公开(公告)号：US10356531B2

公开(公告)日：2019-07-16

申请号：US15629518

申请日：2017-06-21

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico Giusti ,  Sebastiano Conti

IPC: H04R17/02 ,  B81B3/00 ,  B81C1/00 ,  H01L41/04 ,  H01L41/113 ,  H01L41/312 ,  H04R31/00 ,  H04R19/00 ,  H04R19/04 ,  G01L9/00

Abstract: A MEMS sensor, in particular a microphone, of a piezoelectric type, formed in a membrane of semiconductor material accommodating a compliant portion, which extends from a first surface to a second surface of the membrane. The compliant portion has a Young's modulus lower than the rest of the membrane. A sensitive region having piezoelectric material extends on the first surface, over the compliant portion and is fixed at its ends to the membrane on opposite sides of the compliant portion. A third area of the membrane, arranged between the compliant portion and the second surface, forms a hinge element.

公开(公告)号：US10024738B2

公开(公告)日：2018-07-17

申请号：US14539640

申请日：2014-11-12

Applicant: STMicroelectronics S.r.l.

Inventor： Sebastiano Conti ,  Daniele Prati ,  Domenico Giusti

IPC: G01L1/14

Abstract: A MEMS force sensor has: a substrate; a fixed electrode coupled to the substrate; and a mobile electrode suspended above the substrate at the fixed electrode to define a sensing capacitor, the mobile electrode being designed to undergo deformation due to application of a force to be detected. A dielectric material region is set on the fixed electrode and spaced apart by an air gap from the mobile electrode, in resting conditions. The mobile electrode comes to bear upon the dielectric material region upon application of a minimum detectable value of the force, so that a contact surface between the mobile electrode and the dielectric material region increases, in particular in a substantially linear way, as the force increases.

公开(公告)号：US20180052066A1

公开(公告)日：2018-02-22

申请号：US15783894

申请日：2017-10-13

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alberto Pagani ,  Bruno Murari ,  Marco Ferrera ,  Domenico Giusti ,  Daniele Caltabiano

IPC: G01L9/00 ,  G01L15/00

Abstract: A pressure sensor with double measuring scale includes: a flexible body designed to undergo deflection as a function of a the pressure; piezoresistive transducers for detecting the deflection; a first focusing region designed to concentrate, during a first operating condition, a first value of the pressure in a first portion of the flexible body so as to generate a deflection of the first portion of the flexible body; and a second focusing region designed to concentrate, during a second operating condition, a second value of said pressure in a second portion of the flexible body so as to generate a deflection of the second portion of the flexible body. The piezoresistive transducers correlate the deflection of the first portion of the flexible body to the first pressure value and the deflection of the second portion of the flexible body to the second pressure value.

公开(公告)号：US09843779B2

公开(公告)日：2017-12-12

申请号：US15162367

申请日：2016-05-23

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico Giusti ,  Roberto Carminati

IPC: G02B26/08 ,  H04N9/31 ,  G02B26/10 ,  G02B7/182

CPC classification number: H04N9/3135 ,  B81B3/0045 ,  G02B7/1821 ,  G02B26/0858 ,  G02B26/101 ,  G02B26/105 ,  H04N9/3173

Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.

公开(公告)号：US20150367641A1

公开(公告)日：2015-12-24

申请号：US14310898

申请日：2014-06-20

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico Giusti ,  Daniele Prati

IPC: B41J2/14 ,  B41J2/16

CPC classification number: B41J2/14064 ,  B41J2/14056 ,  B41J2/14072 ,  B41J2/1412 ,  B41J2/14129 ,  B41J2002/14403 ,  B41J2202/11 ,  Y10T29/49352

Abstract: The present disclosure is directed to a microfluidic die that includes a first larger heater and a second smaller heater is a single chamber. The first heater is configured to form a primary bubble that ejects fluid from a nozzle associated with the chamber. The second heater is configured to form a secondary bubble to prevent blow back caused when the primary bubble bursts and ejects fluid from the nozzle. The first and second heater may be coupled to a single input trace and a single ground trace.

Abstract translation: 本公开涉及包括第一较大加热器并且第二较小加热器是单室的微流体管芯。 第一加热器被配置成形成从与腔室相关联的喷嘴喷出流体的初级气泡。 第二加热器构造成形成二次气泡，以防止当初级泡沫从喷嘴中喷出并喷射流体时引起的回吹。 第一和第二加热器可以耦合到单个输入迹线和单个接地迹线。