METHODS TO BOND SILICA PARTS, A CRUCIBLE, A SYSTEM FOR GROWING A SINGLE CRYSTAL INGOT AND A METHOD FOR GROWING A SINGLE CRYSTAL INGOT
    52.
    发明申请
    METHODS TO BOND SILICA PARTS, A CRUCIBLE, A SYSTEM FOR GROWING A SINGLE CRYSTAL INGOT AND A METHOD FOR GROWING A SINGLE CRYSTAL INGOT 审中-公开
    粘结二氧化硅部件的方法,可溶性,用于生长单晶体的系统和用于生长单晶的方法

    公开(公告)号:WO2014100487A3

    公开(公告)日:2015-03-05

    申请号:PCT/US2013076708

    申请日:2013-12-19

    Applicant: SUNEDISON INC

    Abstract: A method of bonding a first silica part to a second silica part includes coating contacting surfaces of the first and second silica parts with a solution having one of silica and silica precursors. The coated surfaces of the first silica part are placed adjacent to the coated surfaces of the second silica part to form an assembly, and the assembly is heated, a crucible for use in directional solidification of multicrystalline ingots comprising a base, a sidewall and a weir, a system for growing a single crystal ingot comprising a crucible having a base, a sidewall, a weir, a heater and a feed tube, and a method for growing a single crystal ingot from a crucible havng a base and a sidewall and a weir comprising placing a feedstock material into the crucible, melting the feedstock material, lowering a seed cyrstal into the melt and pulling the seed crystal from the melt to pull an ingot.

    Abstract translation: 将第一二氧化硅部分结合到第二二氧化硅部分的方法包括第一和第二二氧化硅部分的涂层接触表面与具有二氧化硅和二氧化硅前体之一的溶液。 第一二氧化硅部分的涂覆表面被放置成与第二二氧化硅部分的涂覆表面相邻以形成组件,并且组件被加热,坩埚用于多晶锭的定向凝固,所述多晶锭包括基体,侧壁和堰 ,用于生长单晶锭的系统,其包括具有基底,侧壁,堰,加热器和进料管的坩埚,以及用于从具有基部和侧壁的坩埚和堰的生长单晶锭的方法 包括将原料材料放入坩埚中,熔化原料,将晶体降低成熔体并将晶种从熔体中拉出以拉出晶锭。

    UV TREATMENT OF POLISHED WAFERS
    56.
    发明申请
    UV TREATMENT OF POLISHED WAFERS 审中-公开
    抛光抛光的紫外线处理

    公开(公告)号:WO2014055752A1

    公开(公告)日:2014-04-10

    申请号:PCT/US2013/063248

    申请日:2013-10-03

    CPC classification number: H01L21/02054 H01L21/02024 H01L21/02052

    Abstract: A method is provided for cleaning a surface of a semiconductor wafer comprising: (a) contacting the front surface of the wafer with a slurry comprising an abrasive agent and a polymeric rheological modifier; (b) contacting the front surface of the semiconductor wafer with an oxidant; and (c) irradiating the front surface of the semiconductor wafer with ultraviolet light.

    Abstract translation: 提供了一种用于清洁半导体晶片的表面的方法,包括:(a)使晶片的前表面与包含研磨剂和聚合物流变改性剂的浆料接触; (b)使半导体晶片的前表面与氧化剂接触; 和(c)用紫外线照射半导体晶片的前表面。

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