公开(公告)号：US6067858A

公开(公告)日：2000-05-30

申请号：US865726

申请日：1997-05-30

Applicant: William A. Clark ,  Thor Juneau ,  Roger T. Howe

Inventor： William A. Clark ,  Thor Juneau ,  Roger T. Howe

IPC: G01C19/5719 ,  G01C19/00

CPC classification number: G01C19/5719

Abstract: A microfabricated gyroscope to measure rotation about an axis parallel to the surface of the substrate. A voltage differential may be applied between pairs of electrode fingers to reduce the quadrature error. A microfabricated gyroscope includes a vibratory structure and interdigited electrodes having a high aspect ratio.

Abstract translation: 用于测量围绕平行于衬底表面的轴的旋转的微制造陀螺仪。 可以在电极指对之间施加电压差以减小正交误差。 微制造的陀螺仪包括具有高纵横比的振动结构和交叉指向的电极。

公开(公告)号：US5639542A

公开(公告)日：1997-06-17

申请号：US485367

申请日：1995-06-07

Applicant: Roger T. Howe ,  Richard S. Payne ,  Stephen F. Bart

Inventor： Roger T. Howe ,  Richard S. Payne ,  Stephen F. Bart

IPC: B81B7/00 ,  G01P15/08 ,  B32B3/00 ,  G01P15/00 ,  H03H9/00

CPC classification number: B81B7/0006 ,  G01P15/0802 ,  Y10S428/901 ,  Y10T428/24917 ,  Y10T428/24926

Abstract: A method and apparatus for providing a sub-ground plane for a micromachined device. The sub-ground plane is formed in or on the substrate. Above the sub-ground plane is a dielectric and then a discontinuous conductive layer used for interconnects for parts of the micromachined device. A movable microstructure is suspended above the interconnect layer. A conductive layer can be suspended above the movable microstructure. In one embodiment, the sub-ground plane is diffused into the substrate or a well in the substrate, and is of an opposite type from the type of silicon into which it is diffused. Alternatively, the sub-ground plane is formed from a conductive layer, deposited over the substrate before the layer used for interconnects.

Abstract translation: 一种用于提供微加工装置的子接地平面的方法和装置。 子接地平面形成在基底中或基底上。 在子接地平面之上是电介质，然后是用于微加工装置的部件的互连的不连续导电层。 可移动微结构悬浮在互连层上方。 导电层可以悬浮在可移动微结构的上方。 在一个实施例中，子接地平面扩散到衬底或衬底中的阱中，并且与其被扩散的硅的类型相反。 或者，子接地平面由导电层形成，在用于互连的层之前沉积在衬底上。

公开(公告)号：US5491604A

公开(公告)日：1996-02-13

申请号：US989396

申请日：1992-12-11

Applicant: Clark T.-C. Nguyen ,  Roger T. Howe

Inventor： Clark T.-C. Nguyen ,  Roger T. Howe

IPC: H01G5/14 ,  H03H9/02 ,  H03H9/46 ,  H01G5/011

CPC classification number: H03H9/02377 ,  G01R33/0286 ,  H01G5/14 ,  H03H9/02393 ,  H03H9/02425 ,  H03H9/467 ,  H03H2009/02496 ,  H03H9/0023

Abstract: Resonator systems with controlled quality factors including a resonator having a plurality of ports and a first quality factor greater than the system quality factor, and an amplifier providing negative feedback among the ports to render the system quality factor independent of the resonator quality factor.

Abstract translation: 具有受控质量因素的谐振器系统包括具有多个端口的谐振器和大于系统品质因数的第一品质因数，以及在端口之间提供负反馈的放大器，以使系统品质因数与谐振器品质因数无关。

公开(公告)号：US4823607A

公开(公告)日：1989-04-25

申请号：US51526

申请日：1987-05-18

Applicant: Roger T. Howe ,  Mehran Mehregany ,  Stephen D. Senturia

Inventor： Roger T. Howe ,  Mehran Mehregany ,  Stephen D. Senturia

IPC: G01N3/00 ,  G01N19/06

CPC classification number: G01N3/00 ,  G01N1/32 ,  G01N2033/0096 ,  G01N2203/0053 ,  G01N2203/0075 ,  G01N2203/008 ,  G01N2203/0254 ,  G01N2203/0282 ,  G01N2203/0647

Abstract: Released film structures are employed in measuring the mechanical properties of the film material. By measuring the deformation of thin film structures held under intrinsic tensile stress and then released, these mechanical properties can be accurately measured.

Abstract translation: 释放的膜结构用于测量膜材料的机械性能。 通过测量在固有拉伸应力下保持的薄膜结构的变形然后释放，可以精确地测量这些机械性能。

公开(公告)号：US4674319A

公开(公告)日：1987-06-23

申请号：US714076

申请日：1985-03-20

Applicant: Richard S. Muller ,  Roger T. Howe

Inventor： Richard S. Muller ,  Roger T. Howe

IPC: G01N27/00 ,  H01L29/84

CPC classification number: G01N29/036 ,  G01N2291/0256

Abstract: A polysilicon microstructure is formed on a silicon substrate. Beneath the microstructure, are diffused regions in the substrate. The microstructure is capacitively coupled to these diffused regions so that one such capacitor acts as an excitation capacitor and the other capacitor acts as a sense capacitor. By applying an AC voltage to the excitation capacitor, the electrostatic force between the substrate and the microstructure changes causing a mechanical vibration in the microstructure. A DC voltage is applied to the sense capacitor. The mechanical vibration, which changes its capacitance, will develop a current through the sense capacitor. A phenomenon may then be sensed by the vibrating microstructure. A polymer film disposed on the microstructure can sorb a gas of interest. As the mass of the polymer film and vibrating microstructure increases, its frequency or phase changes. The current through the sense capacitor will exhibit a commensurate frequency or phase shift. Detection of such frequency or phase shift in the sense capacitor current will transduce the detection of the vapor of interest.

Abstract translation: 在硅衬底上形成多晶硅微结构。 在微观结构之下，是底物中的扩散区域。 微结构电容耦合到这些扩散区域，使得一个这样的电容器用作激励电容器，另一个电容器用作感测电容器。 通过向激励电容器施加AC电压，衬底和微结构之间的静电力导致微结构中的机械振动。 直流电压被施加到感测电容器。 改变其电容的机械振动将产生通过感测电容器的电流。 然后可以通过振动微结构感测现象。 设置在微结构上的聚合物膜可吸附感兴趣的气体。 随着聚合物膜的质量和振动微结构的增加，其频率或相位发生变化。 通过感测电容器的电流将呈现相当的频率或相移。 感测电容器电流中的这种频率或相移的检测将转换感兴趣的蒸气的检测。