公开(公告)号：EP0275469A3

公开(公告)日：1990-01-24

申请号：EP87118384.4

申请日：1987-12-11

Applicant: International Business Machines Corporation

Inventor： Batchelder, John Samuel

IPC: G01N21/89 ,  G01N21/88 ,  G01N21/55

CPC classification number: G01N21/94 ,  G01N21/9501 ,  G01N2021/8867 ,  G01N2201/0655

Abstract: A system and procedure for the inspection of the surface of a semiconductor wafer (26) ascertains that particulate contaminants have been adequately cleaned from the surface during the manufacture of integrated electric circuits. The wafer is advanced in a first direction (30) and is optically scanned in a second direction, transverse to the first direction, for recording intensities of light reflected normally from the wafer surface as a function of location on the scan line. A high intensity reflection is indicative of a smooth flat surface suitable for inspection of particles by an integrating hemisphere (48) with plural photodetectors (50,52) therein. A weak reflection is indicative of undulations and patterned regions which are unfavorable for examination of particles on the wafer surface. A second scan is offset sideways to compensate for motion of the wafer so as to rescan the same line as the first scan. The photodetectors in the integrating sphere are gated on and off during the second scan at the locations of suitable inspection sites determined from the first scan.

公开(公告)号：US20180017486A1

公开(公告)日：2018-01-18

申请号：US15430916

申请日：2017-02-13

Applicant: Jang-Il SER

Inventor： Jang-Il SER

IPC: G01N21/47

CPC classification number: G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N2021/4716 ,  G01N2021/4733 ,  G01N2021/556 ,  G01N2201/0626 ,  G01N2201/0634 ,  G01N2201/0638 ,  G01N2201/0655

Abstract: An illumination system for recognizing material includes a measurement stage, a light-providing part, a light-receiving part, and a processing part. The measurement stage is upwardly open and the measurement target is located on the measurement stage. The light-providing part includes a plurality of illumination sections providing incident lights to the measurement target, and provides multi-directional incident lights to the measurement target from multiple upper directions at which the measurement stage is open. The light-receiving part receives single-directional reflection lights reflected by the measurement target according to the multi-directional incident lights provided by the light-providing part. The processing part acquires a multi-directional intensity distribution of multi-directional reflection lights reflected by the measurement target according to a single-directional incident light from the single-directional reflection lights reflected by the measurement target according to the multi-directional incident lights, and determines material of the measurement target from the multi-directional intensity distribution of reflection lights. Thus, material of an object may be easily and accurately known at a low cost.

公开(公告)号：US08670066B2

公开(公告)日：2014-03-11

申请号：US13611833

申请日：2012-09-12

Applicant: David Newcomb ,  Demetris P. Young

Inventor： David Newcomb ,  Demetris P. Young

IPC: H04N5/222

CPC classification number: G01N21/8806 ,  G01N21/9018 ,  G01N21/9508 ,  G01N2021/8816 ,  G01N2021/8822 ,  G01N2021/8835 ,  G01N2021/8845 ,  G01N2201/0627 ,  G01N2201/0644 ,  G01N2201/0655 ,  G03B11/045 ,  G06F19/00 ,  G06K9/20 ,  G06Q10/087 ,  G06Q50/22

Abstract: A vision system useful in acquiring images includes: a light dome having a window and a perimeter; an annular light curtain positioned within and radially inwardly from the perimeter of the light dome such that an annular gap is formed between the light dome and the light curtain; and a light ring positioned to illuminate the gap between the light dome and the light curtain. The light curtain and window are sized and positioned such that no direct light from the light ring reaches the window. The system further comprises a camera having a lens facing the window to acquire images of an object on a side of the window opposite the camera. The images acquired by the camera can then be compared to stored images to determine whether the identity of the objects (which may be pharmaceutical tablets) is as expected.

Abstract translation: 用于获取图像的视觉系统包括：具有窗口和周边的光穹顶; 环形光幕位于光穹顶的周边内并径向向内，使得在光穹顶和光幕之间形成环形间隙; 以及定位成照亮光穹顶和光幕之间的间隙的光环。 光幕和窗户的大小和位置使得没有来自光环的直接光线到达窗口。 该系统还包括具有面向窗口的透镜的相机，以获取与相机相对的窗口一侧的物体的图像。 然后将相机获取的图像与存储的图像进行比较，以确定物体（可能是药片）的身份是否如预期的那样。

公开(公告)号：US08405832B2

公开(公告)日：2013-03-26

申请号：US12635369

申请日：2009-12-10

Applicant: Philipp Helmut Schmaelzle ,  Robert A. Street

Inventor： Philipp Helmut Schmaelzle ,  Robert A. Street

IPC: G01J1/00 ,  G01J3/00 ,  G01N21/55

CPC classification number: G01N21/4738 ,  G01N2021/4711 ,  G01N2201/0655

Abstract: A compact, optical measurement system has a non-flat detector array having multiple detector elements arranged on a flexible substrate in a monolithic fashion, one or more illumination sources arranged to provide more than one angle of incidence of light on a subject being measured, and a detection system in electrical communication with the detector array, the detection system arranged to receive inputs from the detector array and provide a measurement from the inputs. A method of measuring reflectance of a surface includes placing the surface adjacent a hemispherical detector array, illuminating the surface from a predetermined angle of incidence, simultaneously detecting reflectance at multiple emission angles using the hemispherical detector array, and repeating the illuminating and detecting processes at different angles of incidence. Optional arrays of lenses, baffles and filters may be employed by the system.

Abstract translation: 紧凑的光学测量系统具有非平坦检测器阵列，其具有以单片方式布置在柔性基板上的多个检测器元件，一个或多个照明源布置成在被测量的被摄体上提供多于一个入射角，以及 与所述检测器阵列电通信的检测系统，所述检测系统被布置成接收来自所述检测器阵列的输入并提供来自所述输入的测量。 测量表面的反射率的方法包括将表面邻近半球形检测器阵列，从预定的入射角度照射表面，同时使用半球形检测器阵列检测多个发射角的反射率，并重复不同的照射和检测过程 入射角。 透镜，挡板和过滤器的可选阵列可以由系统使用。

公开(公告)号：US08284305B2

公开(公告)日：2012-10-09

申请号：US12623878

申请日：2009-11-23

Applicant: David Newcomb ,  Demetris P. Young

Inventor： David Newcomb ,  Demetris P. Young

IPC: H04N5/225

CPC classification number: G01N21/8806 ,  G01N21/9018 ,  G01N21/9508 ,  G01N2021/8816 ,  G01N2021/8822 ,  G01N2021/8835 ,  G01N2021/8845 ,  G01N2201/0627 ,  G01N2201/0644 ,  G01N2201/0655 ,  G03B11/045 ,  G06F19/00 ,  G06K9/20 ,  G06Q10/087 ,  G06Q50/22

Abstract: A vision system useful in acquiring images includes: a light dome having a window and a perimeter; an annular light curtain positioned within and radially inwardly from the perimeter of the light dome such that an annular gap is formed between the light dome and the light curtain; and a light ring positioned to illuminate the gap between the light dome and the light curtain. The light curtain and window are sized and positioned such that no direct light from the light ring reaches the window. The system further comprises a camera having a lens facing the window to acquire images of an object on a side of the window opposite the camera. The images acquired by the camera can then be compared to stored images to determine whether the identity of the objects (which may be pharmaceutical tablets) is as expected.

Abstract translation: 用于获取图像的视觉系统包括：具有窗口和周边的光穹顶; 环形光幕位于光穹顶的周边内并径向向内，使得在光穹顶和光幕之间形成环形间隙; 以及定位成照亮光穹顶和光幕之间的间隙的光环。 光幕和窗户的大小和位置使得没有来自光环的直接光线到达窗口。 该系统还包括具有面向窗口的透镜的相机，以获取与相机相对的窗口一侧的物体的图像。 然后将相机获取的图像与存储的图像进行比较，以确定物体（可能是药片）的身份是否如预期的那样。

公开(公告)号：US20110141476A1

公开(公告)日：2011-06-16

申请号：US12635369

申请日：2009-12-10

Applicant: PHILIPP HELMUT SCHMAELZLE ,  ROBERT A. STREET

Inventor： PHILIPP HELMUT SCHMAELZLE ,  ROBERT A. STREET

IPC: G01N21/55 ,  G01N21/47 ,  G01J1/04 ,  B05D5/12

CPC classification number: G01N21/4738 ,  G01N2021/4711 ,  G01N2201/0655

Abstract: A compact, optical measurement system has a non-flat detector array having multiple detector elements arranged on a flexible substrate in a monolithic fashion, one or more illumination sources arranged to provide more than one angle of incidence of light on a subject being measured, and a detection system in electrical communication with the detector array, the detection system arranged to receive inputs from the detector array and provide a measurement from the inputs. A method of measuring reflectance of a surface includes placing the surface adjacent a hemispherical detector array, illuminating the surface from a predetermined angle of incidence, simultaneously detecting reflectance at multiple emission angles using the hemispherical detector array, and repeating the illuminating and detecting processes at different angles of incidence. Optional arrays of lenses, baffles and filters may be employed by the system.

Abstract translation: 紧凑的光学测量系统具有非平坦检测器阵列，其具有以单片方式布置在柔性基板上的多个检测器元件，一个或多个照明源布置成在被测量的被摄体上提供多于一个入射角，以及 与所述检测器阵列电通信的检测系统，所述检测系统被布置成接收来自所述检测器阵列的输入并提供来自所述输入的测量。 测量表面的反射率的方法包括将表面邻近半球形检测器阵列，从预定的入射角度照射表面，同时使用半球形检测器阵列检测多个发射角的反射率，并重复不同的照射和检测过程 入射角。 透镜，挡板和过滤器的可选阵列可以由系统使用。

公开(公告)号：US20080068593A1

公开(公告)日：2008-03-20

申请号：US11853050

申请日：2007-09-11

Applicant: HIROYUKI NAKANO ,  Yasuhiro Yoshitake ,  Toshihiko Nakata ,  Taketo Ueno

Inventor： HIROYUKI NAKANO ,  Yasuhiro Yoshitake ,  Toshihiko Nakata ,  Taketo Ueno

IPC: G01N21/00

CPC classification number: G01N21/95623 ,  G01N21/21 ,  G01N21/95607 ,  G01N2201/0655

Abstract: A defect detecting apparatus for detecting defects on a substrate sample (wafer) having circuit patterns such as interconnections. The defect detecting apparatus is provided with stages that can be moved arbitrarily in each of the X, Y, Z, and θ directions in a state that the substrate sample is mounted thereon, an illumination optical system for illuminating the circuit patterns from one or plural directions, and a detection optical system for detecting reflection light, diffraction light, or scattered light coming from an inspection region being illuminated through almost the entire hemispherical surface having the substrate sample as the bottom surface. The NA (numerical aperture) thereby falls within a range of 0.7 to 1.0. Harmful defects or foreign substances can be detected so as to be separated from non-defects such as surface roughness of interconnections.

Abstract translation: 一种用于检测具有诸如互连之类的电路图案的衬底样品（晶片）上的缺陷的缺陷检测装置。 该缺陷检测装置设置有可以在其上安装衬底样品的状态下在X，Y，Z和θ方向中的任一个中任意移动的阶段，用于从一个或多个照明电路图案的照明光学系统 方向，以及用于检测来自检查区域的反射光，衍射光或散射光的检测光学系统，该检查区域被基底样品的几乎整个半球形表面照射作为底面。 NA（数值孔径）因此落在0.7至1.0的范围内。 可以检测有害的缺陷或异物，以便与诸如互连的表面粗糙度的无缺陷分离。

公开(公告)号：US4968143A

公开(公告)日：1990-11-06

申请号：US331133

申请日：1989-03-31

Applicant: Allen Weston

Inventor： Allen Weston

IPC: G01J3/02 ,  G01J3/42 ,  G01J3/50 ,  G01N21/47

CPC classification number: G01N21/474 ,  G01J3/02 ,  G01J3/0251 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/0291 ,  G01J3/50 ,  G01J3/502 ,  G01J2003/425 ,  G01N2201/0655

Abstract: A portable spectrophotometer is disclosed which is provided with a holding case accommodating opto-mechanical color-reading devices and an electronic control device provided with a microprocessor having data and program memories. The spectrophotometer further includes a power source which enables its self-sustained field use.

Abstract translation: 公开了一种便携式分光光度计，其具有容纳光机械彩色读取装置的保持盒和设置有具有数据和程序存储器的微处理器的电子控制装置。 分光光度计还包括使其能够自我维持现场使用的电源。

公开(公告)号：US4740708A

公开(公告)日：1988-04-26

申请号：US719

申请日：1987-01-06

Applicant: John S. Batchelder

Inventor： John S. Batchelder

IPC: H01L21/66 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/94 ,  G01N2021/8867 ,  G01N21/9501 ,  G01N2201/0655

Abstract: A system and procedure for the inspection of the surface of a semiconductor wafer ascertains that particulate contaminants have been adequately cleaned from the surface during the manufacture of integrated electric circuits. The wafer is advanced in a first direction and is optically scanned in a second direction, transverse to the first direction, for recording intensities of light reflected normally from the wafer surface as a function of location on the scan line. A high intensity reflection is indicative of a smooth flat surface suitable for inspection of particles by an integrating hemisphere with plural photodetectors therein. A weak reflection is indicative of undulations and patterned regions which are unfavorable for examination of particles on the wafer surface. A second scan is offset sideways to compensate for motion of the wafer so as to rescan the same line as the first scan. The photodetectors in the integrating sphere are gated on and off during the second scan at the locations of suitable inspection sites determined from the first scan.

公开(公告)号：WO2015012810A1

公开(公告)日：2015-01-29

申请号：PCT/US2013/051669

申请日：2013-07-23

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： TYSK, Shane, M. ,  D'ANGELO, John, P. ,  HERZOG, William, D.

IPC: G01N21/67 ,  G01N21/15 ,  G01J3/443 ,  H01T13/20 ,  H01T13/24 ,  H01T13/34 ,  G01N15/02 ,  G01N15/06 ,  G01N15/14

CPC classification number: G01N21/67 ,  G01N15/1459 ,  G01N21/15 ,  G01N21/73 ,  G01N2015/0046 ,  G01N2201/0655 ,  H01T13/00 ,  H01T19/00

Abstract: A spark-induced breakdown spectroscopy apparatus (100) having a housing (105) with an inlet (110) and an outlet (115) that define an analyte flow path (120). A laser (280) defines a laser pathway (289) generally transverse to an intersecting the analyte flow path (120). A pair of electrodes (220), which have insulating shields (270), are mounted within the housing (105) and define a spark path (250). An optical detection element (125) defines an optical path (130). The apparatus (100) can be used to identify an aerosolized analyte.

Abstract translation: 一种具有限定分析物流动路径（120）的具有入口（110）和出口（115）的壳体（105）的火花引发的击穿光谱装置（100）。 激光器（280）限定通常横向于与分析物流动路径（120）相交的激光路径（289）。 具有绝缘屏蔽件（270）的一对电极（220）安装在壳体（105）内并限定火花通路（250）。 光学检测元件（125）限定光路（130）。 装置（100）可用于识别雾化分析物。