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公开(公告)号：KR100405095B1
公开(公告)日：2003-11-10
申请号：KR1020010009951
申请日：2001-02-27
IPC: B01J13/04
Abstract: PURPOSE: A manufacturing method of unagglomerated fine particle using electro-hydrodynamic spray in flame or furnace is provided, by which spherical fine particle can be obtained. CONSTITUTION: The method comprises the following steps of supplying a liquid(42) for forming particle into flame or furnace through a nozzle(41) that is equipped with a means for causing electric potential difference; producing unipolar precursor particulate(43) in the flame or furnace; and conduct reaction to form particle from the unipolar particle precursor in an atmosphere where impact or coagulation of unipolar particle precursor is inhibited by electrical repulsive force.
Abstract translation: 目的：提供一种在火焰或炉中使用电流体动力喷雾的未团聚细粒的制造方法，通过该方法可以获得球形细粒。 构成：该方法包括以下步骤：通过喷嘴（41）将用于形成颗粒的液体（42）供应到火焰或熔炉中，所述喷嘴配备有用于产生电势差的装置; 在火焰或炉中产生单极前体颗粒（43）; 并且在单电子粒子前体的冲击或凝结被电排斥力抑制的气氛中进行反应以从单极粒子前体形成粒子。
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公开(公告)号：KR100312855B1
公开(公告)日：2001-11-05
申请号：KR1019990046615
申请日：1999-10-26
IPC: B03C3/16
Abstract: 본발명은초미세입자를이용한분진포집장치및 그방법을개시한다. 본발명에따른분진포집장치는분사챔버를구비하며, 전기장의형성에의하여소정극성의고하전을갖는초미세입자를발생시키는전기수력학적분사수단과; 상기고하전을갖는초미세입자가발생되는상기분사챔버의내부로분진을주입하는분진발생수단과; 상기분사챔버에연통하고있으며, 상기고하전을갖는초미세입자가상기분진에부착되는믹싱챔버와; 상기믹싱챔버의하류에위치하며, 상기고하전을갖는초미세입자가부착된분진을제거하기위하여상기초미세입자의극성과반대극성의전기장을형성시키는전기집진수단으로이루어져있다.
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公开(公告)号：KR1020010038576A
公开(公告)日：2001-05-15
申请号：KR1019990046615
申请日：1999-10-26
IPC: B03C3/16
CPC classification number: B03C3/16 , B05B5/0255
Abstract: PURPOSE: A dust collector is provided, which uses ultrafine particles to collect and eliminate the dusts of ultrafine particles so that it doesn't generate ozone and reduces cost remarkably. CONSTITUTION: The dust collector comprises the parts of: an electrospraying tool wherein a spraying chamber is placed to form electric field for generating ultrafine particle with high electric charge; a dust generation tool(20) which injects dust toward the spraying chamber; a mixing chamber(30) which is connected to the spraying chamber and attaches the ultrafine particle to the dusts; and an eletrostatic precipitator(40) which forms the opposite polar of electric field against the polar of the ultrafine particles to eliminate dusts to which ultrafine particle is attached.
Abstract translation: 目的：提供集尘器，使用超细颗粒收集和消除超细颗粒的灰尘，使其不产生臭氧并显着降低成本。 构成：集尘器包括以下部分：电喷雾工具，其中放置喷雾室以形成用于产生具有高电荷的超细颗粒的电场; 向喷雾室喷射灰尘的尘埃产生工具（20）; 混合室（30），其连接到喷雾室并将超细颗粒附着到灰尘; 和静电除尘器（40），其与极细颗粒的极性形成相对的电场极性，以除去附着有超细颗粒的灰尘。
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公开(公告)号：KR101013191B1
公开(公告)日：2011-02-10
申请号：KR1020090004655
申请日：2009-01-20
CPC classification number: G01N15/065
Abstract: 본 발명은, 하우징; 상기 하우징에 배치되고 고압 DI 워터 라인과 유체 소통을 이루고, 고압 DI워터 라인으로부터 분기되고 입자를 포함하는 DI 워터를 분무화시키는 아토마이저 유니트와, 상기 하우징의 내부로 상기 아토마이저 유니트의 하류에 배치되고 상기 입자를 포화 작동 유체로 포화시키는 포화기와, 상기 포화기에서 포화 작동 유체로 포화된 입자를 응축시키는 응축기와, 상기 응축된 포화 입자를 계수하는 응축 광학 계수기를 구비하는 응축 입자 검출부를 구비하는 입자 측정 유니트를 제공한다.
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公开(公告)号：KR1020100116294A
公开(公告)日：2010-11-01
申请号：KR1020090034930
申请日：2009-04-22
CPC classification number: H05F3/06 , B01J19/125 , G21K5/02
Abstract: PURPOSE: An apparatus for charging a unipolar particle using soft x-ray is provided to help a user to simply a unipolar charged particle by applying a similar polarity to a target particle to a collecting pin. CONSTITUTION: The chamber(112) of a housing(110) forms the passage of aerosol including particles. An inlet tube(114) is formed on one side of the outer surface of the housing to guide particles inside a chamber. An exhaust pipe(116) is formed on the other side of the outer surface of the hosing to discharge particles from the chamber. A soft x-ray projection unit generates a positive ion and a negative ion through projecting the soft X-ray inside chamber. The collection unit generates a unipolar charged particles by collecting an opposite polarity to a target. A power supply unit applies power to having similar polarity to the target.
Abstract translation: 目的：提供使用软x射线对单极粒子进行充电的装置，以通过向收集销施加与目标颗粒相似的极性来简化单极带电粒子。 构成：壳体（110）的室（112）形成包括颗粒的气溶胶的通道。 入口管（114）形成在外壳的外表面的一侧上以引导腔内的颗粒。 排气管（116）形成在弹簧的外表面的另一侧上以从腔室排出颗粒。 软X射线投影单元通过在室内投射软X射线产生正离子和负离子。 收集单元通过收集与目标相反的极性来产生单极带电粒子。 电源单元对目标进行与极性相似的电源。
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Patent Agency Ranking
公开(公告)号：KR1020090061911A
公开(公告)日：2009-06-17
申请号：KR1020070128917
申请日：2007-12-12
IPC: H01L21/205 , H01L21/02
CPC classification number: C23C16/4481
Abstract: An electrospray vaporizer is provided to improve the productivity of the vapor molecule and prevent an orifice from being clogged. The electrospray vaporizer comprises a housing(10), a reaction liquid feeding means(20), a spreading means, a conducting measure, a power supply unit(60), a potentiometer(70), a heating means(50), a carrier gas supply means(90) and a controller. The housing has a flow path(12) and an exit(14). The reaction liquid feeding means supplies the reaction liquid to the outer side of the housing. The spreading means combines with the reaction liquid feeding means and ejects the reaction liquid to the flow path of the housing. The conducting measure generates the static electricity in the reaction liquid. The power supply unit supplies power to one selected between the spreading means and conducting means. The potentiometer measures the inducing current. The heating means applies the heat energy to the reaction liquid. The carrier gas supply means supplies the carrier gas in order to transport the droplet spray(S) and vapor molecule(P2) of the reaction liquid. The controller controls the above mentioned means.
Abstract translation: 提供电喷雾蒸发器以提高蒸汽分子的生产率并防止孔被堵塞。 电喷雾蒸发器包括壳体（10），反应液供给装置（20），扩散装置，导电措施，电源单元（60），电位计（70），加热装置（50） 气体供给装置（90）和控制器。 壳体具有流路（12）和出口（14）。 反应液供给装置将反应液供给到壳体的外侧。 扩散装置与反应液供给装置结合并将反应液喷射到壳体的流路。 导电措施会在反应液中产生静电。 电源单元向扩展装置和导电装置之间选择的一个供电。 电位器测量感应电流。 加热装置将热能施加到反应液。 载气供给装置供给载气，以便输送反应液体的液滴喷雾（S）和蒸汽分子（P2）。 控制器控制上述方法。
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公开(公告)号：KR1020080072494A
公开(公告)日：2008-08-06
申请号：KR1020070067422
申请日：2007-07-05
Applicant: 안강호
Inventor： 안강호
CPC classification number: G01N15/065
Abstract: A condensation particle counter is provided to use water as operating fluid and gauging fine particles through an optical way by coating the inner surface of a condenser tube with hydrophilic material. A condensation particle counter comprises a saturator(10), a plurality of condensers(20), and a plurality of optical particle counters. The saturator saturates air including fine particles with operating fluid, and generates saturated air. The condensers connect with the downstream of the saturator, and condense the saturated air to create liquid drops by using the fine particles in the air as a core. The optical particle counters connect with the downstream of the condenser and detects liquid drop fed by the condenser.
Abstract translation: 提供冷凝颗粒计数器以使用水作为工作流体，并通过用亲水材料涂覆冷凝管的内表面通过光学方法测量细颗粒。 凝结粒子计数器包括饱和器（10），多个冷凝器（20）和多个光学粒子计数器。 饱和器饱和包含细颗粒的空气与工作液体，产生饱和空气。 冷凝器与饱和器的下游连接，通过以空气中的微粒为核心，使饱和空气冷凝，形成液滴。 光学粒子计数器与冷凝器的下游连接，并检测由冷凝器供给的液滴。
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公开(公告)号：KR100834037B1
公开(公告)日：2008-05-30
申请号：KR1020070042396
申请日：2007-05-01
Abstract: A particle measuring apparatus is provided to reduce a production cost by being simply constructed and to improve productivity by being applied to semiconductor, TFT-LCD, and PDP processes. A particle measuring apparatus includes a duct(10), an insulation tube(30), first and second electrodes(40,50), a power supply(60), a current meter(70), and a computer(80). The duct is formed to connect a channel of gas including ions and particles having charges to a pipeline(6). The duct has an inlet(12) and an outlet(14). The first and second electrodes are alternately mounted inside of the insulation tube in a circumferential direction. The power supply is connected to the first electrode to apply voltage to form electric field between the first and second electrodes. The power supply attaches the ions and the particles having a polarity to the inside of the duct and the inside of the second electrode. The current meter is connected to the second electrode to measure the current of the second electrode. The computer calculates the concentration of the particles by processing the current from the current meter using a program.
Abstract translation: 提供一种粒子测量装置，通过简单构造来降低生产成本，并通过应用于半导体，TFT-LCD和PDP工艺来提高生产率。 粒子测量装置包括管道（10），绝缘管（30），第一和第二电极（40,50），电源（60），电流计（70）和计算机（80）。 导管形成为将包括离子的气体和具有电荷的颗粒的通道连接到管道（6）。 管道具有入口（12）和出口（14）。 第一电极和第二电极沿圆周方向交替地安装在绝缘管的内部。 电源连接到第一电极以施加电压以在第一和第二电极之间形成电场。 电源将具有极性的离子和颗粒附着到管道的内部和第二电极的内部。 电流表连接到第二电极以测量第二电极的电流。 计算机通过使用程序处理来自电流表的电流来计算颗粒的浓度。
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公开(公告)号：KR1020060022302A
公开(公告)日：2006-03-09
申请号：KR1020060016058
申请日：2006-02-20
Inventor： 안강호
Abstract: 본 발명은 클린룸등의 청정공간내의 저농도의 입자들의 개수와 크기별 분포등을 신속하고 용이하게 측정할 수 있는 입자측정기 및 입자측정방법을 개시한다. 본 발명에 따른 입자측정기 및 입자측정방법은 가이드덕트와 이 가이드덕트 내에 전극을 각각 구비하는 다수의 입자분리장치를 준비하고, 측정하고자 하는 입자들을 단극성으로 하전시킨다. 하전된 입자들과 청정공기를 가이드덕트의 내부로 유입시키며, 전극들에 상호 다른 전압을 인가한다. 입자분리장치들에 의해 분리된 하전입자들의 개수를 측정하고, 측정된 결과로부터 크기별 입자분포를 계산한다. 본 발명에 따른 입자측정기는 1회의 측정으로 공기 중의 입자들의 크기분포를 구할 수 있으며, 공기 중에 포함된 입자의 개수가 적더라도, 그 분포를 신속하고 용이하게 구할 수 있는 효과가 있다.
입자측정기, 입자측정방법-
公开(公告)号：KR1020050087619A
公开(公告)日：2005-08-31
申请号：KR1020040013535
申请日：2004-02-27
Applicant: 안강호
Inventor： 안강호
CPC classification number: B03C3/383 , B01D19/0052 , B03C3/12 , B03C3/49 , B03C2201/08
Abstract: The present invention discloses an apparatus and method for manufacturing ultra-fine particles using corona discharge capable of manufacturing the ultra-fine particles nanometers in size from a reaction gas using the corona discharge. In the apparatus for manufacturing ultra-fine particles of the present invention, a reaction gas feeder supplies a nozzle with reaction gas, and the reaction gas is injected. When a power supply applies a high voltage to the nozzle, the corona discharge occurs at the nozzle. Thus, the injected reaction gas is dissolved, and a large number of ultra-fine particles are produced. Then, a collection plate collects the ultra-fine particles. In addition, a duct encloses the nozzle, so that a passage is formed between the nozzle and duct. Sheath gas supplied to the passage of the duct forms a gas curtain between the nozzle and the collection plate, so that the gas curtain leads the flow of the ultra-fine particles. If other reaction gas is supplied to the passage of the duct and heat energy is supplied thereto, the other reaction gas reacts thermochemically, so that a large number of other ultra-fine particles are produced. The ultra-fine particles produced by the corona discharge are coated with the other ultra-fine particles. If the corona discharge is generated while the ultra-fine particles and the other reaction gas are injected by another nozzle positioned downstream of the nozzle, the ultrafine particles are coated with the other ultra-fine particles produced from the other reaction gas.
Abstract translation: 本发明公开了一种使用电晕放电制造超细颗粒的装置和方法，其能够使用电晕放电从使用反应气体制造尺寸的超细颗粒纳米。 在本发明的超细粒子的制造装置中，反应气体供给器向喷嘴供给反应气体，注入反应气体。 当电源对喷嘴施加高电压时，在喷嘴处发生电晕放电。 因此，注入的反应气体溶解，产生大量的超细粒子。 然后，收集板收集超细颗粒。 此外，管道封闭喷嘴，使得在喷嘴和管道之间形成通道。 供应到管道通道的护套气体在喷嘴和收集板之间形成气幕，使得气幕导致超细颗粒的流动。 如果向管道的通道供应其它反应气体并且向其供应热能，则其它反应气体热化学反应，从而产生大量其它超细颗粒。 由电晕放电产生的超细颗粒被其它超细颗粒涂覆。 如果通过位于喷嘴下游的另一个喷嘴喷射超细颗粒和其它反应气体，则产生电晕放电，则超细颗粒被其它反应气体产生的其它超细颗粒涂覆。
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