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公开(公告)号：US20170059485A1
公开(公告)日：2017-03-02
申请号：US15250136
申请日：2016-08-29
Applicant: CAPTL LLC
Inventor： Masanobu Yamamoto , J. Paul Robinson
CPC classification number: G01N33/582 , B01L3/502761 , G01N15/1434 , G01N15/1456 , G01N15/1459 , G01N15/1484 , G01N21/645 , G01N35/00069 , G01N2035/00881 , G01N2201/1045
Abstract: A measurement system includes a system for causing relative motion between a sample and an irradiation spot. The sample includes fluorescent markers having respective wavelengths. A gating system provides a gating signal based at least in part on resultant light substantially at an irradiation wavelength. A detection system detects fluorescent light from the irradiated markers and provides detection signals representing the fluorescent light detected concurrently with a gate-open signal. In some examples, the detection system detects fluorescent light at multiple wavelengths and provides respective detection signals. A spectral discriminator arranged optically between the sample and the detection system receives the fluorescent light from the sample and provides respective fluorescent light at the wavelengths to the detection system. A flow cytometer can spectrally disperse resultant fluorescent light and measure the wavelengths separately. Light from a sample disposed over a reflective phase grating can be dispersed, measured, and gated.
Abstract translation: 测量系统包括用于引起样品和照射点之间的相对运动的系统。 样品包括具有各自波长的荧光标记。 门控系统至少部分地提供基本上在照射波长处的合成光的门控信号。 检测系统检测来自照射标记的荧光，并提供表示与门开启信号同时检测的荧光的检测信号。 在一些示例中，检测系统检测多个波长的荧光并提供相应的检测信号。 在样本和检测系统之间光学地布置的光谱鉴别器接收来自样品的荧光，并向检测系统提供波长的相应荧光。 流式细胞仪可以光谱分散所得的荧光并分别测量波长。 来自设置在反射相位光栅上的样品的光可以被分散，测量和门控。
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公开(公告)号：US20160069820A1
公开(公告)日：2016-03-10
申请号：US14665748
申请日：2015-03-23
Applicant: GENERAL ELECTRIC COMPANY
Inventor： Manuel Kenneth Bueno , Robert Martin Roney, Jr.
IPC: G01N21/954 , G01N21/88 , G01S17/89
CPC classification number: G01N21/8851 , G01N21/88 , G01N21/954 , G01N2021/9544 , G01N2021/9546 , G01N2021/9548 , G01N2201/06113 , G01N2201/104 , G01N2201/1045 , G01S7/4815 , G01S7/4817 , G01S7/4818 , G01S17/88 , G01S17/89
Abstract: A system includes a vessel floating on a body of water. The system also includes at least one conduit extending from the vessel to below the body of water. The system also includes a scanning device disposed within the at least one conduit. The scanning device includes at least one two-dimensional (2D) line scanner and a rotary encoder coupled to the at least one 2D line scanner. The scanning device is configured to generate three-dimensional (3D) image data of a surface of the at least one conduit or at least one component disposed within the at least one conduit.
Abstract translation: 系统包括浮在水体上的船只。 该系统还包括从容器延伸到水体下方的至少一个导管。 该系统还包括设置在至少一个导管内的扫描装置。 扫描装置包括至少一个二维（2D）线扫描器和耦合到至少一个2D线扫描器的旋转编码器。 扫描装置被配置为生成至少一个管道的表面或设置在至少一个管道内的至少一个部件的表面的三维（3D）图像数据。
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公开(公告)号：US20150346115A1
公开(公告)日：2015-12-03
申请号：US14727641
申请日：2015-06-01
Applicant: Eric J. Seibel , Yuanzheng Gong , Fred Braun , David L. Gourley
Inventor： Eric J. Seibel , Yuanzheng Gong , Fred Braun , David L. Gourley
CPC classification number: G01N21/954 , A61B1/00009 , A61B1/00096 , A61B1/00165 , A61B1/00172 , A61B1/00193 , A61B1/005 , A61B1/07 , G01N2021/646 , G01N2021/6484 , G01N2021/8887 , G01N2021/9546 , G01N2201/0833 , G01N2201/084 , G01N2201/101 , G01N2201/1045 , G06T7/0004 , G06T7/33 , G06T2207/10012 , G06T2207/10028 , G06T2207/30164 , H04N5/2256 , H04N13/207 , H04N13/211 , H04N13/282 , H04N2005/2255 , H04N2013/0081
Abstract: Embodiments regard 3D optical metrology of internal surfaces. Embodiments may include a system having an imaging device to capture multiple images of an internal surface, including a first image that is captured at a first location on an axial path and a second image that is captured at a second location on the axial path, and a transport apparatus to move the imaging device along the axial path. The system further includes a control system that is coupled with the imaging, wherein the control system is to receive the multiple images from the imaging device and to generate a 3D representation of the surface based at least in part on content information and location information for the multiple images.
Abstract translation: 实施例涉及内表面的3D光学测量。 实施例可以包括具有成像装置以捕获内表面的多个图像的系统，包括在轴向路径上的第一位置处捕获的第一图像和在轴向路径上的第二位置处被捕获的第二图像，以及 沿着轴向移动成像装置的输送装置。 该系统还包括与成像耦合的控制系统，其中控制系统将从成像设备接收多个图像，并且至少部分地基于内容信息和位置信息来生成表面的3D表示 多个图像。
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公开(公告)号：US20130301042A1
公开(公告)日：2013-11-14
申请号：US13976178
申请日：2011-10-21
Applicant: Yuta Urano , Toshifumi Honda , Yukihiro Shibata
Inventor： Yuta Urano , Toshifumi Honda , Yukihiro Shibata
IPC: G01N21/956
CPC classification number: G01N21/956 , G01B11/0608 , G01N21/9501 , G01N21/95623 , G01N2021/8854 , G01N2201/1045
Abstract: A defect inspection method includes: illuminating an area on surface of a specimen as a test object under a specified illumination condition; scanning a specimen to translate and rotate the specimen; detecting scattering lights to separate each of scattering lights scattered in different directions from the illuminated area on the specimen into pixels to be detected according to a scan direction at the scanning a specimen and a direction approximately orthogonal to the scan direction; and processing to perform an addition process on each of scattering lights that are detected at the step and scatter approximately in the same direction from approximately the same area of the specimen, determine presence or absence of a defect based on scattering light treated by the addition process, and compute a size of the determined defect using at least one of the scattering lights corresponding to the determined defect.
Abstract translation: 缺陷检查方法包括：在规定的照明条件下照射作为被检体的试样表面的面积; 扫描样品以平移和旋转样品; 检测散射光，根据扫描样本的扫描方向和与扫描方向大致正交的方向，将从样本上的照射区域向不同方向散射的散射光分离成要检测的像素; 对在步骤中检测到的每个散射光进行加法处理，并且从与样本的大致相同的区域大致相同的方向散射，基于通过加法处理的散射光确定缺陷的存在或不存在 并且使用与所确定的缺陷相对应的散射光中的至少一个来计算确定的缺陷的大小。
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公开(公告)号：US08477302B2
公开(公告)日：2013-07-02
申请号：US12412776
申请日：2009-03-27
Applicant: Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima , Akira Hamamatsu
Inventor： Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima , Akira Hamamatsu
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N21/9505 , G01N2021/8854 , G01N2021/8874 , G01N2201/103 , G01N2201/1045
Abstract: A defect inspection apparatus for inspecting a surface of a sample includes a stage for holding the sample, an illumination optical system that irradiates a laser beam to form a linear illuminated area on the surface of the sample, a detection optical system, and a signal processing system. The detection optical system includes a detector device having a plurality of pixels for detecting light scattered from the linear illuminated area of the surface of the sample, and that outputs in parallel a plurality of detection signals having mutually different sensitivities acquired from the plurality of pixels of the detector device. The signal processing system selects an unsaturated detection signal from the plurality of detection signals and detects a defect in accordance with the selected detection signal.
Abstract translation: 用于检查样品表面的缺陷检查装置包括用于保持样品的载物台，照射光学系统，其照射激光束以在样品的表面上形成线性照射区域，检测光学系统和信号处理 系统。 检测光学系统包括具有多个像素的检测器装置，用于检测从样品表面的线性照射区域散射的光，并且并行地输出具有从多个像素获得的具有相互不同的灵敏度的多个检测信号 检测器装置。 信号处理系统从多个检测信号中选择不饱和检测信号，并根据所选择的检测信号检测缺陷。
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Patent Agency Ranking
公开(公告)号：US20090279081A1
公开(公告)日：2009-11-12
申请号：US12412776
申请日：2009-03-27
Applicant: Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima , Akira Hamamatsu
Inventor： Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima , Akira Hamamatsu
IPC: G01N21/896
CPC classification number: G01N21/9501 , G01N21/9505 , G01N2021/8854 , G01N2021/8874 , G01N2201/103 , G01N2201/1045
Abstract: A defect inspection apparatus for inspecting a surface of a sample includes a stage for holding the sample, an illumination optical system that irradiates a laser beam to form a linear illuminated area on the surface of the sample, a detection optical system, and a signal processing system. The detection optical system includes a detector device having a plurality of pixels for detecting light scattered from the linear illuminated area of the surface of the sample, and that outputs in parallel a plurality of detection signals having mutually different sensitivities acquired from the plurality of pixels of the detector device. The signal processing system selects an unsaturated detection signal from the plurality of detection signals and detects a defect in accordance with the selected detection signal.
Abstract translation: 用于检查样品表面的缺陷检查装置包括用于保持样品的载物台，照射光学系统，其照射激光束以在样品的表面上形成线性照射区域，检测光学系统和信号处理 系统。 检测光学系统包括具有多个像素的检测器装置，用于检测从样品表面的线性照射区域散射的光，并且并行地输出具有从多个像素获得的具有相互不同的灵敏度的多个检测信号 检测器装置。 信号处理系统从多个检测信号中选择不饱和检测信号，并根据所选择的检测信号检测缺陷。
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公开(公告)号：US20080151259A1
公开(公告)日：2008-06-26
申请号：US11614837
申请日：2006-12-21
Applicant: Woo Sik Yoo
Inventor： Woo Sik Yoo
CPC classification number: G01N21/9501 , G01N21/95607 , G01N2021/8864 , G01N2201/1045
Abstract: A system and method for mapping a wafer includes scanning the wafer with a laser beam using a continuous spiraling pattern on the wafer surface, where the spiraling can be inward or outward. A microprocessor analyzes characteristics of the reflected, diffracted, and/or scattered beams and synchronizes each beam with a location on the wafer to generate a map of the wafer.
Abstract translation: 用于映射晶片的系统和方法包括使用在晶片表面上的连续螺旋图案的激光束扫描晶片，其中螺旋可以向内或向外。 微处理器分析反射，衍射和/或散射光束的特性，并使每个光束与晶片上的位置同步，以产生晶片的图。
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公开(公告)号：US07190447B2
公开(公告)日：2007-03-13
申请号：US11372556
申请日：2006-03-11
Applicant: Steven W. Meeks
Inventor： Steven W. Meeks
IPC: G01N21/00
CPC classification number: G01N21/9506 , G01B11/0616 , G01B11/0641 , G01B11/065 , G01B11/303 , G01B11/306 , G01N21/21 , G01N21/47 , G01N21/9501 , G01N21/958 , G01N2021/8427 , G01N2021/8841 , G01N2201/103 , G01N2201/104 , G01N2201/1045 , H01L22/12 , H01L2924/0002 , H01L2924/00
Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.
Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。
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公开(公告)号：US20060256327A1
公开(公告)日：2006-11-16
申请号：US11459586
申请日：2006-07-24
Applicant: Mehdi Vaez-Iravani , Guoheng Zhao , Stanley Stokowski
Inventor： Mehdi Vaez-Iravani , Guoheng Zhao , Stanley Stokowski
IPC: G01N21/88
CPC classification number: G01N21/95623 , G01N21/47 , G01N21/94 , G01N2201/1045
Abstract: A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam. For inspecting surface with a pattern thereon, the light from the surface is first passed through a spatial filter before it is imaged onto the charge-coupled devices. The spatial filter includes stripes of scattering regions that shift in synchronism with relative motion between the beam and the surface to block Fourier components from the pattern. The spatial filter may be replaced by reflective strips that selectively reflects scattered radiation to the detector, where the reflective strips also shifts in synchronism with the relative motion.
Abstract translation: 使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦束的入射平面中。 光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。 为了在其上检查具有图案的表面，来自表面的光首先在其被成像到电荷耦合器件之前通过空间滤光器。 空间滤波器包括散射区域的条带，其与波束和表面之间的相对运动同步地移动，以阻止来自图案的傅立叶分量。 空间滤波器可以被选择性地将散射的辐射反射到检测器的反射条替代，其中反射条也与相对运动同步地移动。
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公开(公告)号：US20040156042A1
公开(公告)日：2004-08-12
申请号：US10360512
申请日：2003-02-06
Inventor： Mehdi Vaez-Iravani , Guoheng Zhao , Stanley E. Stokowski
IPC: G01N021/00
CPC classification number: G01N21/95623 , G01N21/47 , G01N21/94 , G01N2201/1045
Abstract: A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam. For inspecting surface with a pattern thereon, the light from the surface is first passed through a spatial filter before it is imaged onto the charge-coupled devices. The spatial filter includes stripes of scattering regions that shift in synchronism with relative motion between the beam and the surface to block Fourier components from the pattern. The spatial filter may be replaced by reflective strips that selectively reflects scattered radiation to the detector, where the reflective strips also shifts in synchronism with the relative motion.
Abstract translation: 使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦束的入射平面中。 光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。 为了在其上检查具有图案的表面，来自表面的光首先在其被成像到电荷耦合器件之前通过空间滤光器。 空间滤波器包括散射区域的条带，其与波束和表面之间的相对运动同步地移动，以阻止来自图案的傅立叶分量。 空间滤波器可以被选择性地将散射的辐射反射到检测器的反射条替代，其中反射条也与相对运动同步地移动。
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