公开(公告)号：US4900367A

公开(公告)日：1990-02-13

申请号：US266174

申请日：1988-11-02

Applicant: Isoris S. Gergis

Inventor： Isoris S. Gergis

IPC: G01J5/34 ,  H01L37/02

CPC classification number: H01L37/02 ,  G01J5/34 ,  G01J2005/345

Abstract: A fully reticulated pyroelectric imager is made by affixing a first major surface of a layer of poled pyroelectric material to a substrate and polishing a second major surface of the pyroelectric layer to reduce the layer to a predetermined thickness. An electrically conductive electrode layer is deposited on the second major surface of the pyroelectric layer and portions of the electrode layer are selectively removed to define a two dimensional array of front side electrodes on the pyroelectric layer. Portions of the pyroelectric layer are then selectively removed to define a two dimensional array of pyroelectric detector elements on the substrate, with one of the front side electrodes on the second major surface of each detector element. A polymer layer is deposited over the arrays of front side electrodes and detector elements and a portion of the polymer layer is selectively removing over each front side electrode to create a via to each front side electrode. A two dimensional array of electrically conductive pads is deposited on the polymer layer such that each pad contacts a front side electrode through the corresponding via. The detector element array is mated to a multiplexer chip by connecting each pad on the detector array to circuitry on the multiplexer chip and the substrate is removed. An electrically conductive radiation absorbing layer is then deposited on the first major surface of each pyroelectric detector element.

Abstract translation: 通过将极化的热电材料层的第一主表面固定到基底上并且研磨热电层的第二主表面以将层减小到预定厚度来制造完全网状的热电成像器。 导电电极层沉积在热电层的第二主表面上，并且选择性地去除电极层的部分以限定热电层上的前侧电极的二维阵列。 然后选择性地去除热电层的部分以在衬底上限定热电检测器元件的二维阵列，其中每个检测器元件的第二主表面上的前侧电极之一。 聚合物层沉积在前侧电极和检测器元件的阵列上，并且聚合物层的一部分选择性地去除每个前侧电极以形成每个前侧电极的通孔。 导电焊盘的二维阵列沉积在聚合物层上，使得每个焊盘通过相应的通孔接触前侧电极。 检测器元件阵列通过将检测器阵列上的每个焊盘连接到多路复用器芯片上的电路并且去除衬底而与多路复用器芯片配合。 然后将导电辐射吸收层沉积在每个热电探测器元件的第一主表面上。

公开(公告)号：EP3028021A2

公开(公告)日：2016-06-08

申请号：EP14744323.8

申请日：2014-07-25

Applicant: Pyreos Ltd.

Inventor： GIEBELER, Carsten ,  CONWAY, Neil

IPC: G01J5/34

CPC classification number: H01L31/1884 ,  G01J1/44 ,  G01J5/023 ,  G01J5/024 ,  G01J5/046 ,  G01J5/34 ,  G01J2005/345 ,  H01L37/02 ,  H01L37/025 ,  H01L41/316

Abstract: The invention relates to a method for producing a microsystem (1) having pixels, comprising the following steps: providing a silicon wafer; producing a thermal silicon oxide layer on the surface of the silicon wafer as a base layer (5) having a thickness between 200 nm and 1000 nm by oxidizing the silicon wafer; producing a thin silicon oxide layer directly on the base layer (5) as a substrate layer (6) having a thickness of 100 nm to 700 nm by means of a thermal deposition method; producing a platinum layer directly on the substrate layer (6) by means of a thermal deposition method, which platinum layer has a thickness of 40 nm to 200 nm, whereby an intermediate product comprising the silicon wafer, the base layer (5), the substrate layer (6), and the platinum layer is produced; cooling the intermediate product to room temperature; structuring the platinum layer in a pixel-like manner by removing superfluous areas of the platinum layer, whereby bottom electrodes (8, 12) of the pixels (7, 8) are formed in shape of pixels on the substrate layer (5) by the remaining areas of the platinum layer; removing material on the side of the silicon wafer facing away from the base layer (5), such that a frame (3) remains and a membrane (4) formed by the base layer (5) and the substrate layer (6) is tensioned by the frame (3); finishing the microsystem (1).

公开(公告)号：EP2803962A1

公开(公告)日：2014-11-19

申请号：EP14164932.7

申请日：2014-04-16

Applicant: ROBERT BOSCH GMBH

Inventor： Schmidt, Claus ,  Jiang, Hongquan

IPC: G01J5/08 ,  G01J5/02 ,  G01J5/06 ,  G01J5/34 ,  G01J5/00

CPC classification number: G01J5/34 ,  G01J5/024 ,  G01J5/061 ,  G01J5/0881 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/062 ,  G01J2005/345

Abstract: Es wird eine pyroelektrische Sensorvorrichtung (100) vorgeschlagen. Die pyroelektrische Sensorvorrichtung (100) weist eine pyroelektrische Erfassungseinrichtung (110) zum Erfassen von Wärmestrahlung auf. Auch weist die pyroelektrische Sensorvorrichtung (100) eine thermoelektrische Temperiereinrichtung (120) auf. Die thermoelektrische Temperiereinrichtung (120) ist thermisch mit der pyroelektrischen Erfassungseinrichtung (110) gekoppelt. Auch ist die thermoelektrische Temperiereinrichtung (120) ansteuerbar, um eine thermische Wechselbeanspruchung der pyroelektrischen Erfassungseinrichtung (110) zu bewirken.

Abstract translation: 它提出了一种热电传感器设备（100）。 热电传感器装置（100）包括用于检测热辐射的热释电检测装置（110）。 此外，热电传感器装置（100）的热电温度控制装置（120）。 所述热电温度控制装置（120）被热耦合到所述热电探测器（110）。 另外，所述热电温度控制装置（120）控制的，以实现所述热电探测器（110）的一个热循环。

公开(公告)号：EP0375205B1

公开(公告)日：1993-09-01

申请号：EP89312730.8

申请日：1989-12-06

Applicant: THORN EMI plc

Inventor： Nix, Elvin Leonard ,  Sibbald, Alastair ,  Taylor, Stanley

IPC: G01J5/34 ,  H01L37/02 ,  H04N5/33

CPC classification number: H01L37/02 ,  G01J5/34 ,  G01J2005/345 ,  H04N5/33

公开(公告)号：EP0461837A3

公开(公告)日：1992-09-16

申请号：EP91305213.0

申请日：1991-06-10

Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventor： Tomita, Yoshihiro ,  Takayama, Ryoichi ,  Yoshikawa, Motonobu ,  Yamamoto, Yoshiharu

IPC: G01J5/34 ,  G08B13/193

CPC classification number: G01J5/34 ,  G01J2005/345

Abstract: An apparatus for detecting position or temperature distribution of an object has a lens which is rotated around a pyroelectric type infrared sensor to collect incident infrared ray on the sensor while scanning the incident infrared ray in a rotational direction. The optical scanning is operated also in the longitudinal direction by providing with a plurarity of lenses having different view in the longitudinal direction, the lenses being rotated sequentialy around the sensor. Further, detection of temperature of an object is conducted without using optical chopper by alternately observing the object and a standard temperature material which is arranged in a part of view, or by providing a stationary slit unit on a curved surface formed around a center axis which is the same as the rotation axis of the lens and a movable slit unit heaving the same pitch and arranged adjacent to the stationary slit unit and rotating together with the lens to intermitting the incident infrared ray.

公开(公告)号：EP0375205A3

公开(公告)日：1991-08-21

申请号：EP89312730.8

申请日：1989-12-06

Applicant: THORN EMI plc

Inventor： Nix, Elvin Leonard ,  Sibbald, Alastair ,  Taylor, Stanley

IPC: G01J5/34 ,  H01L37/02 ,  H04N5/33

CPC classification number: H01L37/02 ,  G01J5/34 ,  G01J2005/345 ,  H04N5/33

Abstract: A thermal imaging device includes an array of pyroelectric detector elements, 31, 32, 33 supported by an array of pillars 36, the pillars also being effective to enable the passage of electrical signals between the detector elements and an electrical signal processing means 38. Each pillar 36 is separated from a respective detector electrode 33 by an elongate electrically condutive strip 35. The device includes areas of infra-red absorbant material 32a effective to conduct heat from non-electroded parts of the device into adjacent pyroelectric detector elements.

公开(公告)号：EP0345878A3

公开(公告)日：1991-07-03

申请号：EP89201399.6

申请日：1989-06-01

Applicant: GEC-MARCONI LIMITED

Inventor： Turnbull, Andrew Alfred ,  Cox, Andrew Ian

IPC: G01J5/34 ,  G08B13/18

CPC classification number: G08B13/191 ,  G01J5/34 ,  G01J2005/345 ,  H04N5/33

Abstract: A thermal radiation detection apparatus has an array of pyroelectric detector devices (10) for receiving radiation from a scene whose outputs, e.g. from associated source followers (12) are supplied via a multiplexer (14) in turn to a processing circuit (20) which is responsive to each detector device signal to produce an output which substantially faithfully reproduces the received radiation signal without requiring that a chopper be used. The processing circuit operates with a correction factor to produce an output signal with first and second components proportional respectively to the device signal and its rate of change, the relative proportions of the components being in a ratio according to the device's thermal time constant. Initial device voltage level and the device's electrical time constant effects can be corrected by additional processing in the circuit (20), producing a third component of the output proportional to the integral of the device's output and in a ratio to the first component according to the electrical time constant.

公开(公告)号：JP5962167B2

公开(公告)日：2016-08-03

申请号：JP2012095353

申请日：2012-04-19

Applicant: セイコーエプソン株式会社

Inventor： 山村 光宏

IPC: G01J1/44 ,  G01V8/10 ,  G01N21/35 ,  H04N5/33 ,  G01J1/42

CPC classification number: G01J5/34 ,  G01J5/22 ,  G01J2005/345

公开(公告)号：JP5685927B2

公开(公告)日：2015-03-18

申请号：JP2010287147

申请日：2010-12-24

Applicant: セイコーエプソン株式会社

Inventor： 泰紀 小出 ,  泰紀 小出

IPC: G01J1/42 ,  G01J5/34

CPC classification number: G01J5/34 ,  G01J1/46 ,  G01J2005/345

公开(公告)号：JP2014178247A

公开(公告)日：2014-09-25

申请号：JP2013053231

申请日：2013-03-15

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： HAMADA YASUAKI

IPC: G01J1/02 ,  G01J5/34 ,  H01L37/02

CPC classification number: G01J5/34 ,  G01J5/026 ,  G01J5/0825 ,  G01J2005/0077 ,  G01J2005/345

Abstract: PROBLEM TO BE SOLVED: To provide a sensor capable of improving the sensitivity of an infrared sensor.SOLUTION: The sensor includes: a ferroelectric substance element 10 having a first electrode 11, a second electrode 12 and a ferroelectric film 13 disposed between the first electrode and the second electrode, and composed of a ferroelectric substance; and detection means 20 for reading a charge generated in the ferroelectric substance element. The detection means is configured to apply a first voltage for aligning the polarization directions of the ferroelectric film and a second voltage for inverting the polarization of at least a part of the ferroelectric film whose polarization directions are aligned, and to perform reading.

Abstract translation: 要解决的问题：提供能够提高红外线传感器的灵敏度的传感器。解决方案：传感器包括：铁电物质元件10，具有第一电极11，第二电极12和强电介质膜13，铁电体膜13设置在第一电极 和第二电极，由铁电体构成; 以及用于读取在铁电物质元件中产生的电荷的检测装置20。 检测装置被配置为施加用于对准铁电体膜的偏振方向的第一电压和用于反转偏振方向对准的至少一部分铁电体膜的偏振的第二电压，并进行读取。