Perpendicular magnetic recording medium, method for producing the same, and sputtering device
    42.
    发明公开
    Perpendicular magnetic recording medium, method for producing the same, and sputtering device 失效
    全能磁记录介质,其制造方法和溅射装置

    公开(公告)号:EP0054269A3

    公开(公告)日:1983-08-10

    申请号:EP81110352

    申请日:1981-12-11

    Applicant: TEIJIN LIMITED

    CPC classification number: G11B5/64 G11B5/851 Y10S428/90 Y10T428/31678

    Abstract: Magnetic recording medium conventionally utilizes the in-plane magnetization mode, but, recently, the perpendicular magnetization mode utilizing the perpendicular anisotropy of an hcp cobalt alloy layer, in which C axis is oriented normal to the layer surface, is proposed. The known perpendicular magnetic recording medium has been produced by an RF sputtering, but such medium is of too low flexibility to use it in the form of a magnetic tape. In addition, the production rate of the perpendicular magnetic recording medium by RF sputtering is very low. The perpendicular magnetic recording medium is very flexible due to particle pattern (Figures 10, 12 and 13) completely distinct from the conventional columnar pattern (Figures 8 and 11). In addition, the production rate is high, because the base (20) is located beside a space between the targets (T,, T 2 ) of a sputtering device and further the magnetic field is generated perpendicularly to the sputtering surfaces (T 1s , T 25 ) by a field coil (31) or magnets (32,33). The present invention makes it possible to commercially produce the perpendicular magnetic recording medium, especially in the tape form.

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