Method of making synthetic diamond film with reduced bowing
    42.
    发明公开
    Method of making synthetic diamond film with reduced bowing 失效
    维尔法赫尔·赫斯特伦·艾伦·合成师Diamantschicht mit reduzierter Beugung

    公开(公告)号:EP0695816A1

    公开(公告)日:1996-02-07

    申请号:EP95201797.8

    申请日:1995-07-01

    Inventor: Meroth, John

    CPC classification number: C23C16/276 C23C16/01

    Abstract: The invention relates to a method of making synthetic diamond with reduced bowing. Bowing direction has been investigated. Depositing synthetic diamond with a plasma using a concave deposition surface results in a reduced or eliminated bowing, as compared to the use of a flat substrate. Various applications such as heat sink material.

    Abstract translation: 本发明涉及一种减少弓形的合成金刚石的方法。 弯道方向已被调查。 与使用平坦基底相比,使用凹形沉积表面沉积具有等离子体的合成金刚石与弓形结构相比导致减少或消除的弯曲。 各种应用如散热材料。

    Method and apparatus for cutting diamond
    46.
    发明公开
    Method and apparatus for cutting diamond 失效
    用于切割的钻石的方法和装置

    公开(公告)号:EP0799680A3

    公开(公告)日:1998-04-01

    申请号:EP97200862.7

    申请日:1997-03-21

    CPC classification number: B28D5/045

    Abstract: This invention relates to the field of cutting hard materials. More particularly, the invention describes a method and apparatus for cutting diamond. The method for cutting diamond according to the present invention, comprises the steps of providing a wire; heating said wire; and urging said wire and diamond together and moving said wire longitudinally. Preferably, the wire and/or diamond is heated to approach the metal-carbon eutectic temperature and create sensible reaction rates of the carbon on the wire surface. The wire can also carry a molten oxidant to enhance the cutting rate.

    Apparatus and method for making free standing diamond
    47.
    发明公开
    Apparatus and method for making free standing diamond 失效
    装置和方法用于制造自支撑金刚石

    公开(公告)号:EP0727507A3

    公开(公告)日:1997-02-26

    申请号:EP96200262.2

    申请日:1996-02-06

    CPC classification number: C23C16/01 C23C16/26 Y10S117/915

    Abstract: A mandrel for use in a diamond deposition process has surfaces with different diamond adhesion properties. According to one embodiment, a mandrel is provided and has first and second surfaces on which a diamond film is deposited, with the second surface forming a perimeter around the first surface. The first surface of the mandrel has a first diamond bonding strength which is less than a second diamond bonding strength of the second surface. In an embodiment for forming a cup-shaped diamond film, the mandrel is a titanium nitride (TiN) coated molybdenum (Mo) substrate having a stepped solid cylindrical shape with a central mesa having a side wall or flank. The side wall is etched near the top surface of the mesa to expose a molybdenum band and to form a second surface which bounds the TiN first surface. When the molybdenum band loses efficiency as a result of diamond particles remaining in the molybdenum band after a diamond deposition procedure, a second strip of the TiN coating adjacent to the first strip may be etched or machined to expose a second band of molybdenum. Other embodiments of the invention include machining the molybdenum band on the mesa top surface, machining a stepped molybdenum band, using a separate and detachable molybdenum foil or wire applied to grooves in the mandrel, and forming radial lines or patches on the surface of the mandrel.

    Apparatus and method for depositing a substance with temperature control
    48.
    发明公开
    Apparatus and method for depositing a substance with temperature control 失效
    Vorrichtung und Methode mit Temperaturreglung zum Abscheiden eines Werkstoffes

    公开(公告)号:EP0747505A2

    公开(公告)日:1996-12-11

    申请号:EP96201480.9

    申请日:1996-05-29

    CPC classification number: C23C16/463 C23C16/4586 C23C16/46 C23C16/52

    Abstract: A method and corresponding apparatus for depositing a substance with temperature control on a surface of a substrate are disclosed.
    The method comprises the steps of :

    providing a cooling block having a surface that is cooled by heat exchange ;
    supporting said substrate from said cooling block so that the bottom surface of said substrate is spaced from said cooling block surface by a gap ;
    providing a gas in said gap ; and
    depositing said substance on the top surface of said substrate.

    With such a method, the temperature conditions are uniform and repeatable when depositing a substance on a substrate.
    The invention is especially applicable to deposition of diamond by plasma jet.

    Abstract translation: 公开了一种用于在衬底的表面上沉积具有温度控制的物质的方法和相应的装置。 该方法包括以下步骤:提供具有通过热交换冷却的表面的冷却块; 从所述冷却块支撑所述衬底,使得所述衬底的底表面与所述冷却块表面间隔开间隙; 在所述间隙中提供气体; 并将所述物质沉积在所述基底的顶表面上。 通过这种方法,当将物质沉积在基底上时,温度条件是均匀的和可重复的。 本发明特别适用于通过等离子体射流沉积金刚石。

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