公开(公告)号：KR101085014B1

公开(公告)日：2011-11-21

申请号：KR1020090017175

申请日：2009-02-27

Applicant: 서강대학교산학협력단 ,  연세대학교 산학협력단

Inventor： 이승엽 ,  김경업 ,  김재현 ,  조규만 ,  박영규

IPC: G01B11/24 ,  G01B9/02 ,  G01B11/25

CPC classification number: G01B9/02068 ,  G01B9/02063 ,  G01B11/0608 ,  G01B11/2441

Abstract: 본 발명은 광학식 표면 측정 장치 및 방법에 관한 것으로서, 측정대상물의 표면에서 각 지점의 미세한 높이변화(단차)나 돌출, 요입, 표면손상, 표면거칠기 등의 표면 상태를 광학식으로 정확히 측정할 수 있는 장치 및 방법에 관한 것이다. 특히, 본 발명은 기존 간섭계의 2π-모호성과 포커스 에러 시그널의 한계를 극복하기 위해 간섭계의 신호 및 PSD(Position Sensitive Detector)의 포커스 에러 시그널을 함께 이용함으로써, 측정대상물의 미세한 표면 상태를 보다 정확히 측정할 수 있는 광학식 표면 측정 장치 및 방법에 관한 것이다.
간섭계, PSD, 포토다이오드, 비점수차, 포커스 에러 시그널, FES

公开(公告)号：KR1020110093348A

公开(公告)日：2011-08-18

申请号：KR1020100013336

申请日：2010-02-12

Applicant: 서강대학교산학협력단 ,  연세대학교 산학협력단

Inventor： 조규만 ,  박영규 ,  이승엽 ,  김경업 ,  김성진

IPC: G01B9/02 ,  G01B11/30 ,  G01N21/88

Abstract: PURPOSE: An optical complex diagnosis measuring system and method are provided to reduce measuring time and processes by obtaining real-time data for correction during measurement and correcting the signal of an interferometer. CONSTITUTION: An optical complex diagnosis measuring system comprises an electric stage(10), an interferometer(20), an objective lens(30), an optical system(40), an auto-focusing device, and a main controller(60). The electric stage, in which a measurement object is placed, transfers the measurement object in the direction vertical to a laser beam. The interferometer irradiates the laser beam to the surface of the measurement object, receives the light reflected of the measurement object, and outputs an interference signal based on the surface state and optical characteristics of the measurement object. The objective lens focuses the laser beam irradiated by the interferometer to the surface of the measurement object. The optical system guides the laser beam from the interferometer to the objective lens and the reflected light to the interferometer and the auto-focusing device. The auto-focusing device detects the reflected light guide by the optical system and implement auto-focusing to match the focus of the laser beam to the surface of the measurement object. The main controller obtains information on the surface state and optical characteristics of the measurement object.

Abstract translation: 目的：提供一种光学复合诊断测量系统和方法，通过获得测量中的校正实时数据和校正干涉仪的信号来减少测量时间和过程。 构成：光复合诊断测量系统包括电级（10），干涉仪（20），物镜（30），光学系统（40），自动对焦装置和主控制器（60）。 放置测量对象的电气平台沿垂直于激光束的方向传送测量对象。 干涉仪将激光束照射到测量对象的表面，接收测量对象反射的光，并根据测量对象的表面状态和光学特性输出干涉信号。 物镜将由干涉仪照射的激光束聚焦到测量对象的表面上。 光学系统将来自干涉仪的激光束引导到物镜，并将反射光引导到干涉仪和自动聚焦装置。 自动聚焦装置通过光学系统检测反射光导，并实现自动聚焦，使激光束的焦点与测量对象的表面相匹配。 主控制器获取关于测量对象的表面状态和光学特性的信息。

公开(公告)号：KR1020100098152A

公开(公告)日：2010-09-06

申请号：KR1020090017175

申请日：2009-02-27

Applicant: 서강대학교산학협력단 ,  연세대학교 산학협력단

Inventor： 이승엽 ,  김경업 ,  김재현 ,  조규만 ,  박영규

IPC: G01B11/24 ,  G01B9/02 ,  G01B11/25

CPC classification number: G01B9/02068 ,  G01B9/02063 ,  G01B11/0608 ,  G01B11/2441

Abstract: PURPOSE: Optical surface measuring apparatus and method are provided to accurately measure the detailed surface state of a target using a signal of an interferometer and a focus error signal of a PSD(Position Sensitive Detector). CONSTITUTION: An optical surface measuring apparatus comprises an interferometer(13), an object lens(3), a vibration stage(2), a beam splitter(4), a collimator lens(5), an astigmatic lens(6), a FE (Focus Error) signal output part, and a controller(12). The interferometer radiates the laser light onto the surface of a traget(1), receives the laser light reflected from the surface and outputs the interferential signal depending on the distance between the interferometer and the surface. The object lens transmits the laser light and forms the focus on the measuring point of the surface of the target. The vibration stage adjusts the location of the target. The beam splitter separates the laser light reflected from the target surface. The collimator lens condenses the separated laser light. The astigmatic lens transmits the condensed laser light to generate the astigmatic characteristic. The FE signal output part outputs the FE signal depending on the distance from the target surface. The controller computes the distance variation based on the interferential signal output from the interferometer and the FE signal output from the FE signal output part and obtains the surface state information from the distance variation.

Abstract translation: 目的：提供光学表面测量装置和方法，以使用干涉仪的信号和PSD（位置敏感检测器）的聚焦误差信号来精确测量目标的详细表面状态。 构成：光学表面测量装置包括干涉仪（13），物镜（3），振动台（2），分束器（4），准直透镜（5），像散透镜（6）， FE（聚焦误差）信号输出部分和控制器（12）。 干涉仪将激光照射到耳机（1）的表面上，接收从表面反射的激光，并根据干涉仪与表面之间的距离输出干涉信号。 物镜透射激光并将焦点形成在目标表面的测量点上。 振动台调整目标的位置。 分束器分离从目标表面反射的激光。 准直透镜会将分离的激光冷凝。 散光透镜透射冷凝的激光以产生像散特征。 FE信号输出部根据与目标表面的距离输出FE信号。 控制器根据干涉仪输出的干扰信号和从FE信号输出部分输出的FE信号计算距离变化，并从距离变化中获取表面状态信息。