公开(公告)号：US5506175A

公开(公告)日：1996-04-09

申请号：US443331

申请日：1995-05-17

Applicant: Z. Lisa Zhang ,  Noel C. MacDonald

Inventor： Z. Lisa Zhang ,  Noel C. MacDonald

IPC: B81B1/00 ,  B81B3/00 ,  H02N1/00 ,  H01L21/465

CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B3/0062 ,  B81C1/0019 ,  B82Y15/00 ,  B81B2201/11 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2207/07

Abstract: A microelectromechanical compound stage microactuator assembly capable of motion along x, y, and z axes for positioning and scanning integrated electromechanical sensors and actuators is fabricated from submicron suspended single crystal silicon beams. The microactuator incorporates an interconnect system for mechanically supporting a central stage and for providing electrical connections to componants of the microactuator and to devices carried thereby. The microactuator is fabricated using a modified single crystal reactive etching and metallization process which incorporates an isolation process utilizing thermal oxidation of selected regions of the device to provide insulating segments which define conductive paths from external circuitry to the actuator components and to microelectronic devices such as gated field emitters carried by the actuator.

Abstract translation: 由亚微米悬浮单晶硅光束制造能够沿x，y和z轴运动的微机电复合级微致动器组件，用于定位和扫描集成的机电传感器和致动器。 该微型致动器包括用于机械地支撑中央级并用于提供与微型致动器的部件的电连接以及由此承载的装置的互连系统。 使用改进的单晶反应蚀刻和金属化工艺制造微致动器，其包括利用设备的选定区域的热氧化的隔离工艺，以提供绝缘段，其限定从外部电路到致动器部件的导电路径以及限定门控的微电子器件 由致动器承载的场致发射体。

公开(公告)号：US5489812A

公开(公告)日：1996-02-06

申请号：US233486

申请日：1994-04-26

Applicant: Tomotake Furuhata ,  Toshiki Hirano

Inventor： Tomotake Furuhata ,  Toshiki Hirano

IPC: B23Q1/34 ,  B81B3/00 ,  B81C1/00 ,  H01L41/09 ,  H02N2/00 ,  B23Q16/00

CPC classification number: B81B3/0054 ,  B23Q1/34 ,  B81C1/0019 ,  B81C1/00198 ,  H02N1/002 ,  H02N2/0025 ,  H02N2/026 ,  B81B2201/032 ,  B81B2201/11 ,  B81B2203/0315 ,  B81B2207/053 ,  B81C2203/032 ,  Y10T29/42

Abstract: A device for providing micro positioning having an operating range in the submicron order in the X and Y directions, respectively. Positioning is achieved by a device which includes a driving section bonded to a silicon wafer for applying a driving force to excite vertical motion, and a mechanism for converting this vertical motion into rotational motion. Three types of micro actuators are described herein: one, that uses vibration as its driving force; a second, that uses Coulomb's force; and a third, that utilizes fluid pressure, such as air.

Abstract translation: 一种用于提供微定位的装置，其分别在X和Y方向上具有亚微米级的工作范围。 定位是通过一种装置实现的，该装置包括结合到硅晶片的驱动部分，用于施加驱动力以激发垂直运动，以及用于将该垂直运动转换成旋转运动的机构。 这里描述了三种微型致动器：一种是使用振动作为其驱动力; 一秒钟，使用库仑的力量; 第三个，利用流体压力，如空气。

公开(公告)号：US5351412A

公开(公告)日：1994-10-04

申请号：US890455

申请日：1992-05-29

Applicant: Tomotake Furuhata ,  Toshiki Hirano

Inventor： Tomotake Furuhata ,  Toshiki Hirano

IPC: B23Q1/34 ,  B81B3/00 ,  B81C1/00 ,  H01L41/09 ,  B23Q16/00

CPC classification number: B81B3/0054 ,  B23Q1/34 ,  B81C1/0019 ,  B81C1/00198 ,  H02N1/002 ,  H02N2/0025 ,  H02N2/026 ,  B81B2201/032 ,  B81B2201/11 ,  B81B2203/0315 ,  B81B2207/053 ,  B81C2203/032 ,  Y10T29/42

Abstract: A device for providing micro positioning having an operating range in the submicron order in the X and Y directions, respectively. Positioning is achieved by depositing a pair of aluminum electrodes on a piezoelectric element bonded on a silicon wafer, vertically moving the piezoelectric element, arranging a plurality of micro actuators whose contact pin ends, formed on the aluminum electrodes, rotate on a surface as an array, and displacing in the horizontal direction a moving member arranged on the micro actuator array.

Abstract translation: 一种用于提供微定位的装置，其分别在X和Y方向上具有亚微米级的工作范围。 通过在键合在硅晶片上的压电元件上沉积一对铝电极，垂直移动压电元件来实现定位，将形成在铝电极上的接触针端部的多个微致动器布置成在阵列的表面上旋转 并且在水平方向上移动布置在微致动器阵列上的移动构件。