公开(公告)号：US07649627B2

公开(公告)日：2010-01-19

申请号：US11703643

申请日：2007-02-08

Applicant: Toshikazu Yamamoto

Inventor： Toshikazu Yamamoto

IPC: G01J3/26

CPC classification number: G01J3/1804 ,  G01J3/02 ,  G01J3/0297 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J2003/2873 ,  G01N21/274

Abstract: In a wavelength calibration method, an observed spectrum of a light that has a wavelength band is obtained, wherein the light has at least an attenuated wavelength component that corresponds to at least a predetermined absorption wavelength that is included in the wavelength band. A corrected spectrum is then obtained from the observed spectrum, wherein the corrected spectrum has reduced dependencies upon the full width at half maximum of an emission band of the light and upon an intensity ripple period of the light.

Abstract translation: 在波长校准方法中，获得具有波长带的光的观察光谱，其中光至少具有对应于包括在波长带中的至少预定吸收波长的衰减波长分量。 然后从观察到的光谱获得校正的光谱，其中校正光谱对光的发射带的半峰全宽和光强度波动周期的依赖性降低。

公开(公告)号：US20090216504A1

公开(公告)日：2009-08-27

申请号：US12094466

申请日：2006-11-27

Applicant: Ryan J. Priore ,  Robert P. Freese ,  Michael L. Myrick ,  John C. Blackburn

Inventor： Ryan J. Priore ,  Robert P. Freese ,  Michael L. Myrick ,  John C. Blackburn

IPC: G01J3/06 ,  G06F15/00

CPC classification number: G01J3/28 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01N21/274 ,  G01N21/31 ,  G06F17/18 ,  G06F17/50 ,  G06F17/5009 ,  G06F17/5086

Abstract: Methods of selecting spectral elements and system components for a multivariate optical analysis system include providing spectral calibration data for a sample of interest; identifying a plurality of combinations of system components; modeling performance of a pilot system with one of the combinations of system components; determining optimal characteristics of the pilot system; and selecting optimal system components from among the combinations of system components.

Abstract translation: 为多变量光学分析系统选择光谱元素和系统组件的方法包括为感兴趣的样本提供光谱校准数据; 识别系统组件的多个组合; 具有系统组件组合之一的导频系统的建模性能; 确定导频系统的最优特性; 并从系统组件的组合中选择最佳系统组件。

公开(公告)号：US20090073433A1

公开(公告)日：2009-03-19

申请号：US12094469

申请日：2006-11-27

Applicant: Michael L. Myrick ,  Robert P. Freese ,  John C. Blackburn ,  Ryan J. Priore

Inventor： Michael L. Myrick ,  Robert P. Freese ,  John C. Blackburn ,  Ryan J. Priore

IPC: G01J3/36

CPC classification number: G01J3/08 ,  A61K8/046 ,  A61K8/25 ,  A61K8/26 ,  A61K8/44 ,  A61Q11/00 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0291 ,  G01J3/28 ,  G01N21/274 ,  G01N21/31

Abstract: A method of arranging and utilizing a multivariate optical computing and analysis system includes transmitting a o first light from a light source; generating a second light by reflecting the first light from the sample; directing a portion of the second light with a beamsplitter; and arranging an optical filter mechanism in a normal incidence orientation to receive the portion of the second light, the optical filter mechanism being configured to optically filter data carried by the portion of the second light.

Abstract translation: 一种布置和利用多变量光学计算和分析系统的方法包括从光源发射第一光; 通过反射来自样品的第一光产生第二光; 用分束器引导第二光的一部分; 以及将法兰入射方向的滤光器机构布置成接收第二光的一部分，所述光学滤光器机构被配置为光学地过滤由所述第二光的一部分携带的数据。

公开(公告)号：US07446876B2

公开(公告)日：2008-11-04

申请号：US11517894

申请日：2006-09-08

Applicant: Dale A. Harrison

Inventor： Dale A. Harrison

IPC: G01N21/55

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。

公开(公告)号：US20080246951A1

公开(公告)日：2008-10-09

申请号：US12080947

申请日：2008-04-07

Applicant: Phillip Walsh ,  Dale A. Harrison

Inventor： Phillip Walsh ,  Dale A. Harrison

IPC: G01J3/00

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/274 ,  G01N21/4788

Abstract: A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r−θ stage to further reduce the footprint.

Abstract translation: 公开了一种用于使用下面的深紫外（DUV）波长反射测量法来测量半导体工件上衍射和/或散射结构的性质的方法和装置。 该系统可以使用任何入射配置的偏振光，但是本文公开的一种技术有利地使用正常入射配置中的非偏振光。 因此，该系统使用下面的深紫外（DUV）辐射提供增强的光学测量能力，同时保持容易集成到其它工艺工具中的小型光学模块。 进一步的细化使用r-θ级来进一步减少占地面积。

公开(公告)号：US07427760B2

公开(公告)日：2008-09-23

申请号：US11606084

申请日：2006-11-30

Applicant: Damien Weidmann

Inventor： Damien Weidmann

IPC: G01J5/62

CPC classification number: G01J3/42 ,  G01J3/02 ,  G01J3/0286 ,  G01J3/08 ,  G01N21/276 ,  G01N21/3504 ,  G01N21/39 ,  G01N2021/399

Abstract: Method and apparatus for detecting, by absorption spectroscopy, an isotopic ratio of a sample, by passing first and second laser beams of different frequencies through the sample. Two IR absorption cells are used, a first containing a reference gas of known isotopic ratio and the second containing a sample of unknown isotopic ratio. An interlacer or reflective chopper may be used so that as the laser frequencies are scanned the absorption of the sample cell and the reference cell are detected alternately. This ensures that the apparatus is continuously calibrated and rejects the baseline noise when phase sensitive detection is used.

Abstract translation: 通过吸收光谱法，通过使不同频率的第一和第二激光束通过样品来检测样品的同位素比的方法和装置。 使用两个IR吸收单元，首先含有已知同位素比的参考气体，第二个包含未知同位素比例的样品。 可以使用隔行扫描器或反射式斩波器，使得当扫描激光频率时，交替检测样品池和参考池的吸收。 这确保了当使用相敏检测时，该设备被连续地校准并且拒绝基线噪声。

公开(公告)号：US20080073560A1

公开(公告)日：2008-03-27

申请号：US11600414

申请日：2006-11-16

Applicant: Dale A. Harrison ,  Matthew Weldon

Inventor： Dale A. Harrison ,  Matthew Weldon

IPC: G01N21/01

CPC classification number: G01N21/33 ,  G01J3/02 ,  G01J3/0232 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/42 ,  G01N21/94

Abstract: A technique is provided for generating and subsequently monitoring the controlled environment(s) within an optical metrology instrument in such a manner as to minimize absorbing species within the light path of the metrology instrument and to minimize the build-up of contaminants on the surfaces of optical elements that may result in performance degradation. Both evacuation and backfill techniques may be utilized together along with a monitoring technique to determine if the environmental is suitable for measurements or if the environment should be regenerated. The optical metrology instrument may be an instrument which operates at wavelengths that include vacuum ultra-violet (VUV) wavelengths.

Abstract translation: 提供了一种技术，用于产生和随后监测光学测量仪器内的受控环境，使得最小化测量仪器的光路内的吸收物质的最小化，并使污染物在表面上的积聚最小化 可能导致性能下降的光学元件。 撤离和回填技术都可以与监测技术一起使用，以确定环境是否适合于测量或者是否应该再生环境。 光学测量仪器可以是在包括真空紫外（VUV）波长的波长下操作的仪器。

公开(公告)号：US20070229821A1

公开(公告)日：2007-10-04

申请号：US11696005

申请日：2007-04-03

Applicant: Sean Christian ,  Jess Ford ,  Mike Ponstingl ,  Sven Kruger ,  Margaret Waid ,  Bryan Kasperski ,  Enrique Prati

Inventor： Sean Christian ,  Jess Ford ,  Mike Ponstingl ,  Sven Kruger ,  Margaret Waid ,  Bryan Kasperski ,  Enrique Prati

IPC: G01J3/28

CPC classification number: G01J3/08 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0297 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/1282 ,  G01J2003/1286 ,  G01N21/274

Abstract: A spectroscope designed to utilize an adaptive optical element such as a micro mirror array (MMA) and two distinct light channels and detectors. The devices can provide for real-time and near real-time scaling and normalization of signals.

Abstract translation: 设计用于利用诸如微镜阵列（MMA）和两个不同的光通道和检测器的自适应光学元件的分光镜。 这些设备可以提供信号的实时和近乎实时的缩放和归一化。

公开(公告)号：US20060268268A1

公开(公告)日：2006-11-30

申请号：US11139983

申请日：2005-05-31

Applicant: Kazumi Yokota

Inventor： Kazumi Yokota

IPC: G01J3/42

CPC classification number: G01J3/28 ,  G01J3/0235 ,  G01J3/0254 ,  G01J3/08 ,  G01J3/36

Abstract: A detecting device for a spectrophotometer is provided which is capable of exhibiting a sufficient sensitivity and with an adequate linearity over the ultraviolet light, visible light and near-infrared light ranges. The spectrophotometer detecting device includes detectors of a photomultiplier-tube detector, an InGaAs detector and a PbS detector, and a switching device for switching among these detectors. Alternatively, the spectrophotometer may include a single integrating sphere including these three types of detectors placed thereon. The spectrophotometer may further include output conversion means for correcting the output linearity difference among these detectors.

Abstract translation: 提供了一种用于分光光度计的检测装置，其能够在紫外光，可见光和近红外光范围内表现出足够的灵敏度和足够的线性度。 分光光度计检测装置包括光电倍增管检测器，InGaAs检测器和PbS检测器的检测器，以及用于在这些检测器之间切换的开关装置。 或者，分光光度计可以包括包括放置在其上的这三种类型的检测器的单个积分球。 分光光度计还可以包括用于校正这些检测器之间的输出线性差的输出转换装置。

公开(公告)号：US07126131B2

公开(公告)日：2006-10-24

申请号：US10909126

申请日：2004-07-30

Applicant: Dale A. Harrison

Inventor： Dale A. Harrison

IPC: G01N21/33

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.