公开(公告)号：JP2012078812A

公开(公告)日：2012-04-19

申请号：JP2011192951

申请日：2011-09-05

Applicant: Hamamatsu Photonics Kk ,  Laser Gijutsu Sogo Kenkyusho ,  Osaka Univ ,  国立大学法人大阪大学 ,  浜松ホトニクス株式会社 ,  財団法人レーザー技術総合研究所

Inventor： MIYANAGA NORIAKI ,  FUJITA MASAYUKI ,  KURITA TAKASHI ,  KAWASHIMA TOSHIYUKI

IPC: G02F1/01

Abstract: PROBLEM TO BE SOLVED: To provide a laser device capable of easily generating a pulsed laser beam with short pulse and high output.SOLUTION: In multiplexing each of a plurality of laser beams Lhaving different frequencies from each other by a diffraction grating 13 to generate a multiplexed beam L, the phase of each laser beam Lis controlled such that an output peak (the same pulse time waveform) of the multiplexed beam Lrepeatedly appears at predetermined time intervals on a condensing position Pof the diffraction grating 13. Consequently, a pulsed laser beam is generated on the condensing position P. This laser device 1 generates a pulsed laser beam by multiplexing a plurality of laser beams Loscillated from a plurality of laser light sources 10. Therefore, by increasing the number of the laser light sources 10 (the number of laser beams Lhaving different frequencies from each other), a pulsed laser beam with short pulse and high output can be easily generated.

Abstract translation: 要解决的问题：提供能够容易地产生具有短脉冲和高输出的脉冲激光束的激光装置。 解决方案：通过衍射光栅13将具有不同频率的多个激光束L 1 复用，以产生多路复用光束L 2 ，控制各激光束L 1 的相位，使得复用光束L 1 上以预定的时间间隔重复出现POS =“POST”> 2 。因此，脉冲激光束 冷凝位置P 1 。 该激光装置1通过多路复用从多个激光源10振荡的多个激光束L 1 来产生脉冲激光束。因此，通过增加激光的数量 源10（具有彼此具有不同频率的激光束L 1 ）的数量），可以容易地产生具有短脉冲和高输出的脉冲激光束。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP2007335601A

公开(公告)日：2007-12-27

申请号：JP2006165178

申请日：2006-06-14

Applicant: Hamamatsu Photonics Kk ,  浜松ホトニクス株式会社

Inventor： SEKINE TAKASHI ,  YASUHARA AKIRA ,  KAWASHIMA TOSHIYUKI

IPC: H01S3/06

Abstract: PROBLEM TO BE SOLVED: To provide a laser medium capable of effectively suppressing degradation in quality of laser beam which is caused by thermal lens effect. SOLUTION: The laser medium 10 comprises an active medium 11 of slab form which comprises a first main surface 11a and a second main surface 11b, a first compensating medium 12 of slab form which comprises a main surface 12a jointing to the first main surface 11a of the active medium 11, and a second compensating medium 13 of slab form which comprises a main surface 13a jointing to the second main surface 11b of the active medium 11. The first compensating medium 12 and the second compensating medium 13 have temperature dependency in refractive index of opposite polarity relative to the temperature dependency in refractive index of the active medium 11. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 解决的问题：提供能够有效地抑制由热透镜效应引起的激光束质量劣化的激光介质。 解决方案：激光介质10包括板状活性介质11，其包括第一主表面11a和第二主表面11b，第一平板形式的补偿介质12，其包括与第一主表面11a连接的主表面12a 活性介质11的表面11a和板状的第二补偿介质13，其包括与活性介质11的第二主表面11b连接的主表面13a。第一补偿介质12和第二补偿介质13具有温度依赖性 相对于活性介质11的折射率的温度依赖性具有相反极性的折射率。（C）2008，JPO和INPIT

公开(公告)号：JP2005268639A

公开(公告)日：2005-09-29

申请号：JP2004081120

申请日：2004-03-19

Applicant: Hamamatsu Photonics Kk ,  浜松ホトニクス株式会社

Inventor： MIYAMOTO MASAHIRO ,  KANZAKI TAKESHI ,  KAWASHIMA TOSHIYUKI ,  SUGA HIROBUMI

IPC: H01S5/024 ,  H01S5/40

Abstract: PROBLEM TO BE SOLVED: To provide a laser array unit suitable for generation of an excitation light having a large irradiation area which is used for solid lasers.
SOLUTION: The laser array unit 10 has a laser array 11, a heat sink 14 attached to the laser array 11, and a pair of drawing electrodes 24 connected with the laser array 11. Each deriving electrode 24 has a base portion 25 and an extension portion 26. The base portion 25 is connected electrically with the laser array 11, and is extended on side surfaces 14e, 14f of the heat sink. The extension portion 26 is extended from the base portion 25 onto a top surface 14c or a bottom surface 14d of the heat sink. Since the drawing electrode is guided from the side surface of the heat sink to the top surface or the bottom surface thereof, the drawing electrodes are prevented from interfering with a cooling manifold when attaching the plurality of laser array units to the cooling manifold by arranging them in its lateral direction.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供适合于产生用于固体激光器的具有大的照射面积的激发光的激光阵列单元。 解决方案：激光阵列单元10具有激光阵列11，安装在激光阵列11上的散热片14和与激光阵列11连接的一对牵引电极24.每个导出电极24具有基部25 和延伸部26.基部25与激光阵列11电连接，并在散热片的侧面14e，14f上延伸。 延伸部分26从基部25延伸到散热器的顶表面14c或底表面14d上。 由于绘图电极从散热器的侧表面被引导到其顶表面或底表面，所以当将多个激光阵列单元安装到冷却歧管上时，可以防止牵引电极与冷却歧管相干扰， 在其横向方向。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005158886A

公开(公告)日：2005-06-16

申请号：JP2003392703

申请日：2003-11-21

Applicant: Hamamatsu Photonics Kk ,  浜松ホトニクス株式会社

Inventor： MATSUMOTO OSAMU ,  KAWASHIMA TOSHIYUKI ,  KANABE TADASHI

IPC: H01S3/094 ,  H01S3/042

Abstract: PROBLEM TO BE SOLVED: To provide an optical amplifier which can protect an excitation light source even if a solid-state laser medium is broken. SOLUTION: The excited light beams emitted from the excitation light sources 32a, 32b are radiated to a solid-state laser medium 31 passing through optical guides 36a, 36b and windows 35a, 35b. With radiation of the excited light beam to the solid-state laser medium 31, the light beam of the predetermined wavelength is amplified in the solid-state laser medium 31. If the windows 35a, 35b are broken resulting in the flooding of the cooling water, the excitation light sources 32a, 32b accommodated in the light source accommodating portions 34a, 34b are never contaminated with the cooling water. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供即使固体激光介质破裂也能保护激发光源的光放大器。 解决方案：从激发光源32a，32b发射的激发光束照射到通过光导36a，36b和窗口35a，35b的固态激光介质31中。 通过将激发的光束照射到固态激光介质31，在固体激光介质31中放大预定波长的光束。如果窗口35a，35b被破坏，导致冷却水的溢流 容纳在光源容纳部分34a，34b中的激发光源32a，32b不会被冷却水污染。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JPH09234584A

公开(公告)日：1997-09-09

申请号：JP4179796

申请日：1996-02-28

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KAWASHIMA TOSHIYUKI ,  WAKUTA TOSHIMITSU

IPC: B23K37/00 ,  B23K26/03 ,  B23K26/064 ,  B23K26/14 ,  B23K26/60 ,  B23K26/70 ,  B23K26/02 ,  B23K26/08

Abstract: PROBLEM TO BE SOLVED: To remove even a material of large bonding and dissociating energy by supplying an inert gas from a gas supplying source into a shade case and using F2 laser oscillator for emitting F2 laser beam. SOLUTION: A substrate is mounted on a sample stand, a fall illumination light source 66 is turned on, and the state of the front face of substrate is observed with TV monitor connected to CCD camera 72. A vacuum pump 24 and an exhaust fan are acted, the inside of a protect cover 84 is exhausted and it is made to a negative pressure state. Succeedingly, a nitrogen gas is supplied from a gas supplying source with a flow regulating valve 82. Then, when O2 density is made less than a specified value, it is irradiated with F laser beam. Therefore, even the material of large bonding and dissociating energy which can be not removed with an ArF exicimer laser, etc., can be removed.