公开(公告)号：US5579583A

公开(公告)日：1996-12-03

申请号：US375243

申请日：1995-01-19

Applicant: Mehran Mehregany ,  Randal H. Rudderman ,  Robert L. Mullen

Inventor： Mehran Mehregany ,  Randal H. Rudderman ,  Robert L. Mullen

IPC: A61B18/14 ,  B26B9/00 ,  B26B3/00 ,  B25G3/00

CPC classification number: A61B17/3211 ,  A61B18/14 ,  B26B9/00 ,  A61B18/1402 ,  A61B2018/00119

Abstract: A micromachined blade suitable for medical applications has an edge which is free of the imperfections common in mechanically sharpened steel blades. A method of forming micromachined blades having the desired characteristics may be performed by etching with anisotropic or isotropic etchants. This micromachined blade may be formed of a single-crystalline substrate, such as a silicon wafer commonly used in integrated circuit technology. Thus, such a micromachined blade may also carry circuitry capable of assisting a surgeon in the performance of certain procedures.

Abstract translation: 适用于医疗应用的微加工刀片具有在机械磨削的钢刀片中不存在缺陷的边缘。 可以通过用各向异性或各向同性蚀刻剂进行蚀刻来形成具有所需特性的微加工刀片的方法。 该微加工刀片可以由单晶衬底形成，例如通常用于集成电路技术的硅晶片。 因此，这种微加工刀片还可以承载能够协助外科医生执行某些程序的电路。

公开(公告)号：US4942767A

公开(公告)日：1990-07-24

申请号：US360325

申请日：1989-06-02

Applicant: Joseph H. Haritonidis ,  Stephen D. Senturia ,  David J. Warkentin ,  Mehran Mehregany

Inventor： Joseph H. Haritonidis ,  Stephen D. Senturia ,  David J. Warkentin ,  Mehran Mehregany

IPC: H04R23/00

CPC classification number: H04R23/008

Abstract: A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a transmitted part which is subsequently reflected from the diaphragm, and a locally reflected part which interferes with the subsequently diaphragm reflected part. The interference of the two reflective parts forms an interference light pattern carried back through the fiber to a light detector. The interference pattern provides an indication of diaphragm deflection as a function of applied pressure across the exposed side of the diaphragm. A detection of magnitude and direction of diaphragm deflection is provided by use of a second fiber positioned across the gap from the diaphragm. The second fiber provides an interference pattern in the same manner as the first fiber but with a phase shift. An opening allowing communication between ambient and the gap enables use of the interferometer sensor as a shear stress measuring device.

Abstract translation: 微加工膜片位于与光纤端部的间隙上。 光纤和隔膜一体安装。 光纤的端部提供了一个局部参考平面，它将穿过光纤的光分成隔膜。 光被分割成随后从光阑反射的透射部分和与随后的光阑反射部分干涉的局部反射部分。 两个反射部件的干涉形成通过光纤带回光检测器的干涉光图案。 干涉图形提供了膜片偏转的指示，作为横跨隔膜的暴露侧的施加压力的函数。 通过使用位于隔膜间隙的第二纤维来提供膜片偏转的幅度和方向的检测。 第二光纤以与第一光纤相同的方式提供干涉图案，但是具有相移。 允许环境和间隙之间的通信的开口使得能够使用干涉仪传感器作为剪切应力测量装置。

公开(公告)号：US4926696A

公开(公告)日：1990-05-22

申请号：US932780

申请日：1986-11-19

Applicant: Joseph H. Haritonidis ,  Stephen D. Senturia ,  David J. Warkentin ,  Mehran Mehregany

Inventor： Joseph H. Haritonidis ,  Stephen D. Senturia ,  David J. Warkentin ,  Mehran Mehregany

IPC: H04R23/00

CPC classification number: G01L9/0079 ,  H04R23/008

Abstract: A thin diaphragm receives pressure across one side and faces a beam splitter on the other side. The beam splitter is integrally attached to the diaphragm and serves as a local optical reference plane for the entire assembly. Coherent light from a light source is partially reflected at the beam splitter. The remainder of the light is reflected from the diaphragm. The reflected beams recombine at a detection point and have a phase difference which is a function of the amount of deflection of the diaphragm. The detected recombined beams are indicative of the deflection of the diaphragm. Optical calibration of the aseembly is a function of the distance between the diaphragm and beam splitter which remains as predefined because the beam splitter is integral with the diaphragm. A vent in the small cavity formed between the diaphragm and beam splitter enables the diaphragm to sense small pressures with increased sensitivity. Through micro-fabrication techniques, the diaphragm is made sensitive to dynamic and static pressure. Detection of the thermal expansion of the assembly as well as deflection of the diaphragm enables a sensed pressure measurement as a differential between the detected thermal expansion and deflection.

Abstract translation: 薄隔膜承受一侧的压力，并面对另一侧的分束器。 分束器一体地附接到隔膜，并用作整个组件的局部光学参考平面。 来自光源的相干光部分地在分束器处反射。 剩余的光从隔膜反射。 反射光束在检测点复合，并具有作为光阑偏转量的函数的相位差。 检测到的重组光束表示膜片的偏转。 组件的光学校准是隔膜和分束器之间的距离的函数，其保持为预定义，因为分束器与隔膜成一体。 在隔膜和分束器之间形成的小空腔中的通风口使得隔膜能够以更高的灵敏度感测小压力。 通过微型制造技术，膜片对动态和静态压力敏感。 检测组件的热膨胀以及隔膜的偏转使得能够将检测到的压力测量作为检测到的热膨胀和挠曲之间的差。

公开(公告)号：US4864824A

公开(公告)日：1989-09-12

申请号：US265176

申请日：1988-10-31

Applicant: Kaigham J. Gabriel ,  Mehran Mehregany ,  James A. Walker

Inventor： Kaigham J. Gabriel ,  Mehran Mehregany ,  James A. Walker

IPC: F03G7/06 ,  G02B6/35 ,  H01H1/00 ,  H01H61/01

CPC classification number: G02B6/3576 ,  F03G7/065 ,  G02B6/3508 ,  G02B6/3552 ,  G02B6/358 ,  H01H1/0036 ,  H01H2061/006 ,  H01H2061/0122 ,  H01H61/0107

Abstract: An actuator including a device made of thin film shape memory material mounted to a substrate. The thin film device is deformed from its original shape. Thereafter, the device is heated to restore the device to its original shape. Motion of the device occurs in the deforming and restoring steps, which is used to produce some form of work result.

Abstract translation: 一种致动器，包括安装到基板上的由薄膜形状记忆材料制成的装置。 薄膜装置从原来的形状变形。 此后，将该装置加热以将装置恢复到其原始形状。 设备的运动发生在变形和恢复步骤中，用于产生某种形式的工作结果。