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    Optical technique for detecting buried defects in opaque films
    32.
    发明申请
    Optical technique for detecting buried defects in opaque films 有权
    用于检测不透明膜中的埋藏缺陷的光学技术

    公开(公告)号：US20030206292A1

    公开(公告)日：2003-11-06

    申请号：US10423354

    申请日：2003-04-25

    Applicant: Applied Materials Israel Ltd

    Inventor： Daniel Some

    IPC: G01N021/00

    CPC classification number: G01N21/956 ,  G01N21/171 ,  G01N21/636 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

    Abstract: A local area of a sample is focally heated to produce a transient physical deformation. The surface of the structure is optically monitored while the heated area cools to a baseline temperature by illuminating the heated region with one or more probe beams from time to time and detecting returning light. In some embodiments heat dissipation within the structure is correlated with change in optical reflectivity over time. In other embodiments, surface deformation of the structure is correlated with changes in light scattering from the surface. Following application of a pump pulse and no more than 3 probe pulses, a time varying returning light signal is compared with a corresponding returning light signal from a reference. An anomaly in the sample is indicated by a deviation between the two signals. First-degree exponential decay curves may be constructed from the signals, and their decay constants compared.

    Abstract translation: 样品的局部区域被加热以产生瞬态物理变形。 通过光学监测结构的表面，同时通过用不同时间的一个或多个探测光束照射加热区域并检测返回光来将加热区域冷却至基线温度。 在一些实施例中，结构内的散热与随时间的光学反射率的变化相关。 在其他实施例中，结构的表面变形与来自表面的光散射的变化相关。 在施加泵浦脉冲和不超过3个探针脉冲之后，将时变返回光信号与来自参考的相应返回光信号进行比较。 样本中的异常由两个信号之间的偏差表示。 可以根据信号构造一阶指数衰减曲线，并比较其衰减常数。

    Fluorescence detection device
    35.
    发明授权
    Fluorescence detection device 有权
    荧光检测装置

    公开(公告)号：US09523641B2

    公开(公告)日：2016-12-20

    申请号：US14405491

    申请日：2013-06-11

    Applicant: Sharp Kabushiki Kaisha

    Inventor： Ryohhei Kawamuki

    IPC: G01N21/64 ,  G01N27/44 ,  G01N27/447

    CPC classification number: G01N21/6456 ,  G01N21/6486 ,  G01N27/44721 ,  G01N27/44778 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/101 ,  G01N2201/104

    Abstract: A scanning module (9) is disposed over a first plate (32). A first motor (39) of moving the scanning module (9) in a second scanning direction and a second motor (49) of moving the scanning module (9) in a first scanning direction are disposed under the first plate (32). In this manner, the first motor (39) and the second motor (49) being a heat source are disposed on a side opposite to a scanning module (9) side using the first plate (32) as a boundary, and thus a transferred amount of heat from the first motor (39) and the second motor (49) to the scanning module (9) decreases. As a result, accuracy of fluorescence detection is prevented from degrading due to thermal distortion of a detection optical system in the scanning module (9).

    Abstract translation: 扫描模块（9）设置在第一板（32）上。 在第一扫描方向上移动扫描模块（9）的第一马达（39）和沿第一扫描方向移动扫描模块（9）的第二马达（49）设置在第一板（32）的下方。 以这种方式，作为热源的第一马达39和第二马达49利用第一板32作为边界设置在与扫描模块9相反的一侧，由此转移 从第一马达39和第二马达49到扫描模块9的热量减少。 结果，由于扫描模块（9）中的检测光学系统的热失真，防止荧光检测的精度降低。

    SYSTEM AND METHOD FOR SURFACE INSPECTION
    36.
    发明申请
    SYSTEM AND METHOD FOR SURFACE INSPECTION 有权
    用于表面检测的系统和方法

    公开(公告)号：US20160069820A1

    公开(公告)日：2016-03-10

    申请号：US14665748

    申请日：2015-03-23

    Applicant: GENERAL ELECTRIC COMPANY

    Inventor： Manuel Kenneth Bueno ,  Robert Martin Roney, Jr.

    IPC: G01N21/954 ,  G01N21/88 ,  G01S17/89

    CPC classification number: G01N21/8851 ,  G01N21/88 ,  G01N21/954 ,  G01N2021/9544 ,  G01N2021/9546 ,  G01N2021/9548 ,  G01N2201/06113 ,  G01N2201/104 ,  G01N2201/1045 ,  G01S7/4815 ,  G01S7/4817 ,  G01S7/4818 ,  G01S17/88 ,  G01S17/89

    Abstract: A system includes a vessel floating on a body of water. The system also includes at least one conduit extending from the vessel to below the body of water. The system also includes a scanning device disposed within the at least one conduit. The scanning device includes at least one two-dimensional (2D) line scanner and a rotary encoder coupled to the at least one 2D line scanner. The scanning device is configured to generate three-dimensional (3D) image data of a surface of the at least one conduit or at least one component disposed within the at least one conduit.

    Abstract translation: 系统包括浮在水体上的船只。 该系统还包括从容器延伸到水体下方的至少一个导管。 该系统还包括设置在至少一个导管内的扫描装置。 扫描装置包括至少一个二维（2D）线扫描器和耦合到至少一个2D线扫描器的旋转编码器。 扫描装置被配置为生成至少一个管道的表面或设置在至少一个管道内的至少一个部件的表面的三维（3D）图像数据。

    SCANNING ILLUMINATING DEVICE, IMAGING DEVICE COMPRISING SAME AND METHOD OF IMPLEMENTATION
    37.
    发明申请
    SCANNING ILLUMINATING DEVICE, IMAGING DEVICE COMPRISING SAME AND METHOD OF IMPLEMENTATION 有权
    扫描照明装置，包含其的成像装置和实现方法

    公开(公告)号：US20150346120A1

    公开(公告)日：2015-12-03

    申请号：US14653001

    申请日：2013-12-18

    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

    Inventor： Rene VOGLER

    IPC: G01N23/203 ,  H04N5/33 ,  G01N21/47 ,  G21K1/02 ,  G01N21/59 ,  H04N5/32 ,  G01N23/04

    CPC classification number: G01N23/203 ,  G01N21/47 ,  G01N21/59 ,  G01N23/04 ,  G01N2201/104 ,  G01N2223/314 ,  G01N2223/3301 ,  G01N2223/335 ,  G21K1/02 ,  G21K1/043 ,  H04N5/32 ,  H04N5/33

    Abstract: A scanning illuminating device includes an emission centre from which radiation is emitted in an illuminating sector. A cylindrical ring is centred on the source and is rotatably movable about a first axis. The ring includes a plurality of slits regularly distributed about its axis of rotation and having the same angular amplitude α. A cylinder portion is centred on the source and is rotatably movable about a second axis crossing the first axis at the centre and forming a nonzero angle therewith. The cylinder portion includes a slit having an angular amplitude β. A first device control of the rotation of the ring, defining an elementary angular step αα such that an integer N1 other than 1 meets the condition α=N1.αα. A second device controls the rotation of the ring portion defining an angular step ββ such that an integer N2 other than 1 meets the condition β=N2.ββ.

    Abstract translation: 扫描照明装置包括在照明扇区中从其发射辐射的发射中心。 圆柱形环在源体上居中并且可围绕第一轴线可旋转地移动。 环包括围绕其旋转轴规则分布并且具有相同角度振幅α的多个狭缝。 圆筒部分以源为中心，并且可围绕中心与第一轴线交叉的第二轴线可旋转地移动，并与其形成非零的角度。 圆筒部分包括具有角度振幅＆amp; bgr的狭缝。 环的旋转的第一设备控制，定义基本角度步长αα使得除了1以外的整数N1满足条件α=N1.αα。 第二装置控制环形部分的旋转，该环部分限定角度步长＆bgr; 使得除1之外的整数N满足条件＆bgr; = N2。＆bgr;＆bgr;

    Multi-spot scanning system and method
    38.
    发明申请
    Multi-spot scanning system and method 有权
    多点扫描系统及方法

    公开(公告)号：US20090225399A1

    公开(公告)日：2009-09-10

    申请号：US12042252

    申请日：2008-03-04

    Applicant: Guoheng Zhao ,  Rex Runyon ,  Mehdi Vaez-Iravani

    Inventor： Guoheng Zhao ,  Rex Runyon ,  Mehdi Vaez-Iravani

    IPC: G02B26/08 ,  G01N21/00

    CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2201/10 ,  G01N2201/104 ,  G02B26/123 ,  Y10S359/90

    Abstract: A multi-spot scanning technique using a spot array having a predetermined gap between spots can advantageously provide scalability to a large number of spots as well as the elimination of cross-talk between channels. The multi-spot scanning technique can select a number of spots for the spot array (1D or 2D), determine a separation between the spots to minimize crosstalk, and perform a scan on a wafer using the spot array and a full field of view (FOV). Performing the scan includes performing a plurality of scan line cycles, wherein each scan line cycle can fill in gaps left by previous scan line cycles. This “delay and fill” scan allows large spacing between spots, thereby eliminating cross-talk at the detector plane. In one embodiment, the scan is begun and ended outside a desired scan area on the wafer to ensure full scan coverage.

    Abstract translation: 使用具有点之间的预定间隙的点阵列的多点扫描技术可以有利地提供大量斑点的可扩展性以及消除通道之间的串扰。 多点扫描技术可以选择点阵列（1D或2D）的多个斑点，确定斑点之间的间隔以最小化串扰，并使用斑点阵列和全视场对晶片进行扫描（ FOV）。 执行扫描包括执行多个扫描线周期，其中每个扫描线周期可以填充先前扫描线周期留下的间隙。 这种“延迟和填充”扫描允许斑点之间的大间距，从而消除检测器平面处的串扰。 在一个实施例中，扫描开始并在晶片上期望的扫描区域外部结束以确保全扫描覆盖。

    Optical scanner for measuring sheet properties
    39.
    发明授权
    Optical scanner for measuring sheet properties 有权
    用于测量纸张性能的光学扫描仪

    公开(公告)号：US07528958B2

    公开(公告)日：2009-05-05

    申请号：US11323715

    申请日：2005-12-30

    Applicant: Michael K Y Hughes ,  Sebastien Tixier

    Inventor： Michael K Y Hughes ,  Sebastien Tixier

    IPC: G01B9/02

    CPC classification number: G01J3/02 ,  G01J3/021 ,  G01N21/86 ,  G01N21/8901 ,  G01N33/34 ,  G01N2021/3595 ,  G01N2021/8917 ,  G01N2201/104

    Abstract: An optical scanner for use in conjunction with an infrared spectrometer is disclosed. The optical scanner translates a beam of radiation to a stationary spot on a traveling sheet of material so that ample integration time within the spectrometer is achieved. The beam path impinges on the traveling web and the radiation is reflected off the traveling web back through the optical scanner and recombined at an interferometer. The beam of radiation is kept stationary with respect to both the traveling sheet and the carriage which houses the spectrometer.

    Abstract translation: 公开了一种与红外光谱仪一起使用的光学扫描仪。 光学扫描器将辐射束转换成行进的材料片上的固定点，从而实现光谱仪内的充足的积分时间。 光束路径撞击行进网，并且辐射通过光学扫描器反射回行进网，并在干涉仪上重新组合。 辐射束相对于移动片和容纳光谱仪的托架保持静止。

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