DC power. Thereby, the number of ions reaching a tube wall is reduced by utilizing the deviation phenomena of the light emitting substance generated by DC power lighting, and cloudiness is restricted. At this time, uneven color caused by the gradient of a thickness density is reduced by the halogenated indium in which the light emitting gradient is not likely to be generated, corrosion of the electrodes is avoided, so that its longer service life can be ensured.
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公开(公告)号:JP2001266797A
公开(公告)日:2001-09-28
申请号:JP2000075434
申请日:2000-03-17
Applicant: USHIO ELECTRIC INC
Inventor: ARIMOTO TOMOYOSHI
IPC: H01J61/20 , H01J61/52 , H05B41/231 , H05B41/24
Abstract: PROBLEM TO BE SOLVED: To provide a high-pressure mercury lamp, capable of shortening a rise time for light output and preventing glow discharge from being generated at starting the lamp. SOLUTION: An light emission device for the high-pressure mercury lamp (1), having a pair of opposed electrodes (6, 7) arranged in a discharge container (2) which is formed of a silica glass with sealed portions (4, 5) at both ends and filled with 0.15 mg/mm3 or larger mercury, comprises means (11, 12) for heating the outer surface of an emission portion (3) of the discharge container (2) to 100 degrees C or higher, before starting the lighting of the high-pressure mercury lamp (1).
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