公开(公告)号：AU2010225137A1

公开(公告)日：2011-09-01

申请号：AU2010225137

申请日：2010-03-18

Applicant: DELFMEMS

Inventor： KARIM SEGUENI ,  NICOLAS LORPHELIN

IPC: H01H59/00

Abstract: The MEMS structure comprises: a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), at least one pillar (3, 3') under the flexible membrane (6), electric lowering actuation means (7) that are adapted to bend down the flexible membrane (6) into a down forced state electric raising actuation means (8) that are adapted to bend up the flexible membrane (6) into an up forced state. The electric lowering actuation means (7) or the electric raising actuation means (8) comprise an actuation area (7c or 8c), that extends under a part of the membrane (6) and that is adapted to exert pulling forces on the membrane (6) simultaneously on both sides of the said at least one pillar (3) in the longitudinal direction (X).

公开(公告)号：IL185992A

公开(公告)日：2011-08-31

申请号：IL18599207

申请日：2007-09-17

Applicant: DELFMEMS

Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/ figure 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3) and which is bendable under the action of the actuation means (7).

公开(公告)号：UA94039C2

公开(公告)日：2011-04-11

申请号：UAA200710442

申请日：2006-03-07

Applicant: DELFMEMS

Inventor： MILLET OLIVIER

IPC: H01H59/00

Abstract: РЧМЕМС -Переключательсодержитмикромеханическоепереключающееустройство, размещенноенаподкладкеи выполненноес возможностьюприведенияв действиемеждудвумяположениями: первымположением (отключенноесостояние/фиг. 1) ивторымположением (включенноесостояние), иактивизирующееустройство, предназначенноедляприведенияпереключающегоустройствав соответствующееположение. Приэтоммикромеханическоепереключающееустройствосодержитгибкуюмембрану (6), свободноподдерживаемуюопорнымустройством (3) ивыполненнуюс возможностьюсгибатьсяподвлияниемактивирующегоустройства (7) исвободноскользитьотносительноопорногоустройства (3) вовремясвоегоперемещенияизгиба.

公开(公告)号：DE602005003008T2

公开(公告)日：2008-08-14

申请号：DE602005003008

申请日：2005-03-21

Applicant: DELFMEMS

Inventor： MILLET OLIVIER

IPC: H01H1/00 ,  H01H59/00

Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/ figure 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3) and which is bendable under the action of the actuation means (7).

公开(公告)号：ES2296116T3

公开(公告)日：2008-04-16

申请号：ES05370005

申请日：2005-03-21

Applicant: DELFMEMS

Inventor： MILLET OLIVIER

IPC: H01H1/00 ,  H01H59/00

Abstract: Conmutador MEMS de RF que comprende medios de conmutación micromecánicos que pueden ser accionados entre dos posiciones: una primera posición (apagado) y una segunda posición (encendido), y medios de actuación para accionar la posición de los medios de conmutación, comprendiendo los medios micromecánicos de conmutación una membrana (6) flexible que se apoya sobre medios de soporte (3), que es deformable bajo la acción de los medios de actuación (7), está preparada para moverse libremente caracterizada porque dicha membrana (6) flexible se apoya libremente sobre dichos medios de soporte (3) y se desliza respecto a los medios de soporte (3) durante su movimiento de abombado.

公开(公告)号：IL185992D0

公开(公告)日：2008-01-20

申请号：IL18599207

申请日：2007-09-17

Applicant: DELFMEMS

IPC: H01H20100101

Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/ figure 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3) and which is bendable under the action of the actuation means (7).

公开(公告)号：DE602005003008D1

公开(公告)日：2007-12-06

申请号：DE602005003008

申请日：2005-03-21

Applicant: DELFMEMS

Inventor： MILLET OLIVIER

IPC: H01H1/00 ,  H01H59/00

Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/ figure 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3) and which is bendable under the action of the actuation means (7).