PHASE SENSITIVE BEAM TRACKING
    47.
    发明公开

    公开(公告)号:EP3641161A1

    公开(公告)日:2020-04-22

    申请号:EP19206539.9

    申请日:2017-04-27

    Abstract: A method includes receiving axis signals (520, 530, 540, 550) from a multi-axis position sensing detector (510), generating a reference signal (660) by summing the axis signals, determining a mirror position of a mirror (880) directing the optical beam based on the beam position error (780, 790) of each axis of the multi-axis position sensing detector, and actuating the mirror to move to the mirror position. Each axis signal is indicative of a beam position (122) of an optical beam incident on the multi-axis position sensing detector, each axis signal corresponding to an axis of the multi-axis position sensing detector. For each axis, the method includes converting a phase of an axis to have a 90 degree phase difference from a signal of the axis, generating an axis-phasor signal (640, 650) by summing the axis signals, and comparing the axis-phasor signal and the reference signal to determine a phase difference.

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