公开(公告)号：US20020109074A1

公开(公告)日：2002-08-15

申请号：US10025928

申请日：2001-12-26

Inventor： Mamoru Uchida

IPC: G01J001/04 ,  G01J005/08

CPC classification number: H01L24/73 ,  G02B6/3608 ,  G02B6/42 ,  G02B6/43 ,  H01L31/0232 ,  H01L31/035281 ,  H01L31/105 ,  H01L31/167 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01029 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01043 ,  H01L2924/01046 ,  H01L2924/01075 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/1017 ,  H01L2924/10329 ,  H01L2924/10336 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/12043 ,  H01L2924/14 ,  Y02E10/50 ,  H01L2924/00

Abstract: The semiconductor device of the present invention comprises an optical transmission region, and a light receiving part for converting light propagating through the optical transmission region to an electrical signal, wherein the optical transmission region comprises a two-dimensional optical waveguide layer, and wherein at least a portion of the light receiving part is embedded in the optical transmission region, whereby the present invention can provide a semiconductor device having reduced direction dependency when light propagating through the optical transmission region is received.

Abstract translation: 本发明的半导体器件包括光传输区域和用于将通过光传输区域传播的光转换为电信号的光接收部件，其中光传输区域包括二维光波导层，并且其中至少 光接收部分的一部分嵌入在光传输区域中，由此本发明可以提供一种当接收到通过光传输区域传播的光时具有减小的方向依赖性的半导体器件。

公开(公告)号：US20020092976A1

公开(公告)日：2002-07-18

申请号：US09796161

申请日：2001-02-28

Inventor： Eiichi Sugai ,  Etsuji Sugita ,  Koji Yoshida

IPC: G01J001/04 ,  G01J005/08

CPC classification number: G01L1/246 ,  G02B6/3628

Abstract: In a patch type optical fiber sensor, an optical fiber (2) has at its part a fiber Bragg grating (3) and that part is fixed to a film (4) serving as a base to form a film-like detecting element. Opposite ends of that part are connected to optical cord (1) to protect the film-like detecting element. The detecting element is bonded to an object (9) to be detected by bonding agent or by welding.

Abstract translation: 在贴片型光纤传感器中，光纤（2）其部分为光纤布拉格光栅（3），该部分固定在用作基底的膜（4）上以形成膜状检测元件。 该部分的相对端连接到光缆（1）以保护膜状检测元件。 检测元件通过粘接剂或焊接而粘合到待检测物体（9）上。

公开(公告)号：US20020088930A1

公开(公告)日：2002-07-11

申请号：US10044460

申请日：2002-01-11

Inventor： David S. Graham ,  Daniel A. Francis

IPC: G01J001/04 ,  G01J005/08

CPC classification number: G06F3/0421 ,  G02B6/32 ,  G02B2006/12195

Abstract: A user input device for an electronic device is disclosed. The user input device provides positional information using a grid of light. The grid of light is produced from a light source and waveguides. The grid of light is also received and processed using waveguides and a light detector. Optionally, optics may be used to enhance the operation of the user input device. The user input device is particularly suited for use as a user input device for a computer system or the like.

公开(公告)号：US20010006530A1

公开(公告)日：2001-07-05

申请号：US09756945

申请日：2001-01-08

Applicant: Applied Materials, Inc.

Inventor： Bruce Adams ,  Aaron Hunter ,  Alex Rubinchik ,  Mark Yam ,  Paul A. O'Brien

IPC: G01J005/08 ,  G01N025/00 ,  G01K001/14 ,  G01K013/00 ,  A21B001/00

CPC classification number: G01J5/04 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/046 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0809 ,  G01J5/0815 ,  G01J5/0818 ,  G01J5/0821 ,  G01J5/0846 ,  G01J5/0862 ,  G01J2005/0048

Abstract: A temperature sensor for measuring a temperature of a substrate in a thermal processing chamber is described. The chamber includes a reflector forming a reflecting cavity with a substrate when the substrate is positioned in the chamber. The temperature sensor includes a probe having an input end positioned to receive radiation from the reflecting cavity, and a detector optically coupled to an output end of the probe. The radiation entering the probe includes reflected radiation and non-reflected radiation. The detector measures an intensity of a first portion of the radiation entering the probe to generate a first intensity signal and measures an intensity of a second portion of the radiation entering the probe to generate a second intensity signal. The detector is configured so that a ratio of the reflected radiation to the non-reflected radiation is higher in the first portion than the second portion. The two intensity signals are used to calculate the temperature and emissivity of the substrate.

Abstract translation: 描述了用于测量热处理室中的基板的温度的温度传感器。 该腔室包括一反射镜，当该基片定位在腔室中时，该反射器形成具有基底的反射腔。 温度传感器包括探针，其具有定位成接收来自反射腔的辐射的输入端，以及光学耦合到探针的输出端的检测器。 进入探头的辐射包括反射辐射和未反射的辐射。 检测器测量进入探头的辐射的第一部分的强度，以产生第一强度信号并测量进入探头的辐射的第二部分的强度以产生第二强度信号。 检测器被配置为使得反射辐射与非反射辐射的比率在第一部分中比第二部分高。 两个强度信号用于计算衬底的温度和发射率。

公开(公告)号：US20040208418A1

公开(公告)日：2004-10-21

申请号：US10152289

申请日：2002-05-22

Inventor： Doron Handelman

IPC: H04J014/08 ,  G01J001/04 ,  G01J001/42 ,  G01J005/08

CPC classification number: H04J14/08 ,  H04J14/02 ,  H04J14/0223 ,  H04J14/0284 ,  H04J14/0287 ,  H04Q2011/002

Abstract: A delayed optical signal is generated from an inputted optical signal by cyclically transmitting the inputted optical signal between at least two ends of an optical medium and outputting the inputted optical signal from one of the ends of the optical medium after at least one transmission cycle via the optical medium. Each transmission of the inputted optical signal in a direction via the optical medium is carried out over a wavelength resource that is different from a wavelength resource used in a preceding transmission of the inputted optical signal in a direction via the optical medium. Interference among repeated transmissions of the inputted optical signal via the optical medium is therefore minimized or even avoided. Related apparatus and method are also described.

Abstract translation: 通过在光介质的至少两端之间循环地传输所输入的光信号，并经由至少一个传输周期之后从光介质的一端输出光信号，从输入的光信号中产生延迟的光信号 光学介质。 经由光学介质的方向的输入光信号的每次发送在与经过光介质的方向的输入光信号的先前传输中使用的波长资源不同的波长资源上进行。 因此，通过光学介质的输入光信号的重复传输之间的干扰被最小化或甚至避免。 还描述了相关装置和方法。

公开(公告)号：US20040206892A1

公开(公告)日：2004-10-21

申请号：US10480631

申请日：2003-12-22

Inventor： Christophe Martinez ,  Pierre Ferdinand

IPC: G01J001/04 ,  G01J005/08

CPC classification number: G01L1/246 ,  G01D5/35383

Abstract: This system comprises at least one optical sensor (C1, C2, C3) comprising two Bragg gratings (B11, B12; B21, B22; B31, B32) written in two optical waveguides and having sensitivities adjusted so that the respective spectra of the two gratings have a relative spectral shift which depends on the parameter or parameters to be measured. The system also comprises an optical source (6) provided in order to supply light to the two optical waveguides so as to interrogate the latter, means enabling the light to pass successively through the two Bragg gratings of the same sensor, photodetectors in order to measure, on the one hand, the power level of light (R1) having passed only through one of the two optical waveguides and, on the other hand, the power level of light (Rnull1) having passed successively through the two optical waveguides, and means to process these power levels and supply the values of the parameter or parameters measured. The invention is applicable in particular to measurements of temperatures, stresses and pressures.

Abstract translation: 该系统包括至少一个光学传感器（C1，C2，C3），其包括写入两个光波导中的两个布拉格光栅（B11，B12; B21，B22; B31，B32），并且调节灵敏度，使得两个光栅 具有取决于要测量的参数或参数的相对光谱偏移。 该系统还包括光源（6），其被提供用于向两个光波导提供光以便询问光源，以使得光能够连续地通过相同传感器的两个布拉格光栅，光电检测器以便测量 一方面，仅通过两个光波导中的一个的光（R1）的功率电平，另一方面，已经连续通过两个光波导的光（R'1）的功率电平， 并且用于处理这些功率电平并提供所测量的参数或参数的值的装置。 本发明特别适用于温度，应力和压力的测量。

公开(公告)号：US20040190279A1

公开(公告)日：2004-09-30

申请号：US10797086

申请日：2004-03-11

Applicant: MINEBEA CO., LTD.

Inventor： Atsushi Kitamura

IPC: G01D011/28 ,  G01J001/04 ,  G01J005/08 ,  H01J005/16

CPC classification number: G02B6/0028

Abstract: A spread illuminating apparatus includes at least one light source, a light conductive plate having the at least one light source disposed toward one end surface thereof, and at least one light controlling means disposed between the at least one light source and the light conductive plate. The at least one light controlling means is formed such that a plurality of transparent rectangular solids are stacked one over another vertically and horizontally, and that the transparent rectangular solids are put together by means of adhesive which can transmit light emitted from the at least one light source. The at least one light controlling means has a refractive index profile formed in both directions parallel to and vertical to the light exit surface of the light conductive plate thereby controlling light with respect to the both directions.

Abstract translation: 扩展照明装置包括至少一个光源，具有朝向其一个端面设置的所述至少一个光源的导光板以及设置在所述至少一个光源和所述导光板之间的至少一个光控制装置。 所述至少一个光控制装置形成为使得多个透明矩形固体在垂直和水平方向上彼此堆叠，并且透明矩形固体通过粘合剂放置在一起，所述粘合剂可以透射从所述至少一个光发射的光 资源。 所述至少一个光控制装置具有在与导光板的光出射表面平行并垂直于两个方向形成的折射率分布，从而控制相对于两个方向的光。

公开(公告)号：US20040182998A1

公开(公告)日：2004-09-23

申请号：US10691444

申请日：2003-10-22

Inventor： Paul E. Denney ,  Jay R. Eastman ,  Ta-Chieh Huang

IPC: G01J001/04 ,  G01J005/08

CPC classification number: B23K26/032 ,  B23K26/03 ,  B23K26/034 ,  B23K26/043 ,  B23K26/12 ,  B23K26/123 ,  B23K26/128 ,  B23K26/142 ,  B23K26/16 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0291 ,  G01J3/28

Abstract: A detection system is used during irradiation of an interaction region of a structure with laser light. The structure includes embedded material. The detection system includes a focusing lens positioned to receive light emitted from the interaction region. The detection system further includes an optical fiber optically coupled to the focusing lens to receive light from the focusing lens. The detection system further includes a spectrometer optically coupled to the optical fiber to receive light from the optical fiber. The spectrometer is adapted for analysis of the light for indications of the embedded material within the interaction region.

Abstract translation: 在具有激光的结构的相互作用区域的照射期间使用检测系统。 该结构包括嵌入材料。 检测系统包括聚焦透镜，其被定位成接收从相互作用区域发射的光。 检测系统还包括光学耦合到聚焦透镜以接收来自聚焦透镜的光的光纤。 检测系统还包括光学耦合到光纤以接收来自光纤的光的光谱仪。 光谱仪适用于分析相互作用区域内的嵌入材料的光的光。

公开(公告)号：US20040140421A1

公开(公告)日：2004-07-22

申请号：US10706935

申请日：2003-11-14

Inventor： Hans-Joachim Dammann

IPC: G01J001/04 ,  G01J005/08

CPC classification number: G08B17/06 ,  B64D45/00 ,  B64D2045/009 ,  G01K3/005 ,  G01K11/32

Abstract: A method of monitoring a temperature condition includes inputting a light pulse into a fiber optic cable and receiving a reflection signal that arises from said input light pulse in said fiber optic cable. A temperature condition along the fiber optic cable and a location of the temperature condition along the fiber optic cable is determined based on said reflection signal.

Abstract translation: 监测温度条件的方法包括将光脉冲输入到光纤电缆中，并接收由所述光纤电缆中的所述输入光脉冲产生的反射信号。 基于所述反射信号确定沿着光纤电缆的温度条件和沿着光纤电缆的温度状态的位置。

公开(公告)号：US20040108446A1

公开(公告)日：2004-06-10

申请号：US10468763

申请日：2004-01-14

Inventor： Eric Hildebrandt

IPC: G01J001/04 ,  G01J005/08

CPC classification number: G02B6/4201 ,  G02B6/2852 ,  G02B6/4243 ,  G02B6/4245 ,  G02B6/4286 ,  G02B6/4289

Abstract: The invention relates to an arrangement for detecting an optical signal which enables the light emitted from a curved optical fibre (40) on the long side thereof to be detected. Said arrangement comprises a device (10) for curving the optical fibre (40), a first retaining device (20, 30) for maintaining the optic fibre (40) in its curved state, and a second retaining device (60) for maintaining at least one photodetector (70). The curving device (10) and the second retaining device (60) are displaceable in relation to each other, whereby the photodetector (70) is placed directly on to a predetermined section of the curved optical fibre (40) in an operating state. As a result, the optical path between the fibre section, where the light is emitted from, and the photodetector (70) is minimal.

Abstract translation: 本发明涉及一种用于检测能够检测从其长边上的弯曲光纤（40）发射的光的光信号的装置。 所述装置包括用于弯曲光纤（40）的装置（10），用于将光纤（40）保持在其弯曲状态的第一保持装置（20,30）和用于维持光纤 至少一个光电检测器（70）。 弯曲装置（10）和第二保持装置（60）可相对于彼此移动，由此光电检测器（70）在工作状态下直接放置在弯曲光纤（40）的预定部分上。 结果，光发射光纤部分与光电检测器（70）之间的光路最小。