公开(公告)号：FR2887331B1

公开(公告)日：2008-01-25

申请号：FR0506083

申请日：2005-06-15

Applicant: PEUGEOT CITROEN AUTOMOBILES SA ,  COMMISSARIAT ENERGIE ATOMIQUE

Inventor： BAVOUX BERNARD ,  PAULY MAXIME ,  DANEL JEAN SEBASTIEN ,  ROBERT PHILIPPE

IPC: G01L23/10 ,  G01K13/02 ,  G01L23/22 ,  G01L23/24

公开(公告)号：FR2898884A1

公开(公告)日：2007-09-28

申请号：FR0651053

申请日：2006-03-27

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE ,  DURAFFOUR LAURENT

IPC: B81B7/02 ,  G01C19/56 ,  G01P15/097

Abstract: L'invention concerne un capteur résonant MEMS de type de surface, comportant un résonateur (4) à excitation dans un plan, caractérisé en ce qu'il comporte :- une première zone (2), dite zone épaisse, présentant une première épaisseur (E1), formant masse sismique,- une deuxième zone (4), mince, présentant une deuxième épaisseur (E2), inférieure à la première, pour la détection.

公开(公告)号：DE602004008331D1

公开(公告)日：2007-09-27

申请号：DE602004008331

申请日：2004-12-14

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: B81B7/00 ,  G01P1/02 ,  H01L21/54 ,  H01L21/56 ,  H01L23/10

Abstract: The micro-component has a hermetic micro-cavity (6) delimited by a cover comprising two layers (4, 7). A third layer (9) is disposed between the layers (4, 7). An additional micro-cavity (11) communicating with an opening in the layer (7) is disposed between the layers (4, 7). An additional opening adjacent to the cavity (11) is formed in the layer (9), offcentered with respect to an opening (5) and delimited by the layer (7). An independent claim is also included for a process of fabricating a hermetic micro-cavity of a micro-component.

公开(公告)号：DE602004008075D1

公开(公告)日：2007-09-20

申请号：DE602004008075

申请日：2004-06-30

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: H01H1/00 ,  H01H59/00

公开(公告)号：FR2890439A1

公开(公告)日：2007-03-09

申请号：FR0509174

申请日：2005-09-08

Applicant: PEUGEOT CITROEN AUTOMOBILES SA ,  COMMISSARIAT ENERGIE ATOMIQUE

Inventor： BAVOUX BERNARD ,  DANEL JEAN SEBASTIEN ,  ROBERT PHILIPPE ,  PAULY MAXIME

IPC: G01D5/00 ,  G08C17/02

Abstract: Cette structure de capteur notamment pour un environnement sévère dans un véhicule automobile, est caractérisée en ce qu'elle comporte un corps de capteur (1) comportant à une extrémité, un élément (2) sensible à la grandeur à mesurer dans l'environnement sévère et à une autre extrémité, un circuit (3) de raccordement de celui-ci, placé hors de l'environnement sévère, séparés physiquement l'un de l'autre, raccordés par des moyens de transmissions d'informations radiofréquences et entre lesquels sont prévus des moyens (4) perméables aux informations, de protection du circuit de raccordement (3) à l'encontre de l'environnement.

公开(公告)号：FR2864341B1

公开(公告)日：2006-03-24

申请号：FR0315031

申请日：2003-12-19

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: H01L23/02 ,  B81B7/00 ,  G01P1/02 ,  H01L21/54 ,  H01L21/56 ,  H01L23/10

公开(公告)号：FR2864340B1

公开(公告)日：2006-03-24

申请号：FR0315029

申请日：2003-12-19

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: H01L23/02 ,  B81B7/00 ,  G01P1/02 ,  H01L21/54 ,  H01L21/56 ,  H01L23/10

Abstract: The micro-component has a hermetic micro-cavity (6) delimited by a cover comprising two layers (4, 7). A third layer (9) is disposed between the layers (4, 7). An additional micro-cavity (11) communicating with an opening in the layer (7) is disposed between the layers (4, 7). An additional opening adjacent to the cavity (11) is formed in the layer (9), offcentered with respect to an opening (5) and delimited by the layer (7). An independent claim is also included for a process of fabricating a hermetic micro-cavity of a micro-component.

公开(公告)号：FR2857153B1

公开(公告)日：2005-08-26

申请号：FR0350278

申请日：2003-07-01

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: H01H1/00 ,  H01H59/00 ,  H01H15/16 ,  H01H37/52 ,  H01H50/54

公开(公告)号：FR2864341A1

公开(公告)日：2005-06-24

申请号：FR0315031

申请日：2003-12-19

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: B81B7/00 ,  G01P1/02 ,  H01L21/54 ,  H01L21/56 ,  H01L23/10 ,  H01L23/02

Abstract: The micro-component has a hermetic micro-cavity (6) delimited by a cover (4) with an opening (5). A sealing layer (9) delimiting the micro-cavity is formed on the cover. A stopper (8) enclosing the opening and a part of the cover in the periphery of the opening is disposed on the sealing layer. The sealing layer is formed of a glass or polymeric material susceptible to deformation by fluctuation. An independent claim is also included for a process of fabricating a micro-cavity of a micro-component.

公开(公告)号：FR2864340A1

公开(公告)日：2005-06-24

申请号：FR0315029

申请日：2003-12-19

Applicant: COMMISSARIAT ENERGIE ATOMIQUE

Inventor： ROBERT PHILIPPE

IPC: B81B7/00 ,  G01P1/02 ,  H01L21/54 ,  H01L21/56 ,  H01L23/10 ,  H01L23/02

Abstract: The micro-component has a hermetic micro-cavity (6) delimited by a cover comprising two layers (4, 7). A third layer (9) is disposed between the layers (4, 7). An additional micro-cavity (11) communicating with an opening in the layer (7) is disposed between the layers (4, 7). An additional opening adjacent to the cavity (11) is formed in the layer (9), offcentered with respect to an opening (5) and delimited by the layer (7). An independent claim is also included for a process of fabricating a hermetic micro-cavity of a micro-component.