METHOD FOR MANUFACTURING OPTICAL SWITCH ON GLASS SUBSTRATE

    公开(公告)号:JP2002162578A

    公开(公告)日:2002-06-07

    申请号:JP2001286488

    申请日:2001-09-20

    Applicant: XEROX CORP

    Abstract: PROBLEM TO BE SOLVED: To obtain an optical switch, using a reflection MEMS mirror. SOLUTION: Optical cross-connection involves the general concept of a two-dimensional array of MEMS tilt mirrors, used to direct light coming from a first optical fiber, to a second optical fiber. Each MEMS tilt mirrors in the two-dimensional array can rotate about its x-axis and y-axis and is suspended by plural suspension arms attached to a glass substrate.

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