STRESS BALANCE LAYER ON SEMICONDUCTOR WAFER BACKSIDE
    61.
    发明申请
    STRESS BALANCE LAYER ON SEMICONDUCTOR WAFER BACKSIDE 审中-公开
    半导体波背上的应力平衡层

    公开(公告)号:WO2010144848A2

    公开(公告)日:2010-12-16

    申请号:PCT/US2010038383

    申请日:2010-06-11

    Abstract: A semiconductor component (such as a semiconductor wafer or semiconductor die) includes a substrate having a front side and a back side. The semiconductor die/wafer also includes a stress balance layer on the back side of the substrate. An active layer deposited on the front side of the substrate creates an unbalanced stress in the semiconductor wafer/die. The stress balance layer balances stress in the semiconductor wafer/die. The stress in the stress balance layer approximately equals the stress in the active layer. Balancing stress in the semiconductor component prevents warpage of the semiconductor wafer/die.

    Abstract translation: 半导体元件(例如半导体晶片或半导体晶片)包括具有正面和背面的基板。 半导体管芯/晶片还包括在衬底的背面上的应力平衡层。 沉积在基板的正面上的有源层在半导体晶片/管芯中产生不平衡的应力。 应力平衡层平衡半导体晶片/模具中的应力。 应力平衡层中的应力大致等于有源层中的应力。 在半导体部件中平衡应力可以防止半导体晶片/裸片翘曲。

    PREDICTIVE MODELING OF INTERCONNECT MODULES FOR ADVANCED ON-CHIP INTERCONNECT TECHNOLOGY
    63.
    发明申请
    PREDICTIVE MODELING OF INTERCONNECT MODULES FOR ADVANCED ON-CHIP INTERCONNECT TECHNOLOGY 审中-公开
    互连模块用于先进片上互联技术的预测建模

    公开(公告)号:WO2010011448A3

    公开(公告)日:2010-04-01

    申请号:PCT/US2009047668

    申请日:2009-06-17

    CPC classification number: G06F17/5036

    Abstract: A computer program product estimates performance of an interconnect structure of a semiconductor integrated circuit (IC). The program product includes code executing on a computer to calculate at least one electrical characteristic of the interconnect structure based on input data accounting for multiple layers of the interconnect structure. The electrical characteristics can be capacitance, resistance, and/or inductance. The capacitance may be based upon multiple components, including a fringe capacitance component, a terminal capacitance component, and a coupling capacitance component.

    Abstract translation: 计算机程序产品估计半导体集成电路(IC)的互连结构的性能。 该程序产品包括在计算机上执行的代码,用于基于考虑互连结构的多个层的输入数据来计算互连结构的至少一个电特性。 电特性可以是电容,电阻和/或电感。 电容可以基于多个部件,包括边缘电容部件,端子电容部件和耦合电容部件。

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