公开(公告)号：KR1020110090397A

公开(公告)日：2011-08-10

申请号：KR1020100010139

申请日：2010-02-03

Applicant: 한화테크윈 주식회사 ,  성균관대학교산학협력단

Inventor： 안종현 ,  홍병희

IPC: H01L21/027

CPC classification number: G03F7/0002 ,  B29C59/022 ,  H01L21/0331 ,  H01L21/0332

Abstract: PURPOSE: An apparatus and method for forming graphene pattern are provided to maintain the conductive property and visibility of a graphene by forming a graphene pattern and using an adhesive strength. CONSTITUTION: In an apparatus and method for forming graphene pattern, a bonding layer is formed in a stamp part in which a pattern is formed. The bonding layer of the stamp part is contacted with the graphene layer. A contact part to the adhesive layer is separated from the other part of the graphene layer.

Abstract translation: 目的：提供一种用于形成石墨烯图案的装置和方法，以通过形成石墨烯图案并使用粘合强度来维持石墨烯的导电性能和可视性。 构成：在用于形成石墨烯图案的装置和方法中，在其中形成图案的印模部分中形成结合层。 印模部分的结合层与石墨烯层接触。 与粘合剂层的接触部分与石墨烯层的另一部分分离。