公开(公告)号：US07218389B2

公开(公告)日：2007-05-15

申请号：US10223422

申请日：2002-08-20

Applicant: Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunji Maeda

Inventor： Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunji Maeda

IPC: G02N21/88

CPC classification number: G01N21/956 ,  G01N21/94 ,  G01N2021/9513 ,  G01N2201/10 ,  G01N2201/1045

Abstract: A pattern defect inspection apparatus is capable of detecting defects, without being affected by non-uniform thickness of a thin film formed on a sample, even when using monochromatic light, such as a laser. The apparatus comprises a laser to illuminate a sample, coherence suppression optics to reduce laser beam coherence, a condenser to condense the laser beam onto a pupil plane of an objective lens, and a detector to detect the light reflected from a circuit pattern formed on a sample. The condenser is designed so that the intensity of light illuminating the sample under test can be partially adjusted according to the type of laser beam illumination condensed on the pupil of the objective lens. Variations in reflected light intensity caused by non-uniform film thickness on the surface of the sample are therefore reduced, and shading is minimized in the detected image to allow detecting of fine defects.

Abstract translation: 即使使用激光等单色光，图案缺陷检查装置也能够不受样品上形成的薄膜的不均匀的厚度的影响而检测缺陷。 该装置包括用于照亮样品的激光器，减少激光束相干性的相干抑制光学器件，将激光束冷凝到物镜的光瞳平面上的冷凝器，以及用于检测从形成在物镜上的电路图案反射的光的检测器 样品。 冷凝器被设计成使得照射待测试样品的光的强度可以根据在物镜的瞳孔上聚集的激光束照明的类型来部分地调节。 因此，在样品表面上由不均匀膜厚引起的反射光强度的变化因此减少，并且在检测图像中使阴影最小化以允许检测细小缺陷。

公开(公告)号：US07061601B2

公开(公告)日：2006-06-13

申请号：US10754275

申请日：2004-01-08

Applicant: Steven W. Meeks

Inventor： Steven W. Meeks

IPC: G01N21/00

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US20050230647A1

公开(公告)日：2005-10-20

申请号：US10516023

申请日：2003-05-30

Applicant: Yasuhiro Gotoh ,  Seiji Nishiwaki ,  Yoshiaki Komma

Inventor： Yasuhiro Gotoh ,  Seiji Nishiwaki ,  Yoshiaki Komma

IPC: G01N21/90 ,  G01N21/94 ,  G01N21/95 ,  G11B7/0037 ,  G11B19/04 ,  G01N21/88

CPC classification number: G11B7/00375 ,  G01N21/94 ,  G01N21/9506 ,  G01N2201/1045 ,  G11B19/04

Abstract: In an foreign body detection apparatus, an optical signal detection unit (1) irradiates a light spot onto a surface of an object to be inspected while scanning the surface by the light spot in a predetermined direction, and receives a reflected beam from the surface of the inspected object to generate a photodetection signal (HF) corresponding to the light intensity of the reflected beam. A foreign body detection unit (2a to 2h) generates a foreign body detection signal (C) appearing with respect to a leader and a trailer in the scanning direction of a foreign body adhering to the inspected object from the photodetection signal (HF). The foreign body detection signal is obtained for example as a difference signal between the photodetection signal (HF) and the delayed photodetection signal (HF) with a predetermined delay time. A foreign body discrimination unit (3) generates a foreign body discriminating signal (H) indicating a region in which the foreign body is present from the foreign body detection signal (C).

Abstract translation: 在异物检测装置中，光信号检测单元（1）在预定方向上通过光点扫描表面而将光斑照射到待检查对象的表面上，并且从表面接收反射光束 被检查对象以产生对应于反射光束的光强度的光电检测信号（HF）。 异物检测单元（2 a〜2 h）从光检测信号（HF）生成与检测对象物附近的异物的扫描方向上的引导部和拖车相对的异物检测信号（C） 。 异物检测信号例如作为光检测信号（HF）和延迟光检测信号（HF）之间的差信号以预定的延迟时间获得。 异物识别单元（3）从异物检测信号（C）生成表示异物存在的区域的异物识别信号（H）。

公开(公告)号：US5377002A

公开(公告)日：1994-12-27

申请号：US913592

申请日：1992-07-14

Applicant: Comas Malin ,  Edgar F. Steigmeier ,  Thomas Nesensohn ,  Harry L. Sawatzki ,  Heinrich Auderset ,  Gert Schmid

Inventor： Comas Malin ,  Edgar F. Steigmeier ,  Thomas Nesensohn ,  Harry L. Sawatzki ,  Heinrich Auderset ,  Gert Schmid

IPC: G01M11/02 ,  G01N21/89 ,  G01N21/93 ,  G01N21/95 ,  G01N21/00

CPC classification number: G01M11/0278 ,  G01N21/9501 ,  G01N2021/8822 ,  G01N2021/8867 ,  G01N2021/8907 ,  G01N21/93 ,  G01N21/9503 ,  G01N2201/1045

Abstract: This apparatus permits the non-destructive examination of entire surfaces for defects and contamination, and can detect microscopically small dot-shaped and linear defects and extremely fine macroscopic non-homogeneous areas. For this purpose, an adjustable lens system (5) is placed in the optical path between light source (2) and objective (9) which produces various intermediate images (31). A first cigar-shaped intermediate image is used for the first scan of the whole of the surface at a relatively large feed offset, and a second dot-shaped intermediate image is used for a second scan of partial areas of the surface at a small feed offset.A dark-field stop assembly (18) with an adjustable dark-field deflection system (8) is placed in the optical path between the lens system (5) and the objective (9), which projects the light beam (1) after deflection exactly centered at right angles through the objective (9) upon the surface of the object (10). The light reflected by the surface (10) and collected by the objective (9) is projected to a photo detector. An electronic analysis system (21) breaks down the amplified output signals from the photo detector (19) into measured values due to dot-shaped, linear, and planiform defects. The electronic analysis system (21) is connected via a computer unit (22) to peripheral equipment (23, 24, 25) which permits the representation of all the measured values obtained in a measuring cycle.

Abstract translation: 该装置允许对整个表面进行无损检测以用于缺陷和污染，并且可以检测微小的点状和线性缺陷以及极细的宏观非均匀区域。 为此，将可调透镜系统（5）放置在产生各种中间图像（31）的光源（2）和物镜（9）之间的光路中。 第一个雪茄状中间图像用于以相对大的进给偏移量对整个表面的第一次扫描，并且第二点状中间图像用于在小进给处的表面的部分区域的第二次扫描 抵消。 具有可调暗场偏转系统（8）的暗场停止组件（18）被放置在透镜系统（5）和物镜（9）之间的光路中，其在偏转之后突出光束（1） 在物体（10）的表面上通过物镜（9）以正交的角度准确地居中。 由表面（10）反射并由物镜（9）收集的光被投射到光电探测器。 电子分析系统（21）由于点状，线性和平面状缺陷将放大的从光检测器（19）输出的信号分解为测量值。 电子分析系统（21）经由计算机单元（22）连接到外围设备（23,24,25），其允许表示在测量周期中获得的所有测量值。

公开(公告)号：US4841139A

公开(公告)日：1989-06-20

申请号：US62181

申请日：1987-06-15

Applicant: Harald Schmalfuss ,  Hubert Kurpiella ,  Bernhard Schneider

Inventor： Harald Schmalfuss ,  Hubert Kurpiella ,  Bernhard Schneider

IPC: G01M11/00 ,  G01N21/88 ,  G01N21/93 ,  G01N21/95 ,  G01N21/958

CPC classification number: G01N21/88 ,  G01N2021/9511 ,  G01N2201/1045

Abstract: A method for testing components of transparent material for surface irregularities and occlusions, comprising the steps of dot-scanning the component by moving a light ray completely therethrough; detecting the light which represents flaws in at least the front and back surfaces of the component by receivers located on one side of the component; generating fault signals based on the light detected in the detecting step; digitizing the fault signals which are generated in the generating step; feeding the digitized signal to a mapped memory; and analyzing the signal by: (a) feeding the digitized signal to a number of sector counters via a preselectable number of thresholds; (b) evaluating the sector counters on-line according to preselected criterion regarding the number, location and gray tone distribution of the digitized fault signals; and (c) evaluating the signals in the mapped memory in a computer if the fulfillment of the criterion for evaluation of the sector counters cannot be sufficiently assured.

Abstract translation: 一种用于测试表面不规则和闭塞的透明材料的组件的方法，包括以下步骤：通过完全移动光线对所述部件进行点扫描; 通过位于所述部件的一侧的接收器来检测表示所述部件的至少前表面和后表面中的缺陷的光; 基于在检测步骤中检测到的光产生故障信号; 数字化在生成步骤中生成的故障信号; 将数字化信号馈送到映射存储器; 以及通过以下步骤分析所述信号：（a）经由预选数量的阈值将所述数字化信号馈送到多个扇区计数器; （b）根据关于数字化故障信号的数量，位置和灰度分布的预选标准在线评估扇区计数器; 以及（c）如果不能充分确保扇区计数器的评估标准的满足，则对计算机中的映射存储器中的信号进行评估。

公开(公告)号：US4815844A

公开(公告)日：1989-03-28

申请号：US62183

申请日：1987-06-15

Applicant: Harald Schmalfuss ,  Friedel Sinsel ,  Reinhold Bolz

Inventor： Harald Schmalfuss ,  Friedel Sinsel ,  Reinhold Bolz

IPC: G01M11/00 ,  G01M11/02 ,  G01N21/88 ,  G01N21/95 ,  G01N21/958

CPC classification number: G01M11/0278 ,  G01N21/88 ,  G01N21/958 ,  G01N2021/4719 ,  G01N2021/9511 ,  G01N21/8851 ,  G01N2201/06113 ,  G01N2201/065 ,  G01N2201/1045

Abstract: A device for testing components of transparent material for surface irregularities and occlusions which comprises a mechanism for rotatably mounting the component so that the component may be rotated on its axis; a mechanism for generating a light ray which moves linearly so that the light ray can dot-scan the component along a diameter of the component; at least one signal generating device disposed at a predetermined angle to the direction of impingement of the light ray for detecting surface irregularities and occlusions of the component and then generating a signal representative of the irregularity or occlusion; and a signal evaluation device for evaluating the signals produced in the signal generating device. The signal generating device comprises an image forming optical system; an interchangeable mask disposed at the focal plane of the image forming optical system for selecting the image of a plane of the component; and a receiver for receiving the light rays passing the mask and generating a signal representative of the light rays received.

Abstract translation: 用于测试用于表面不规则和闭塞的透明材料的部件的装置，其包括用于可旋转地安装所述部件的机构，使得所述部件可以在其轴线上旋转; 用于产生线性移动的光线的机构，使得光线可以沿着部件的直径对部件进行点扫描; 至少一个信号产生装置，以与所述光线的冲击方向成预定角度设置，用于检测所述部件的表面不规则和闭塞，然后产生表示不规则性或闭塞的信号; 以及用于评估信号产生装置中产生的信号的信号评估装置。 信号发生装置包括成像光学系统; 设置在所述图像形成光学系统的焦平面处的可互换掩模，用于选择所述部件的平面的图像; 以及接收器，用于接收通过掩模的光线并产生表示所接收的光线的信号。

公开(公告)号：US4469442A

公开(公告)日：1984-09-04

申请号：US338384

申请日：1982-01-11

Applicant: Frederich R. Reich

Inventor： Frederich R. Reich

IPC: G01B11/30 ,  G01B11/24 ,  G01J4/00 ,  G01N21/21 ,  G01N21/88 ,  G01N21/90 ,  G01N21/94

CPC classification number: G01N21/88 ,  G01N2021/8427 ,  G01N21/21 ,  G01N2201/1045

Abstract: Irregularities in a coating on a substrate in which the coating includes optical scattering centers can be detected by irradiating the coating with polarized light and examining light from the coating through a filter which removes light having the same polarization as the initial beam. Light scattered by the optical scattering centers is transmitted through the filter, while specularly reflected light from the top surface of the coating, from the substrate exposed by gaps in the coating, or reflected by alien material on the coating is filtered out. As a result irregularities can be detected as intensity minima of the transmitted radiation.

Abstract translation: 可以通过用偏振光照射涂层来检测其中涂层包括光散射中心的基底上的涂层中的不规则性，并通过滤光器检查来自涂层的光，该滤光器去除具有与初始光束相同的偏振光。 由光散射中心散射的光通过滤光片传播，而从涂层顶表面，从涂层中间隙暴露的基底或涂层外的异物材料反射的镜面反射光被过滤掉。 因此，可以将不规则性检测为发射辐射的强度最小值。

公开(公告)号：KR1019900007148B1

公开(公告)日：1990-09-29

申请号：KR1019870010249

申请日：1987-09-16

Applicant: 가부시끼가이샤 도시바

Inventor： 미요시모토스케 ,  오쿠무라가츠야 ,  오가와시게루

IPC: H01L21/66

CPC classification number: G01N21/9501 ,  G01N2201/1045

Abstract: The laser beam scanning apparatus comprises a driver (22,24, 34) rotating the semiconductor wafer (11) and moves the wafer by a set distance in the predetermined distance for each rotation. The laser beam scanner (26,28,33) rectilinearly scans the laser beam at a swing width of a predetermined amount. A polygon-mirror is rotated at a constant speed and reflects the laser beam from the generator (28). A lens system (30) focuses the laser beam reflected by the mirro onto the wafer. The mirror (26) and lens system (30) are arranged so as to scan the laser beam by the predetermined distance on the line with passes through the rotational centre of the stage (20).

Abstract translation: 激光束扫描装置包括旋转半导体晶片（11）的驱动器（22,24,34），并使晶片以预定的距离将晶片移动一定距离。 激光束扫描器（26,28,33）以预定量的摆动宽度直线地扫描激光束。 多角镜以恒定的速度旋转并反射来自发生器（28）的激光束。 透镜系统（30）将由镜像反射的激光束聚焦到晶片上。 反射镜（26）和透镜系统（30）被布置成在穿过台架（20）的旋转中心的同时沿着线路扫描预定距离的激光束。

公开(公告)号：JP2009236791A

公开(公告)日：2009-10-15

申请号：JP2008085167

申请日：2008-03-28

Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

Inventor： URANO YUTA ,  NAKAO TOSHIYUKI ,  OSHIMA YOSHIMASA ,  HAMAMATSU REI

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/9505 ,  G01N2021/8854 ,  G01N2021/8874 ,  G01N2201/103 ,  G01N2201/1045

Abstract: PROBLEM TO BE SOLVED: To accurately determine a defect dimension and defect coordinates by inspecting a micro defect at high speed without damaging a sample and accurately detecting the amount of scattered light of a large defect.
SOLUTION: A plurality of signals with different effective sensitivities are obtained by illumination by a plurality of different illuminance or detection of a plurality of different sensitivities by a pixel, and they are selected and utilized, thereby achieving highly sensitive and wide dynamic range inspection. Further, the plurality of signals are output simultaneously in parallel, and processed, thereby achieving high speed inspection.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：通过高速检查微缺陷而不损伤样品并精确地检测大缺陷的散射光的量，来准确地确定缺陷尺寸和缺陷坐标。 解决方案：通过多个不同照度的照明或通过像素检测多个不同灵敏度来获得具有不同有效灵敏度的多个信号，并且它们被选择和利用，从而实现高灵敏度和宽动态范围 检查。 此外，多个信号并行输出并进行处理，从而实现高速检查。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JPWO2003102563A1

公开(公告)日：2005-09-29

申请号：JP2004509398

申请日：2003-05-30

Applicant: 松下電器産業株式会社

Inventor： 後藤　泰宏 ,  泰宏 後藤 ,  青児 西脇 ,  青児 西脇 ,  金馬　慶明 ,  慶明 金馬

IPC: G01N21/95 ,  G01N21/90 ,  G01N21/94 ,  G11B7/0037 ,  G11B7/004 ,  G11B7/085 ,  G11B7/26 ,  G11B19/04

CPC classification number: G11B7/00375 ,  G01N21/94 ,  G01N21/9506 ,  G01N2201/1045 ,  G11B19/04

Abstract: 異体検出装置において、光信号検出手段(1)は光スポットを所定方向に走査しながら被検査物体面上に光スポットを照射し、被検査物体面からの反射光を受け、反射光量に対応した光検出信号(HF)を生成する。異体検出手段(2a〜2h)は光検出信号(HF)から、被検査物体上に付着した異体の走査方向における始端部及び終端部に対応して現れる異体検出信号(C)を生成する。異体検出信号は、例えば、光検出信号(HF)と、光検出信号(HF)を所定時間遅延させた遅延信号(HF1)とを減算した差信号として求められる。異体判別手段(3)は異体検出信号(C)から異体が存在する領域を示す異体判別信号(H)を生成する。