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    31.
    发明专利
    未知

    公开(公告)号：DE60206121T2

    公开(公告)日：2006-05-04

    申请号：DE60206121

    申请日：2002-10-02

    Applicant: XEROX CORP

    Inventor： ROMANO LINDA T ,  FORK DAVID K

    IPC: B81B3/00 ,  H01R13/22 ,  B81C1/00 ,  G01R1/067 ,  G01R3/00 ,  H01L21/60 ,  H01L23/12 ,  H01L23/32 ,  H05K3/40

    Abstract: A stress-balancing layer (130) is formed over portions (122) of a spring metal finger (120) that remain attached to an underlying substrate (101) to counter internal stresses inherently formed in the spring metal finger (120). The (e.g., positive) internal stress of the spring metal causes the claw (tip) (125) of the spring metal finger (120) to bend away from the substrate (101) when an underlying release material is removed. The stress-balancing pad (130) is formed on an anchor portion (122) of the spring metal finger (120), and includes an opposite (e.g., negative) internal stress that counters the positive stress of the spring metal finger (120). A stress-balancing layer (230) is either initially formed over the entire spring metal finger (120) and then partially removed (etched) from the claw portion (125), or selectively deposited only on the anchor portion (122) of the spring metal finger (120). An interposing etch stop layer (325-1) is used when the same material composition is used to form both the spring metal (220) and stress-balancing (230) layers.

    METHOD FOR FORMING PLANE EXTERNAL STRUCTURE
    32.
    发明专利
    METHOD FOR FORMING PLANE EXTERNAL STRUCTURE 审中-公开

    公开(公告)号：JP2002329631A

    公开(公告)日：2002-11-15

    申请号：JP2002029411

    申请日：2002-02-06

    Applicant: XEROX CORP

    Inventor： FORK DAVID K ,  CHUA CHRISTOPHER L

    IPC: G03F7/20 ,  B81B1/00 ,  B81B3/00 ,  B81C1/00 ,  H01F17/00 ,  H01F41/04 ,  H05K1/16 ,  H05K3/40

    Abstract: PROBLEM TO BE SOLVED: To provide several methods and structures for improving the yield in plane external micro device structure including springs and coils. SOLUTION: A plane external structure comprises a substrate 20 and at least two elastic members 18 that are arranged with an interval, each elastic member 18 includes an anchor section, a spring, and a free end section, the anchor section is fixed to the substrate 20, and the free end section is arranged separately from the substrate 20. The radius of curvature of the elastic member 18 to be released is controlled by depositing a layer made of a reflow material, and then performing reflow after the release. A structure having a high yield can be used for a number of electronic application fields such as a filter circuit.

    STRUCTURE OF OPTICAL SWITCH ON GLASS SUBSTRATE
    33.
    发明专利
    STRUCTURE OF OPTICAL SWITCH ON GLASS SUBSTRATE 审中-公开

    公开(公告)号：JP2002162580A

    公开(公告)日：2002-06-07

    申请号：JP2001286785

    申请日：2001-09-20

    Applicant: XEROX CORP

    Inventor： PEETERS ERIC ,  ROSA MICHEL A ,  FORK DAVID K

    IPC: G02B26/08 ,  B81B3/00 ,  G02B6/35

    Abstract: PROBLEM TO BE SOLVED: To obtain an optical switch, using a reflection MEMS mirror. SOLUTION: An optical cross connect system involves the general concept of a two-dimensional array of MEMS tilt mirrors, used to direct light, coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two-dimensional array can tilt about two non-colinear axes and is suspended by plural suspension arms attached to a glass substrate.

    STRUCTURE OF OPTICAL SWITCH ON SUBSTRATE
    36.
    发明专利
    STRUCTURE OF OPTICAL SWITCH ON SUBSTRATE 审中-公开

    公开(公告)号：JP2002162577A

    公开(公告)日：2002-06-07

    申请号：JP2001286445

    申请日：2001-09-20

    Applicant: XEROX CORP

    Inventor： PEETERS ERIC ,  ROSA MICHEL A ,  FORK DAVID K

    IPC: B81B3/00 ,  B81B7/00 ,  G02B6/35 ,  G02B26/08

    Abstract: PROBLEM TO BE SOLVED: To obtain an optical switch, using a reflection MEMS(micro- electromechanical system) mirror. SOLUTION: Optical cross-connect involve the general concept of a two-dimensional array of MEMS tilt mirrors, used to direct light coming from a first optical fiber, to a second optical fiber. Each MEMS tilt mirror in the two-dimensional array can rotate about its x-axis and y-axis and is suspended by plural suspension arms attached to a substrate.

    Scanning probe system having a spring probe
    37.
    发明专利
    Scanning probe system having a spring probe 审中-公开
    扫描探头系统与弹簧探头

    公开(公告)号：JP2003307483A

    公开(公告)日：2003-10-31

    申请号：JP2003079950

    申请日：2003-03-24

    Applicant: Xerox Corp ,  ゼロックス・コーポレーション

    Inventor： HANTSCHEL THOMAS ,  CHOW EUGENE M ,  FORK DAVID K

    IPC: G01B21/30 ,  B81B3/00 ,  G01Q10/00 ,  G01Q20/02 ,  G01Q30/00 ,  G01Q60/00 ,  G01Q70/02 ,  G01Q70/08 ,  G01Q70/16 ,  G01N13/10

    CPC classification number: G01Q70/10 ,  G01Q70/06 ,  G01Q70/16 ,  G01R1/06727 ,  Y10S977/873

    Abstract: PROBLEM TO BE SOLVED: To provide a scanning probe system of a scanning probe microscope system or the like having a low-cost probe that can be easily manufactured. SOLUTION: The scanning probe microscope (SPM) system for probing a sample 115 includes a stand 110 having a surface for mounting the sample 115, a probe assembly 120-1, and pieces of measuring apparatus (142, 145). The probe assembly includes a substrate 122, and a spring probe 125. The probe 125 comprises a fixed end 210 mounted to the substrate, a central section 220 that is curved away from the substrate, and a free end 230 having a probe chip 235 that is arranged adjacent to the surface of the stand. The pieces of measuring apparatus measure deformation in the spring probe 125 due to the interaction between the probe chip 235 and the sample 115. COPYRIGHT: (C)2004,JPO

    Abstract translation: 要解决的问题：提供具有可以容易地制造的低成本探针的扫描探针显微镜系统等的扫描探针系统。 解决方案：用于探测样品115的扫描探针显微镜（SPM）系统包括具有用于安装样品115的表面的支架110，探针组件120-1和测量装置（142,145）。 探针组件包括基底122和弹簧探针125.探针125包括安装到基底的固定端210，远离基底弯曲的中心部分220和具有探针芯片235的自由端230，探针芯片235 被布置成与支架的表面相邻。 测量装置测量由于探针芯片235和样品115之间的相互作用而导致的弹簧探针125中的变形。（C）2004，JPO

    SPRING STRUCTURE WITH STRESS-BALANCING LAYER
    38.
    发明专利
    SPRING STRUCTURE WITH STRESS-BALANCING LAYER 审中-公开

    公开(公告)号：JP2003218292A

    公开(公告)日：2003-07-31

    申请号：JP2002294382

    申请日：2002-10-08

    Applicant: XEROX CORP

    Inventor： ROMANO LINDA T ,  FORK DAVID K

    IPC: B81B3/00 ,  B81C1/00 ,  G01R1/067 ,  G01R3/00 ,  H01L21/60 ,  H01L23/12 ,  H01L23/32 ,  H05K3/40

    Abstract: PROBLEM TO BE SOLVED: To improve the strength and durability of a spring structure. SOLUTION: A stress-balancing layer is formed over a portion of a spring metal finger 120 that remains attached to a substrate 101 to counter balance internal stresses inherently formed in the spring metal finger 120. The internal stress (for example, positive internal stress) of the spring metal finger 120 causes the safety lug 125 (tip) of the spring metal finger 120 to bend away from the substrate 101 when a underlying release substance is removed. A stress-balancing pad 130 is formed on an anchor portion 122 of the spring metal finger 120, and made to include an internal stress (for example, negative internal stress) that counter balances the positive stress of the spring metal finger 120. COPYRIGHT: (C)2003,JPO

    Self-assembling structure for electrostatic extraction of pigment from liquid ink for marking
    39.
    发明专利
    Self-assembling structure for electrostatic extraction of pigment from liquid ink for marking 有权
    用于静电吸引液体从墨水中提取颜色的自组装结构

    公开(公告)号：JP2011131596A

    公开(公告)日：2011-07-07

    申请号：JP2010285431

    申请日：2010-12-22

    Applicant: Xerox Corp ,  ゼロックス コーポレイションXerox Corporation

    Inventor： BIEGELSEN DAVID K ,  BUHLER STEVEN A ,  ELROD SCOTT A ,  FITCH JOHN S ,  FORK DAVID K ,  HADIMIOGLU BABUR B ,  STEARNS RICHARD G

    IPC: B41J2/16 ,  B41J2/06

    CPC classification number: B41J2/06

    Abstract: PROBLEM TO BE SOLVED: To reduce a metal required for sputtering.
    SOLUTION: A flattening structure for use with an associated marking device selected from a plurality of marking device types for making a mark on an associated substrate is provided. The flattening structure includes: a substrate; and a self-lifting spring finger having a non-raising anchor part mounted to the substrate and a separated part extending to the substrate where the separated part has a proximal end and distal end, and the distal end includes a tip for promoting the discharge of a marking fluid, and the separated part of the self-lifting spring finger rises from the surface by etching.
    COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题：为了减少溅射所需的金属。 提供了一种用于与从相关联的基底上形成标记的多个标记装置类型中选择的相关标记装置使用的扁平结构。 平坦化结构包括：基板; 以及自升式弹簧指，其具有安装到所述基板的非升高锚定部分，以及分离部分，其延伸到所述分离部分具有近端和远端的所述基板，并且所述远端包括用于促进所述分离部分的排出的末端 标记流体，并且自升式弹簧手指的分离部分通过蚀刻从表面上升。 版权所有（C）2011，JPO＆INPIT

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